Fluoropolymer Piping Equipment

25 1/2" 42 7 26.5 24 14 28 32 64 61.5 LVN 10 10 LQ3R62-M 3/4" 42.5 52 16 16 LQ3R63-M 1" 53 22 22 50 LQHB 8 30 26 18 36 41 78 74 49 TL TIL Inch Size TLM TILM Model Applicable tubing O.D.

ISO Standard Hydraulic Cylinder

30 14 35 12 22 1/4 103 12 15 18 45 43 40 25 to 800 41.7 M8 x 1 9 12.5 83 62.5 10 M16 x 1.5 73 63 103 34 19 18 31 128 11 22 37 3/8 22 12 19 45 47 50 25 to 800 52.3 M12 x 1.25 11 19 102 74.5 12 M20 x 1.5 74 75 127 42 24 18 37 134 28 14 28 9 42 25 1/2 54 53 63 25 to 800 64.3 M12 x 1.25 13 26 124 89 12 M27 x 2 80 90 161 18 36 50 13 30 39 17 44 32 1/2 136 36 65 68 80 M16 x 1.5 25 to 800 82.7

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 100 Up to 1500 20 to 1500 40 37 116 41 140 1/4 1/4 92 30 52 14 124 21 31 76 25 19 Bore size [mm] H1 J K KA LD LH LS LT LX LY LZ MM N P PG PH PL PW RT RY S X 40 8 M8 x 1.25 6 14 9 40 207 3.2 42 70 81 M14 x 1.5 27 1/4 42 11 20 45 153 27 50 11 M8 x 1.25 7 18 9 45 222 3.2 50 80 90 M18 x 1.5 30 3/8 46 10 21 50 30 76 168 27 63 11 M10 x 1.25 7 18 11.5

Tie-rod Type Hydraulic Cylinder

36 35.5 35 27 19 16 27 50 34 35 32 1/2 66 24 137 125 34 80 M14 x 2 M27 x 2 38 6.5 140 112 22H9 42 35.5 35 27 19 16 27 55 34 35 32 1/2 77 26 137 160 43 100 M16 x 2 M33 x 2 42 9 174 140 25H9 55 45 38 36 22 18 28 65 38 40 36 3/4 94 30 155 (mm) Without rod boot With rod boot Bore size (mm) T U V W l H Z ZZ e f h Z ZZ 40 11 18 7.5 8 66 204 219 55 25 92 230 245 50 11 21 10 9 73 220 238 60 28 99

CNA

Up to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 67 20 18 12 15 11 M10 x 1.25 7 18 Up to 600 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 M12 x 1.75 11 22 Up to 750 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 98 22 25 20 19 16 M12 x 1.75 11 26 Up to 750 Bore size (mm) 40 50 63 80 100 LH LS LT LX LY MM N P Q H S T V W X Y Z ZZ LD 9 40 207 3.2 42 70 27 1/4 37 to 39.5 51

CNA

Up to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 67 20 18 12 15 11 M10 x 1.25 7 18 Up to 600 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 M12 x 1.75 11 22 Up to 750 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 98 22 25 20 19 16 M12 x 1.75 11 26 Up to 750 Bore size (mm) 40 50 63 80 100 LD LH LS LT LX LY MM N P Q H S T V W X Y Z ZZ 9 40 207 3.2 42 70 27 1/4 37 to 39.5 51

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

M12 x 1.75 27 50 34 M27 x 2 35 32 1/2 66 24 137 80 125 22H9 38 6.5 140 112 42 34 35.5 35 27 19 16 M14 x 2 27 55 34 M27 x 2 35 32 1/2 77 26 137 80 160 25H9 42 9 174 140 55 43 45 38 36 22 18 M16 x 2 28 65 38 M33 x 2 40 36 3/4 94 30 155 100 (mm) Without rod boot With rod boot Bore size (mm) T l U V W H Z ZZ e f h Z ZZ 40 11 18 7.5 8 66 204 219 55 25 92 230 245 50 11 21 10 9 73 220 238 60 28

7ND9071en

When ordering spare parts, always include the following information: Valve controller type designation and serial number from the ID plate The code of this manual, the part number, the part name and quantity required 42 7 ND90 71 en 12 DRAWINGS AND PARTS LISTS 12.1 Exploded view ND9100, ND9400, ND7100 100 107 110 109 228 39 223 217 219 42 218 215 220 210 44 19 43 18 139 11 120 47 49 222

25

A 13 15 22 06 08 10 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 End bracket/IZS40-BE 35 22 4.5 30 18 2 x 5.4 105 33 L 33 Intermediate bracket/IZS40-BM 55 35 22 4.5 36 30 18 2 x 5.4 A 105 33 A A-A section 431 IZS40/41/42 Series Dimensions Ionizer/IZS41, 42 30 44 304 6.8 30 85 9 60 50 A 60 x (n-1) L n (Number of emitter cartridges), L Dimension L (mm) IZS4-340 IZS4-400 IZS4-460 IZS4

CLA

aize (mm) 40 550 63 80 9 12 80 42 100 51 216 43 11.2 59 224 ~6 20 27 % 42 11 20 45 153 8 60 30 ~ 46 10 21 50 168 0 70 9 12 90 50 11 0 58 238 52 11 .2 66 ""246 y. ~ Siroke 13.5 18 130 76 160 71 297 65 12.5 60 ~ 13.5 18 150 92 180 72 316 65 14.0 81 ~ 11 .5 15 105 59 130 58 255 52 11.2 66 0/. 16 31 ~ 48.5 13 23 60 182 0 86 37 ~. 55 15 23 70 208 0 102 1 14 40 \; 56.5 15 25 80 226 0 116 100

2 Phase Stepper Motor/Without Motor Brake Series LXP

Positioning driver Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 Torque (Nm) 42 2.87 0.09 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 218 2 Phase Stepper Motor/Without

7

42 9 G VXD2 50A 32 77.5 69.5 40 180 57.5 24.5 59 155 14 120 52 ( ): Denotes the Normally Open (N.O.) dimensions. 153 For Heated water/High temperature oil VXD Series 7 E 8 F 9 G Dimensions/VXD2 /2 /2 Body Material: CAC408 Conduit terminal (U2) E C (V2) 32 T B 25 G1/2 R A IN OUT N SMC F D Q 8 x 18 S Conduit U E 280 C (42) 45 23 G1/2 For Heated water/ High temperature oil Full-wave rectifier

Cylinder with Lock

H6 K1 K2 (Max.) l2 S5 32 ES5032 32 10 11 14 15 10.5 21 18 31 10 38 51 8.5 6.6 40 ES5040 36 12 11 16 18 12 24 22 35 10 41 54 8.5 6.6 50 ES5050 45 16 15 21 20 15 33 30 45 12 50 65 10.5 9 63 ES5063 50 16 15 21 23 15 37 35 50 12 52 67 10.5 9 80 ES5080 63 20 18 25 27 18 47 40 60 14 66 86 11.5 11 100 ES5100 71 20 18 25 30 18 55 50 70 15 76 96 12.5 11 21 Accessories CP96N/C96N Series Dimensions:

Vacuum Unit

Number of Manifold Stations that can be Operated Simultaneously in page 18.

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

Spacer Bolt Top cover Top Cover Mounting Bolt Tightening Torque Bore size Tightening torque 25, 32 0.46 to 0.60 lbfft [0.63 to 0.82 Nm] 2 CKZT -X2797 -X2798 Dimensions CKZT S-X2797 Clamp arm (Refer to page 5 for details.) 16 93 52 53 40 10 34 13 250.1 34 3 170.05 44 A 50.1 180.1 28 +0.1 0 C B Proximity switch 2 x 4 x M5 x 0.8 depth 6 G1/8 Unclamping port A D E G1/8 Clamping port Bore size

PF3W7x.eng

Item Default setting PF3W7##-L Lock ring Without units selection function Display OUT1 set value OUT1 hysteresis OUT2 hysteresis Bottom value OUT2 set value Peak value [ Unit] Display unit setting [ L] L/min, oC Bracket mounting (PF3W711) Mount the product (with bracket) using the mounting screws supplied (M5 x 4 pcs.).

PF3W7x-X445.eng

Set value Sets the ON or OFF point of the switch output. 50% of rated flow 1 L+ Brown 18 to 30 VDC SET button Hysteresis Setting of hysteresis can prevent chattering. 5% of rated flow 2 N.C.

Table of Contents

Series AS-FG Speed Controller with One-touch Fittin Stainless Series. 5 5 6 7 9 11 11 11 11 12 13 13 13 15 15 16 16 16 17 17 18 19 21 22 22 23 24 25 27 27 27 29 30 31 31 31 32 34 35 35 35 36 36 37 37 37 38 38 39 39 39 41 42 43 43 43 44 45 46 46 Specifications. How to Order . Construction. Dimensions . Series AS-FG Speed Controller with One-touch Fittings Stainless Series In-line Type.

IDX-OM-W011

10%(4) AC100V 50/60Hz 2.4/2.5 2.4/2.5 2.4/2.5 2.4/2.5 2.4/2.5 3.0/3.1 5.7/5.7 4.3/4.6 (2) A AC200V 50/60Hz 1.2/1.3 1.2/1.3 1.2/1.3 1.5/1.5 3.4/3.0 3.4/3.1 (2) W AC100V,AC200V 50/60Hz 180/202 180/202 180/202 180/202 180/202 208/236 385/440 420/480 (3) AC100V 10A AC200V 5A 10A R134a(HFC) AC100V/200V g 705 1155 1505 1805 2005 2505 2605 35010 Rc3/8 Rc1/2 Rc3/4 Rc1 10mm 1 2 kg 16 17 18

Valve Mounting Direction: S (Solenoid on Same Side as A Port), Piping: 42 (Base Mounted), Stations: 18 Stations, A Port Size: M5 (Base Mounted M5X0.8), P R Port Thread: T (NPTF)