CYPSeries

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Table 2 10 Particle concentration (particles/m) Class M3.5 [Class100] 10 10 Class M2.5 [Class10] Inner cover holding screw tightening torque [Nm] 10 Tightening torque Model Screw size Class M1.5 [Class1] CYP15 0.3 M3 x 0.5 10 CYP32 2.45 M6 x 1 10 0.01 0.1 1 10 Plate Particle diameter (m) Note

CYPSeries

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Table 2 10 Particle concentration (particles/m) Class M3.5 [Class100] 10 10 Class M2.5 [Class10] Inner cover holding screw tightening torque [Nm] 10 Tightening torque Model Screw size Class M1.5 [Class1] CYP15 0.3 M3 x 0.5 10 CYP32 2.45 M6 x 1 10 0.01 0.1 1 10 Plate Particle diameter (m) Note

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Shock absorber model Applicable bore (mm) CLS ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 RB1412 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 CLQ RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 MLGP Side Support RLQ Side support A MLU ML1C D-X 20Data Side support B A B C D E F G H J Part no.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Shock absorber model Applicable bore (mm) CLS ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 RB1412 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 CLQ RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 MLGP Side Support RLQ Side support A MLU ML1C D-X 20Data Side support B A B C D E F G H J Part no.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

LJ1H

12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

PA300/500/700

VH 9 119.5 (Piping port) Rc 3/8, 1/2 VHS 42 31 9 3(R) 1(P) 3.5 108.5 (Breathing port) M5 x 0.8 A B Body ported: VPA742V41 31.5 NC NO 2(A) 33 40 4.5 2-5.2 52 Switch mark (Mounting hole) (PA port) Rc 1/8 (Mounting groove for M6 thread) 2-R 3.2 2-5.2 Bracket (Mounting hole) PA 63.9 63 63 56.5 38.5 5.5 31.5 2 52 31 74 60 9 119.5 (Piping port) Rc 3/8, 1/2 42 31 9 3(R) 1(P) 3.5 (Breathing port

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Metal seal 22 or less 2.6 95 Single VQ2101 2.2 0.30 0.28 0.80 51 or less 0.55 31 or less Rubber seal 24 or less 3.2 VQ2200 2.0 0.15 0.15 0.60 20 or less 0.46 20 or less Metal seal 15 or less 2.6 Double VQ2201 2.2 0.30 0.28 0.80 26 or less 0.55 26 or less Rubber seal 20 or less 3.2 VQ2300 2.0 0.18 0.15 0.46 58 or less 0.46 38 or less Metal seal 29 or less 2.0 Closed center VQ2000 VQ2301 2.0

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Metal seal 22 or less 2.6 95 Single VQ2101 2.2 0.30 0.28 0.80 51 or less 0.55 31 or less Rubber seal 24 or less 3.2 VQ2200 2.0 0.15 0.15 0.60 20 or less 0.46 20 or less Metal seal 15 or less 2.6 Double VQ2201 2.2 0.30 0.28 0.80 26 or less 0.55 26 or less Rubber seal 20 or less 3.2 VQ2300 2.0 0.18 0.15 0.46 58 or less 0.46 38 or less Metal seal 29 or less 2.0 Closed center VQ2000 VQ2301 2.0

100

m3/year 15 s 150 L/min (ANR) ON/OFF operation can be set freely within the set value range.

RLQ

800) 258-9200-www.stevenengineering.com 5.5 5.5 5.5 6.5 1 pc. 2 pcs. 20 20 20 20 20 20 CNA The operating ranges are provided as guidelines including hystereses and are not guaranteed values (assuming approximately 30% variations).

E-P HYREG

0.1 0.1 VY130-5 VY140-5 VY150-5 0 1 2 3 4 5 0 1 2 3 4 5 0 1 2 3 4 5 V V V VY130-6 VY140-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 mA mA mA 4 0 8 12 16 20 4 0 8 12 16 20 4 0 8 12 16 20 2 2 2 VY130-8 0 5 10 15 20 VY140-8 0 5 10 15 20 VY150-8 0 5 10 15 20 3 3 3 mA mA mA Command signal Command signal Command signal VY1700/1701 VY1900/1901 Command

IDX-OM-W038

IDX-OM-W038 . (17) (17) mm IDH6IDHA6 ( ( 1.25 6.5 Rc1/2 N.C N.O M3 (N.C:) (N.O:) 2 6.5 :1.25m m :M3 Rc1/2 31 15 (N.O) (N O 10 2 244 35 184 392 17 2 1 80 223 321 300 1 485 70 372 568 ( 10) ( 10) 240 2 15 1 306 270 63 IDH Series IDX-OM-W038 . 6.3 6.2.

Table of Contents

M3 screw For details on specifications and handling, refer to the separate technical instruction manual.

Series MHR3 11- 3 Finger Rotary Actuated Air Gripper 22- Size: 10, 15

: MDHR3-10R 11221122MDHR3-10E port location 3 x M3 x 0.5 thread depth 6 P.C.D.24 A (Mounting thread) 17.5 20 120 120 40 2-3 B 8.5 25 Finger closing port M3 x 0.5 M3 x 0.5 25 Finger closing port Finger opening port M3 x 0.5 M3 x 0.5 9.5 Finger opening port 44 +0.02 2 x 3 0 depth 6 31 (A, B common view) 0 9h9-0.036 4 x M3 x 0.5 thread depth 6 2 x 4.2 (A, B common view) 9.7 4.7 1 19.5 10.1 5.8

Compact Vacuum Ejector Series ZQ

0.3 0.4 0.5 0.6 Suction flow (l/min(ANR)) Supply pressure (MPa) ZQ110 Exhaust characteristics ZQ110 Flow characteristics Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) Maximum vacuum pressure -80 -80 60 -60 -60 50 40 -40 -40 30 Air consumption 20 -20 -20 10 Maximum suction flow Suction flow (l/min(ANR)) 25 20 15

ZQ

Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) Maximum vacuum pressure -80 -80 60 -60 -60 50 40 -40 -40 30 Air consumption 20 -20 -20 10 Maximum suction flow Suction flow (l/min(ANR)) 25 20 15 10 5 0 0.1 0 0.2 0.3 0.4 0.5 0.6 Supply pressure (MPa) 13-9-3 4 Series ZQ Specifications Ejector Weight Switch and suction

CEx-OMQ0011

P1 No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 59 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

nickel plated Round head combination screw M3 x 31, Matt nickel plated Blanking plate SYJ700-10-2 Gasket SYJ700-5-1 Gasket Gasket SYJ700-5-3 SYJ700-5-4 Applicable base Sub-plate SS3YJ7-40 SS3YJ7-41 SS3YJ7-42 SS3YJ7-41R SS3YJ7-42R Applicable base SS3YJ7-20 SS3YJ7-21 SS3YJ7-21R Manifold base Manifold base Caution Mounting screw tightening torques M3: 0.8 Nm Use caution to the assembly orientation

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQD 24V 12V 100V 200V 110V 220V 24V DC 12V DC 100V AC 200V AC 110V AC 220V AC AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 To remove manifold from DIN rail: 1) Loosen the clamp screw on the A side of both ends of the manifold. 2) Lift the A side of the manifold off the DIN rail and slide it in the direction of the B side.