Mounting: Basic Type, Bore Size: 40mm, Port Thread: M5x0.8 (20), Rc (25~80), Coil Scraper: Without, Stroke: 125mm, Auto Switch: M9BV--Solid State, Gen. Purpose, 2 Wire, Vertical, Lead Wire or Prewired Connector: 3m, Number: -

Bore Size: 16mm, Thread Type: Bore 8-16: M Thread, Bore 20-25: Rc, Stroke: 125mm, Option: Standard (w/Urethane Bumper), Auto Switch: M9BV--Solid State, Gen. Purpose, 2 Wire, Vertical, Lead Wire or Prewired Connector: 3m, Number: -

Mounting: B (Tapped on Both Sides), Bore Size: 32mm, Stroke: 125mm, Cushion: 40~63 Bore-Cushion Both Sides; 12~32 Bore-No Cushion, Connector: Connector, Cable Length: 0.5m, Auto Switch: M9BV--Solid State, Gen. Purpose, 2 Wire, Vertical, 0.5M, Lead Wire or Prewired Connector: L (3m)

Magnet: Built-in, Mounting: Front Flange, Bore Size: 50mm, Stroke: 125mm, Option: w/o Rod Boot; Air Cushion on Both Sides, Auto Switch: M9BV--Solid State, Gen. Purpose, 2 Wire, Vertical, Lead Wire or Prewired Connector: 3m, Number: -

Digital Flow Switch ( compatible)

Refer to the dimension drawing (page 95) for the bracket thickness and mounting hole dimensions. -17No.PF-OMY0002 Direct mounting For direct mounting use M3 screws (2 pcs.) or equivalent. Screws are prepared by customer. Refer to the dimension drawing (page 95) for the diameter and depth of the mounting screw holes.

XMD/XYD Series

55 41 84 20 15 XYD-50 178 128 79 2 53 75 52 95 20 17.5 XYD-63 209 163 100 3 61 87 95 70 121 20 19.5 XYD-80 268 193 117 3 80 114 110 83 144 20 26.5 10 XL-OMP0003-A 7.

Filter Regulator

A B C D E F G J K J J J AW20-D 1/8, 1/4 1/8 40 87.6 71.8 21 M281 40 21 5 f37.5 57.5 f37.5 58.5 f37.5 58.5 AW30-D 1/4, 3/8 1/8 53 115.3 86.5 26.5 30 M381.5 55 26.5 3.5 f37.5 63 f37.5 64 f37.5 64 AW40-D 1/4, 3/8, 1/2 1/8 70 147.1 91.5 35.5 38.4 M421.5 80 35.5 0 f42.5 73 f42.5 73 f42.5 73 AW40-06-D 3/4 1/8 75 149.1 93 35.5 38.4 M421.5 80 35.5 0 42.5 73 42.5 73 42.5 73 AW60-D 3/4, 1 1/8 95

HRX-OM-I051

Table 8-15 Compliance EMC Directive 2004/108/EC Low Voltage Directive 2006/95/EC CE Marking Machinery Directive 2006/42/EC SEMATECH S2-93, S8-95 SEMI S2-0703, S8-0701, F47-0200 UL E229305 / UL1995 HRZ Series 8.7 Compliance 8-25 HRX-OM-I051 Chapter 8 Appendix Serial No. Model: Judgment 8.8 Thermo Chiller Daily Inspection Sheet Circulating fluid supply port cap Looseness IN press.

XMA/XYA Series

110 83 96 D G C XYA Series / Straight Valve C B Fd (K Flange) 45 H Fn (KF Flange) A E Unit: mm Model n Fd XYA-25 100.2 79.5 48 1 23.5 40 26 64 XYA-40 130 106 66 2 38 55 41 84 XYA-50 178 119 79 2 53 75 52 95 XYA-63 209 149 100 3 61 87 95 70 118 XYA-80 268 178 117 3 80 114 110 83 142 9 XM-OMP0001-A 5.

Clean Exhaust Filter

(Initial conditions) 200 0.05 32 SFE1 SFE3 Inlet pressure/Back pressure [MPa] 150 SFE5 0.04 25 100 SFE4 SFE7 95 20 0.03 50 10 0 0.02 0 100 200 300 400 500 600 700 800 Cylinder driving speed [mm/s] AN 0.01 AMC Example) Bore size: 32, Driving speed: 400 mm/s, Supply pressure: 0.5 MPaG 1. From the graph, exhaust flow rate is found to be 95 L/min (ANR). 2.

3 Port Air Operated Valve Series SYJA300 1

8.5 1 4 1 1 1 1 4 VPA3185 118 1 2 132 14 80 95 140 52 140 41 81 105 13 2 2 5-5-26

New

with surge voltage suppressor) A A B B D C D C J J K I K I R Q z 300 S z 300 Q R S L L E E U U 1/4 Exhaust port 1/4 Exhaust port H H F F G G 2 x P Port size 2 x P Port size DIN terminal A B D C J K I Q Cable 6 to 12 S T R (44) U G1/2 L H E 1/4 Exhaust port F G 2 x P Port size Dimensions (mm) Model Port size P A B C D E F G H I J K L S VXF21A< VXF22A< VXF23A< 19 23.5 35 40 47 77 53.5 64.5 95

Large Size Vacuum Module: Series ZR

(mm) Maximum suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Weight (With bracket) (kg) Model ZR1-W10S ZR1-W13S ZR1-W15S ZR1-W18S ZR1-W20S 0.132 0.134 0.136 0.154 0.156 46 78 95 150 185 22 38 54 62 84 1.0 1.3 1.5 1.8 2.0 ZA ZX Model/Max. Vacuum Pressure 53 kPa (L: Large flow type) ZR Nozzle dia.

Rotary Table/Rack & Pinion Style Series MSQ

FU) (mm) AA AB A AV AW AX AY BA BB BC BD BE CB D DD DE DF DG FA FB FC FD H J JA JB Size 70 100 200 90 92 84 42 25.5 27 8 17 75 44.5 110 57 36 88h9 90h9 46H9 16 22H9 12.5 5 3.5 9 22 10.4 17.5 10.5 101 102 100h9 95 50 29.5 27 8 17 85 50.5 130 66 42 98h9 56H9 19 24H9 14.5 6 3.5 12 27 10.4 17.5 10.5 119 120 116h9 118h9 113 60 36.5 36 10 24 103 65.5 150 80 57 64H9 24 32H9 16.5 9 5.5 15 32 14.2

IR1000/2000/3000

Connection port 14-5-19 19 Series IR1000/2000/3000 Flow Characteristics Pressure Characteristics Vacuum pump exhaust speed: 500 l/min VAC side pressure: 101 kPa at initial setting Vacuum pump exhaust speed: 500 l/min IRV1000 IRV1000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) Set pressure (kPa) 30 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 100 0 10 20 30 40 50 60 70 57.0 100 95

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

2-J, thread depth K 2-J, thread depth K G1/2 Specifications with bracket Orifice 2, 3, 4.5, 6 Orifice 8, 10 7.5 2.3 Bracket Y 29 Mounting hole 2-5.3 Bracket 22 5.5 52 28 W U 67 X (mm) Grommet Conduit DIN terminal Electrical entry Mounting dimensions Bracket mounting Port size P Model Orifice size A B C D E F H Conduit terminal J M4 M5 M5 M5 M5 K M Q R 50 60 63 66 70 Q 40 R Q 58 R S 46 Q 95

ZR

(mm) Model Maximum suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Weight (With bracket) (kg) ZR1-W10S ZR1-W13S ZR1-W15S ZR1-W18S ZR1-W20S 1.0 1.3 1.5 1.8 2.0 22 38 54 62 84 46 78 95 150 185 0.132 0.134 0.136 0.154 0.156 ZX ZR Model/Max. Vacuum Pressure 53 kPa (L: Large flow type) ZM Nozzle dia.

Rotary Table/

FU) (mm) AA AB A AV AW AX AY BA BB BC BD BE CB D DD DE DF DG FA FB FC FD H J JA JB Size 70 100 200 90 92 84 42 25.5 27 8 17 75 44.5 110 57 36 88h9 90h9 46H9 16 22H9 12.5 5 3.5 9 22 10.4 17.5 10.5 100h9 101 102 95 50 29.5 27 8 17 85 50.5 130 66 42 98h9 56H9 19 24H9 14.5 6 3.5 12 27 10.4 17.5 10.5 116h9 118h9 119 120 113 60 36.5 36 10 24 103 65.5 150 80 57 64H9 24 32H9 16.5 9 5.5 15 32 14.2

Table of Contents - Tubing

Length per roll Tube O.D. mm Tube I.D. mm Min. bending radius mm Operating fluid Max. operating pressure Burst pressure Operating temperature Material Color Tube length per roll (m) Hardness 2 3 2 3 2 3 6 4 8 4 2.5 5 15 10 20 Air Note 1) 116psi (0.8MPa) at 68F (20C) Refer to burst pressure characteristics curve. 4 to 140F (20 to 60C) (With no condensation) Polyurethane Black 10 Shore A 95

Thermo-dryer

Coating color Applicable directive 10 mm Body panel: White 1 Base: Gray 2 Low Voltage Directive: 2006/95/EC EMC Directive: 2004/108/EC Note 4) Keep the voltage within -5 to +10% of the rated voltage. If there is voltage fluctuation, the outlet air temperature stability may decrease.