EXxx-OMP0004CN

3 E5H RX5FRX50 165H RY5FRY50 RX0F RY0F 15 E6H RX6FRX60 166H RY6FRY60 RX10 RY10 16 4 E7H RX7FRX70 167H RY7FRY70 RY11 17 E8H RX8FRX80 168H RY8FRY80 RY12 18 5 E9H RX9FRX90 169H RY9FRY90 : : EAH RXAFRXA0 16AH RYAFRYA0 RY1E 30 6 EBH RXBFRXB0 16BH RYBFRYB0 RX1F RY1F 31 EX260-SMJ3/4 I/O (1 ) (RX) (RY) RX00 RY00 0 RY01 1 RY02 2 : : RY0E 14 RX0F RY0F 15 RX10 RY10 RX1F RY1F I/O 32 /32 0OFF

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

BH BI (UU) 2-M3 x 0.5 (opposite side, same location) (For front port, use hexagon socket head set screw) Q H 2-J through JA depth of counter bore JB (opposite side, same location) 1.5 S BE CA CB BF DD D BD BG A 2.2 (0.4) Note 1) SD 16 BA 2-M3 x 0.5 depth 4 BB W 2-M3 x 0.5 (For side port, use hexagon socket head set screw) N BC Note 2) For the 180 specification, the slated line area do not

90

. 4 Pressure gauge (Option) Panel 36 28 5.5 17.4 32 30 9.5 M12 x 1 Mounting hole 2 5.5 5.5 M28 x 1.5 113.3 BLEED 2 x 1/4 Port size 72 63 63 45.6 14 OUT IN 43 2 x 1/8 Pressure gauge port 60.5 50 EXH EXH When connecting to the EXH port, contact your SMC sales representative separately.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

PF2D5--1 (With voltage output type) PF2D540-19 Display unit (PF2D30/31) 186 Sensor unit 78 86 Brown 6 2 Analog output Switch output or Pulse output Main circuit Main circuit 56 8 4 Load + 12 to 24 VDC 15 White 7 3 Black 5 1 Blue Load is an analog input equipment such as a voltmeter.

PF2D

Real-time switch output ( ) Unit switching Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ZSE ISE ON YES OFF P-1 P-2 GPM gal (US) PSE Real-time flow rate GPM = gal (US)/min P Window comparator mode H: Hysteresis Z I SE3 Note) Fixed SI unit (l/min, l, m3 or m3 x 10) will be set for the type without the unit switching function.

Stopper Cylinder Adjustable Mounting Height Type Series RSG

Correct mounting Incorrect mounting Auto switch Auto switch mounting screw M3 x 0.5 x 14l Auto switch mounting band (with brackets) 1. Wrap the mounting band around the cylinder tube, and place it in the approximate auto switch mounting position. 2.

3

x 0.5 depth 5 L K N Symbol Model Port size A B D E F H K L N PFMC7501/7102 Rc1/2, NPT1/2 70 30 60.6 41.2 15 14 26 18 13.6 PFMC7202 Rc3/4, NPT3/4, G3/4 90 35 66.1 46.7 17.5 24 31 28 16.8 PFMC7501/7102 G1/2 76 30 60.6 41.2 15 14 26 18 13.6 Symbol Model Bracket dimensions S T U V W PFMC7501/7102 24 22 32 40 50 PFMC7202 30 30 42 48 58 Lead wire and M8 connector ZS-40-A Cable Specifications 2

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

CDH10 U L CX CZ ZZ + Stroke Z + Stroke RR (mm) Stroke range Bore size (mm) U RR +0.3 +0.1 L CDH10 CX CZ Z ZZ 20 25 32 40 50 63 80 Up to 250 Up to 350 Up to 600 Up to 600 Up to 700 Up to 900 Up to 900 14 14 17 17 26 26 30 10 10 14 14 22 22 25 14 14 20 20 30 30 32 28 28 40 40 60 60 64 8.5 11 12 15 18 23 28 23 23 30 30 42 42 50 129 151 185 208 237 263 298 137.5 162 197 223 255 286 326 8-25-24

CRBB-OM00004

Hexagon nut Stainless steel 13 Cross recessed round head screw Stainless steel 14 Magnet lever 5 No. 3.

PSE540/560

ZS-28-B) M3 x 5L 2. Mounting with panel mount adapter Secure the panel mount adapter with two M3 x 8L mounting screws. Panel Front protective cover (Part no. ZS-27-01) M3 x 8L 2. Connector pin numbers for power supply/output cable Panel mount adapter (Part no. ZS-27-C) Rotate 90 to mount. 16-3-30 9 Series PSE Specific Product Precautions 3 Be sure to read before handling.

Shuttle Valve/AND Valve, with One-Touch Fittings, SeriesVR12

F

Dimensions Model Metric size D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Inch size TMH-05 21 8.3 8.5 15.4 7.7 9.3 6.4 6.3 3.3 11.7 TMH-06 13.1 TMH-07 26.5 10.6 11 20 10 11 7.2 7.1 4.3 13.5 10 TMH-08 TMH-09 15.5 TMH-10 18.5 34 14.6 14.2 28 14 14 9.6 9.5 4.3 TMH-11 18.8 5

EX250-SPR_eng

O: Sensor: OFF 1: Sensor: ON 3 Input block connector Connects the Input block. 12 8 Output block connector Connects the solenoid valve, Output block etc. 4 SW 1 5 13 9 Safety Instructions SI unit 5 Display window LED display shows the SI unit status. 2 6 14 10 HW 6 Switch protective cover Sets the address etc. with the switch inside. 31 29 27 25 23 17 3 7 21 19 15 11 Address setting mode

Shuttle Valve/AND Valve with One-Touch Fittings

Dimensions(mm) 1in = 25.4mm Model Metric size D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Inch size TMH-05 21 8.3 8.5 15.4 7.7 9.3 6.4 6.3 3.3 11.7 TMH-06 13.1 10 TMH-07 26.5 10.6 11 20 10 11 7.2 7.1 4.3 13.5 TMH-08 TMH-09 15.5 TMH-10 18.5 34 14.6 14.2 28 14 14 9.6 9.5 4.3 TMH-11 18.8 SMC Pneumatics, Inc. 6 SMC Pneumatics, Inc. 7 World Wide Support...

VY511, VYU5

SW RESET RUN2 RUN1 OV SET UP 68 0.2 SET UP 7 31 BALANCE CONTROLLER VYU5-D 80 56 ERR. READY POWER OUT VALVE OUTPUT DC24V OV COM SOL.a SOL.b +24V SIG OV 7 10 4 20-M3 x 0.5 65 72 A view 82 0.2 92 87.6 58.4 62 8 35.5 A 1.15-39

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Display (PF2D30/31) 40 Sensort 15 Brown 6 2 Analog output Switch output or Pluse output Main circuit Main circuit Main circuit Main circuit 8 4 Load + 12 to 24VDC White 7 3 Black A 62 52 42 5 1 Blue Model A PF2D5--1 PF2D520 12.7 PF2D504 4-4.5 9.52 Display (PF2D30/31) Sensor Brown 52 1 2 6 Analog output Switch output or Pluse output 4 8 Load + 12 to 24VDC White 3 7 Black 1 5 Blue 18 PF2D5

End Lock Cylinder Series CBG1

I J to 350 20 18 15.5 13 14 8 12.5 12 2 12 12 35 5 25.3 37 26 M4 x 0.7 depth 7 to 400 25 22 19.5 17 16.5 10 12.5 14 2 12 12 40 6 28.3 40 31 M5 x 0.8 depth 7.5 to 450 32 22 19.5 17 20 12 12 18 2 12 12 40 6 31.3 43 38 M5 x 0.8 depth 8 to 800 40 30 27 19 26 16 15 25 2 13 13 50 8 38.3 52.5 47 M6 x 1 depth 12 to 1200 50 35 32 27 32 20 16.5 30 2 14 14 58 11 44.5 58.5 58 M8 x 1.25 depth 16 to 1200

CYV

Max. load mass Review M1, M2, M3. M max is the allowable moment. 2 = M/M max 2. Static moment Review Me1, Me3. Me max is the allowable moment. 3 = Me/Me max 3.

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2 x P through A 4 x T counterbore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 Bore size B C D E GA GB GC H J MM P R T A 13 22 3 23 16 15 13 10 3.2 7 M3 x 0.5 31 10 7 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89

Digital Flow Switch Series PFA For Air Series PFW For Water

View A PFA3-B DIN rail type Sensor Blue Brown Black Analog output 1 2 3 4 3 x 7.2 (= 21.6) 8-M3 36 15 6.4 2 3.4 5 6 7 8 OUT1 N.C. Load Load 2 1 3 4 6.5 12 to 24VDC + 26 SMC FLOW SWITCH PFA312-(-M) 35.5 30 15.2 56 (4.5) 44 UNIT RESET SET Sensor Blue Brown Black Analog output 1 2 3 4 5 6 7 8 5 6 7 8 29 OUT1 N.C.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Max. load mass Review M1, M2, M3. M max is the allowable moment. 2 = M/M max 2. Static moment Review Me1, Me3. Me max is the allowable moment. 3 = Me/Me max 3.