Ｍ icro Mist Separator Regulator

Structural Drawing and Replacement Parts 12-13 7. Bowl Assembly Specifications 14-21 8. Assembly of Optional Parts 22 9. Operation and Adjustment 23-25 10. Trouble Shooting 26-27 11. How to Replace the Components 28-37 11-1. Diaphragm Assembly Replacement 28 11-2. Bowl Assembly Replacement 29-30 11-3. Element Replacement 31-32 11-4. Valve Assembly Replacement 33-34 11-5.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

) 20 40 38 72.5 80.5 40 31 38.5 31 73 69 81 69 (10.5) 7.5 (11.5) 8.5 50 43.5 78 86 43.5 35 42.5 35 78.5 77 86.5 77 (10.5) 9.5 (13) 12.5 (11.5) 10.5 (14) 13.5 63 50.5 85 93 49 42 48 42 85.5 91 93.5 91 80 59 93.5 101.5 55.5 50 54 50 94 107 102 107 (16.5) 14.5 (18) (14.5) 21 (17) (17.5) 15.5 (19) (15.5) 22 (18) 100 69.5 104 112 63 57.5 62 57.5 104 121 112 121 (11.5) (10.5) The factors in parentheses

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

26 5 8 22.3 34 M8 M20 X 1.5 18 13 8 41 28 5 15 15 24 62 116 20 Up to 300 33.5 M10 X 1.25 19.5 17 32 10 7.5 6 8 25.3 37 M26 X 1.5 22 13 8 45 5.5 15 15 30 62 120 26 Up to 300 39.3 37.5 M10 X 1.25 34.5 19.5 17 32 12 7.5 6 8 27.6 M26 X 1.5 22 13 8 45 5.5 15 15 64 122 26 Up to 300 47.8 46.5 42.5 21 22 41 14 10.7 8 10 33.6 M14 X 1.5 21.5 M32 X 2 24 16 11 50 7 19 88 154 32 With rod boot h l Symbol

Brake mechanism added

Bore size (mm) Nut Width across flats Socket Width across flats Socket Mounting bracket nut Unit holding tie-rod JIS B 4636 2 point angle socket 10 10 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 With connector: Within 20.5 mm 13 2 point angle socket 13 JIS B 4636 2 point angle socket 13 13 How to Manually Disengage the Lock and Change from the Unlocked to the Locked State Manual unlocking 1.

Series VQ Metal Seal/Rubber Seal Body Ported

L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Low Differential Pressure Sensor

Mount of single unit 24 or more 0 -0.4 31 31 x n pcs. + 3.5 x (n pcs. 1) 31 0 -0.4 0 -0.4 31 Vertical stacking mount of multiple units (n pcs.) 0 -0.4 31 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 7 Pressure Sensor Controller Series PSE300 Functions A Auto shift function D Peak and bottom display function When there are large fluctuations in the supply pressure, the switch may fail to operate

DOC1023125

Refer to the table below Bolt pull Model Belt Pull tension Model Bolt size Tightening [N] Part number torque [Nm] EQFS25 LE-D-15-1 19.6 EQFS25 M3 0.6310% EQFS32 LE-D-19-1 49.0 EQFS32 M4 1.510% EQFS40 EQFS40 LE-D-19-2 70.0 19 - "Pulley plate" is installed.

Fieldbus system (SI unit compatible CompoNet TM )

No.EX-OMM0008-D PRODUCT NAME Fieldbus system (SI unit compatible CompoNetTM) MODEL / Series / Product Number EX12#-SCM# Table of Contents Safety Instructions 2 Product Summary 7 Model Identification and How to Order 7 Summary of Product parts 8 Mounting and Installation 13 Wiring 13 Setting 18 Mounting of Objects 20 Maintenance 27 Troubleshooting 28 Specifications 31 Specifications 31 Dimensions

IDX-OM-W014

) 11-4 () () ONOFF 11-5 1-1 IDU Series 11-4 11 2 IDX-OM-W014 12.S 12 S IDU3E/4E/6E-10 12-1 IDU Series 12-1 12-1 IDX-OM-W014 12.S 12-2 L N PE M3 6.5mm 2 1.25mm 12-3 1-1 IDU Series 12-2 12-2 IDX-OM-W014 13 T 13 T 13-1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 5mA) 13-3 ON 3 () 5 /1 () IDU Series 13-1 13 1 IDX-OM-W014 13 T 13-4 PE 1 2 3 LN PE PE: LN: M3 6.5mm

3 Port Solenoid Valve

Bracket Mounting Procedure q Fit the bracket to the groove at the connector block (end block). w Tighten the screws (Tightening torque M3: 0.6 Nm). Tighten the screws (Tightening torque M3: 0.6 Nm). Note) The bracket can be mounted on the block with the mounting nut (Metric size: M3) only.

PSE550/300

Mounting with panel mount adapter Secure the panel mount adapter with two M3 x 8L mounting screws. Panel Front protective cover (Part no. ZS-27-01) M3 x 8L Panel mount adapter (Part no. ZS-27-C) Rotate 90 to mount. 16-3-44 13 Series PSE Specific Product Precautions 3 Be sure to read before handling.

Compact Hydraulic Cylinder Series CH
KGB

35.5 30 M27 x 3 33 9 69 13 100 1/4 27.5 10 27.5 80 23 depth 15.2 105 88 17 45 41 M30 x 3.5 36 14 86 15 121 3/8 31 15 31 100 26 depth 17.5 132 106 26 56 50 M39 x 4 45 21 106 17 146 3/8 36 15 36 Note) Body dimensions are the same with or without auto switches.

3 Position Cylinder Series RZQ

If a moment or torque directly acts on the cylinder, it will lead to reduced service life or damage to machinery. 7 3 Position Cylinder Series RZQ Construction 13 24 21 3 2 1 6 4 8 7 10 19 22 20 12 23 11 9 5 23 18 14 16 17 15 22 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 No. 13 14 15 16 17 18 19 20 21 22 23 24 Note Note Description Material Description Material Hard anodized Aluminum alloy

Transfer

Yaw moment M3 = W4 x L2 YES L2 Is there any influence of noise? (Refer to Caution on Handling on pages 706 and 707.) Install a noise filter. NO M3 There is no particular problem in using the system.

IDX-OM-W089

Specification for Option_R 13 1 Safety instructions . 13 1 13 2 Specifications of the GFCI . 13 2 13 3 How to connect the power supply . 13 2 Chapter 14 Specification for Option_T 14 1 Safety instructions . 14 1 14 2 Specifications . 14 1 14 3 Remote operation . 14 2 14 4 How to connect the power supply and signal cable . 14 2 14 5 Electric circuit . 14 3 Chapter 15 Specification

High Vacuum Angle Valve

With Bypass Valve (Flange size: 80) (40) 148.5 3 117 (40) I G H H V A C 117 A U U M E V V A L Lead wire length: 500 mm (L type: 3000 mm) (40) XLA-16-X65 e u t w y Pilot port: Rc1/8 Bypass valve adjustment nut (Initial exhaust) Adjustment pitch: 1 mm/rotation Shaft seal (FKM) r Scraper (FKM) Pilot port: M5 0.2 Lock nut Width across flats 13 96 90 235 (Max. 13) 7.5 8-2 112 114 83 8-1 i !

Slide Unit Series CX2/CXWM/CXWL

ZZ Max. 31 2 x 6H7 Depth 8 4 x 9.5 counterbore depth 5.5 With shock absorber Max.

Slide Unit Series CX2/CXWM/CXWL

ZZ Max. 31 2 x 6H7 Depth 8 4 x 9.5 counterbore depth 5.5 With shock absorber Max.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

M3 x 0.5 x 3L M8 x 1.25 x 8L (Bolt holder) (Hexagon socket head set screw) 31 0.5 45 45 3 3 5.3 5.3 250.2 250.2 16 32 2-M3 x 0.5 through 6.5 counter bore depth 5 (Same on the opposite side) 3.4 through 3 3 45 45 5.5 M2.5 x 0.45 x 6L (Cap screw) M3 x 0.5 x 12.5L (Hexagon bolt) and M3 x 0.5 (Hexagon nut) 2-M3 x 0.5 through Steel ball Plug 2-M3 x 0.5 through 2.75 (11) (10+ST) 250.2 4 Part no

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 R 12 15 18 23 27.5 34.5 6.5 7.5 8 10 10 13 13 M3 x 0.5 M6 x 1 M3 x 0.5 M10 x 1 M4 x 0.7 M10 x 1 M4 x 0.7 M20 x 1.5 M5 x 0.8 M26 x 1.5 M6 x 1 M26 x 1.5 M6 x 1 M32 x 2 0.007 0.037 M8 x 1.25 M8 x 1.25 M8 x 1.25 M10 x 1.5 P (Piping port) W X Y ZZ Model Mounting Nut/Included in the package (2 pcs).