3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Valve Mounting VS After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque listed below.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

NARM Series

Fluid Air Cracking pressure (Valve) psig (MPa) 3 (0.02) Construction Relief style Port size/Weight Model Porting Port size Weight lb (g) Small Size Pressure Gauge 15mm Reverse flow function available on the standard model IN OUT Total weight (n: stations) Regulator (Except manifold) (80 X n) + 23 Common IN 1 8 1 8 .13 (57) NARM1000 (79 X n) + 25 Individual IN 1 8 1 8 Common IN (188 X n) + 43

VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Single Double Closed center Exhaust center Pressure center Dual 3 port valve Single Double Closed center Exhaust center Pressure center Dual 3 port valve 63 71 75 Single Double Closed center Exhaust center Pressure center Dual 3 port valve Single Double Closed center Exhaust center Pressure center Dual 3 port valve Single Double Closed center Exhaust center Pressure center Dual 3 port valve 43

Refrigerated Thermo-chiller

Time Time 43% reduction 0 70 Space Saving Installation area: Max.29% reduction (SMC comparison) By emitting the heat from the rear side, ventilation slits on the side are unnecessary offering reduced installation space.

AC Servo Motor Driver (CC-Link Type)

-43- 5.5.6 Parameter setting when using it by I/O signal (CN6 connector use) Please configure PD12External DI function selection 1 and PD14External DI function selection 3 in Hexadecimal (HEX).

Digital Gap Checker ( compatible)

Features 7 Model Indication and How to Order 8 Summary of Product parts 14 Specification 15 About this product Specifications (ISA3) 15 Specifications (Regulator) 17 Specifications (2 port solenoid valve) 17 Characteristics graph 18 Dimensions 21 Mounting and Installation 27 Piping 27 Installation 30 Installation Wiring 35 Part structure 39 Outline of Settings 42 Measurement mode 43

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

0.40 10.2 147 491 0.761 OUT 33.0 245 77.3 344 55.1 Single Acting Single Rod Spring Extend/Return Theoretical Force Operating pressure Piston area Spring force MPa 0.3 psi 43.5 MPa 0.5 psi 72.5 MPa 0.7 psi 101.5 Operation Bore size Rod diameter Action Theoretical Force (in 2) (mm 2) At rest Compressed (inch) N lbf N lbf N lbf (mm) N lbf N lbf IN 4 12 0.9 3.1 14 0.24 6 65 20 0.175 113 43

Air Cylinder NCA1 Series

67 103 130 194 261 329 4000 13 38 63 94 119 175 240 310 rods should not be considered a remedy against excessive side loads. 5000 9 34 60 87 110 163 225 289 6000 5 30 56 82 102 152 208 274 8000 4 26 50 76 93 137 188 245 10 3 21 45 70 89 125 172 222 12000 17 41 65 84 118 155 210 16000 9 34 57 75 110 142 188 HOW TO USE THIS TABLE 20 8 28 52 68 103 136 172 30 5 12 39 55 87 120 156 40 11 22 43

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 11 11 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

Class 3 Class 2 Symbol 01 02 03 04 06 1 2 3 4 36 100VAC 200VAC 110VAC 220VAC 230VAC Orifice size Class 3 Class 4 Class 2 Orifice diameter 2mm 3mm 4mm 5mm 7mm 10mm Symbol 2 3 4 5 7 10 Electrical entry CConduit GGrommet Refer to the table below for orifice and port size combinations.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

Nil N F Rc NPT G OUT 1 IN Port size Symbol 01 02 03 04 06 Class 3 Class 2 Port size 1/8 (6A) 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 Voltage 1 2 3 4 36 100VAC 200VAC 110VAC 220VAC 230VAC Orifice size Consult P/A regarding other voltages.

Precautions 1

NT-02 NT-03 NT-04 Part no.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LAT LZ USB cable (2.5 m) Cable for safety function device (3 m) LEC JZ CVSAF LC3F2 LEC JZ CVUSB * JZSP-CVS06-02-E manufactured by YASKAWA CONTROLS CO., LTD. * JZSP-CVH03-03-E manufactured by YASKAWA CONTROLS CO., LTD. Cable for connecting PC and driver when using the setup software (SigmaWin+TM). Do not use any cable other than this cable.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Common connector assembly part numbers Positive common specifications For single solenoid SX100-42-4S Negative common specifications For single solenoid SX100-43-4S Common wire COM A B COM A B COM A B COM A B COM A B COM A B COM A B COM A B For double solenoid, 3 position, 4 position types SX100-42-4D For double solenoid, 3 position, 4 position types SX100-43-4D Socket Insert socket into

CL

TdH9 TB +0.036 0 +0.036 0 +0.043 0 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 42 48 53 60 10 10 10 10 5.5 5.5 6.6 6.6 31 37 38.5 42.5 40 47 47 55 20 25 32 40 36 43 50 58 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 (29.3) (33.1) (40.4) (49.2) 8 10 12 14 8 10 12 +0.043 0 14 CG-020-24A CG-025-24A CG-032-24A CG-040-24A Applicable bore size (mm) Applicable bore size (mm) Part no.

Process Valve

Flow rate characteristics Weight (kg) Orifice diameter (mm) Effective area (mm2) Air operated Model Measured by air Measured by water Port size Rc Kv Conversion Cv External pilot solenoid VNA4-25A VNA5-32A VNA6-40A VNA7-50A 1 220 320 500 770 0.9 1.4 2.2 3.2 2 25 32 40 50 10.4 15.6 24.2 37.2 12 18 28 43 0.8 1.3 2.1 3.1 1 4 1 2 1 1 Specifications Fluid (Main piping) Refer to Table (1) on page

HAA

HAA7 Accessory (Option) Auto drain Applicable model HAA7 HAA15 HAA22 HAA37 HAA7-F HAA7-S HAA15-F AD402-03 HAA15-S HAA22-F HAA22-S HAA37-F AD402-04 Working Principle Dust-protecting filter Mounting bench HAA37-S The accessories should be mounted by user.