Series MXP Precision Air Slide Table A A F F A F L L L 1 N = 0.2248 lbf 6 6 6 L=80mm L=80mm L=80mm 0.05 0.06 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 0.04 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 0.05 0.04 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 0 10 20 30 40 Load (N) 40 10 10 10 L=100mm
) 2 to 60 psig (0.014 to 0.4 MPa) 5 to 100 psig (0.034 to 0.7 MPa) 15 to 200 psig (0.1 to 1.4 MPa) 15 to 300 psig (0.1 to 2.1 MPa) Code Bonnet Standard Panel installation 3) 01 02 06 10 20 30 No code P Connections (Inletq, Outletw) 3) Panel mounting hole: dia. 1.42 inch (36.1 mm).
Rated voltage 1 2 3 4 5 6 7 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 240 VAC (50/60 Hz) G: Lead wire length 300 mm H: Lead wire length 600 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) D: With connector T: Condait terminal E: Grommet terminal type has been discontinued.
For details, refer to the optional accessory (page 11). 6 HEF Series Cooling Capacity Circulating fluid: Water, Flow rate: 1 L/min Circulating fluid: Water, Flow rate: 1 L/min, When constant fan speed mode is selected 600 600 500 500 Cooling capacity [W] Cooling capacity [W] Ambient temperature 25C 400 400 Ambient temperature 25C 300 300 200 200 Ambient temperature 35C Ambient temperature
0.17 25 0.14 20 A Connections (mm) inch FV4 MV4 TW4 FV6 MV6 TW6 0.10 15 (70.6) 2.78 0.07 10 2.12 (53.8) 0.03 5 3.86 (98.0) 0.00 0 0 5 10 15 20 25 30 35 40 45 50 Flow rate (slpm, N2) 2.65 (67.3) SL5201A High flow option Inlet pressure: 2 psig (14 kPa) Standard 760 0 700 -8 Delivery pressure (Hg abs) 600 -21 Delivery pressure (kPa) 500 -35 400 -48 300 -61 200 -75 100 -88 -101 0 Hastelloy is
holes 25.6 5 12.5 Manual override Manual override 2 12 14 14 27 33 26.4 48 51 62 (68) (98) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com l = 280 l = 300 25 D side U side Stations 1 2 3 4 5 n (Front ported) IN port 2-3/8 72 55 38.5 42 37 25 P = 28.5 24.5 12.5 OUT
to 50 5 to 55 5 to 50 Outlet air atmospheric pressure dew point C Standard performance 20 Inlet air flow rate l/min (ANR) Note 2) 625 62 125 250 375 Outlet air flow rate l/min (ANR) 50 100 200 300 500 Purge air flow rate l/min (ANR) Note 3) 12 25 50 75 125 Inlet air pressure MPa 0.7 Inlet air temperature C 25 25 25 1l/min (ANR) {inlet air pressure at 0.7MPa} Inlet air saturation temperature
Dimensions: Stroke Adjusting Bolt (mm) Applicable size Model Stroke adjustable range (mm) A B C M M C MXF-A827 MXF-A827-X11 MXF-A1227 MXF-A1227-X11 MXF-A1627 MXF-A1627-X11 MXF-A1627-X12 MXF-A2027 MXF-A2027-X11 MXF-A2027-X12 5 15 5 15 5 15 25 5 15 25 17 27 23.5 33.5 26.5 36.5 46.5 30 40 50 MXF8 M4 x 0.7 6 2 MXF12 M5 x 0.8 7 2.5 MXF16 M6 x 1 8 3 A B MXF20 M8 x 1 12 4 8-6-9 10 Series MXF Dimensions
1in = 25.4mm W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CL2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231
4 r 1 2 . 2 8 (141) (160) Body Ported (Top Ported) /Type 21 Manifold NVV3KF3-21 -Stations-007 inch (mm) Lr Dimensions n: Stations 20 1 r v L-'-Ll I 1 0 1 1 10.79 11.54 12.28 (274) (2s3) (312) 4.8 5.55 (122J \141) (179) (198) 15.28 {388) t2 0ilnffision$ $mim llUlff 300 Base Mounted (Bottom Ported) lType 40 Manifold NVV3KF3-40-Stations-0 1 T inch (mm) L: Dimensions '-{ 1 2 3 5 6 7 I I i.44
4 r 1 2 . 2 8 (141) (160) Body Ported (Top Ported) /Type 21 Manifold NVV3KF3-21 -Stations-007 inch (mm) Lr Dimensions n: Stations 20 1 r v L-'-Ll I 1 0 1 1 10.79 11.54 12.28 (274) (2s3) (312) 4.8 5.55 (122J \141) (179) (198) 15.28 {388) t2 0ilnffision$ $mim llUlff 300 Base Mounted (Bottom Ported) lType 40 Manifold NVV3KF3-40-Stations-0 1 T inch (mm) L: Dimensions '-{ 1 2 3 5 6 7 I I i.44
Models Standard strokes (mm) 32 40 50 63 MGP 25, 50, 75, 100, 125, 150, 175 200, 250, 300, 350, 400 M L Intermediate strokes (in 5mm increments) are produced by installing spacers of 5, 10, 15 and 20mm widths. When a special intermediate stroke body is needed, contact SMC.
to 6G(Z)m-A AV3000-m03-1 to 4G(Z)m-A 3/8 3/8 3/8 76 50 29.5 40 38 Width across flats 24 35 AV3000-m03-5 to 6G(Z)m-A AV4000-m04-1 to 4G(Z)m-A 1/2 1/2 1/2 98 56 39.5 52 49 Width across flats 30 33 AV4000-m04-5 to 6G(Z)m-A AV5000-m06, 10-1 to 4G(Z)m-A 3/4, 1 3/4, 1 3/4 128 59 53 74 53 Width across flats 36 52 AV5000-m06, 10-5 to 6G(Z)m-A Model [mm] Optional specifications With bracket With
1 5 20 1 5 1 0 25 20 1 5 30 25 25 2.
Lube, non-lube, air-hydro, lube (with auto switch) Non-lube with auto switch CS1WN125A-PS 125 140 160 180 200 250 300 CS1WN125A-PS CS1WN140A-PS CS1WN160A-PS CS1WN180A-PS CS1WN200A-PS CS1WN250A-PS CS1WN300A-PS @0 21 @2 @3 #1 @4 @5 26 @7 28 Wiper ring CS1WN140A-PS Cushion seal CS1WN160A-PS Component part numbers: @0, @2, @3, @4, @5, @7.
Series 10-VQD1000 [Option] 4 Port Direct Operated Poppet Solenoid Valve How to Order Valve Clean series Valve option Nil Standard (2 W) V Vacuum (2 W) U For large flow (3.2 W) W For large flow, Vacuum (3.2 W) Energy saving type Rated voltage 5 24 VDC 6 12 VDC Body type 2 Body ported (Single unit) 3 Body ported (Manifold) 5 Base mounted 10 V Q D 1 1 5 1 U 5 L M5 Electrical entry
6 1000 20 5 100 30 4 10 50 6 1000 5 5 100 15 4 10 30 6 1000 20 5 100 50 4 10 60 6 1000 10 5 100 40 4 10 50 6 1000 50 5 100 80 4 10 100 LEFS16 500 500 LEFS25 900 500 Please aspirate it from the port on both sides when aspirating 50 /min(ANR).
5 5 5.5 5.5 Operating range Note) Operating range Note) Perpendicular electrical entry is not available for 50 and 63.