High Vacuum L Type Valve Specifications Model XLD-25 XLD-40 XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 Flange (valve) size 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Main pumping 14 45 80 160 200 300 800 Note 1) Initial pumping 0.5 to 3 2
Model XLG-16 XLG-25 XLG-40 XLG-50-1 XLG-63-1 XLG-80-1 XLG-100-1 XLG-160-1 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Double acting / pressurized to open/close Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal
XL-25 XL-40 XL-50 XL-63 AC90240V Ass'y XLA25-60S-1 XLA25-60S-1 XLA25-60S-2 Ass'y 1 1 1 H4 AC100V 200/40 200/50 400/100 / AC200V 800/40 800/50 800/100 Ass'y XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 Ass'y 1 1 1 1 H5 AC100V 200/40 400/70 400/80 600/130 / AC200V 800/40 1600/80 1600/80 2400/130 XL-80 XL-100 XL-160 AC90240V Ass'y XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 Ass'y
MPa] When the arm length is 80 mm, pressure should be MK20/25: 0.45 MPa or less, MK32/40: 0.55 MPa or less.
Cylinder Supply pressure Load Load factor 50 80 51% 28% 50-450st 80-450st 25kg 0.2MPa 0.5 0.2 0.5 16 25 11 72 39 36 25 35 35 1.19-2 VS7-6 How to Order E Q VS7 6 FG S 1 Symbol Number of solenoid Rated voltage Option Port size of sub-plate Connector S D Single Double 1 2 3 4 A02 Without sub-plate N None Indicator light 0 100V AC 200V AC 24V DC 12V DC Connector SV 1 4 FG Side piping FJG
External Pilot Solenoid Type (Conduit terminal) A B C D E F G H I J K L M N O Model SGH130-10 SGH230-3015 SGH230-7015 SGH330-3020 SGH330-7020 SGH430-3025 SGH430-7025 Main port Pilot port 3 x 3/8 1/8 60 28 46 133 34 60 24 29 142 37.5 75 62 6.5 33 3 x 1/2 1/8 60 28 48 135 34 65 24 29 144 37.5 75 62 8.5 35 3 x 1/2 1/8 77 33 49 150 20 44.5 80 36 25 159 50 100 70 5 33 3 x 3/4 1/8 77 33 53 154
Description (Extract) Initial input value Input range ORIG direction Note1) CCW 1: CW , 2: CCW ORIG mode 1:ORIG Press ORIG limit LEP6 : 150 , LEP10 : 150 , LEP10L : 150 ORIG time 100 ORIG speed LEPJ : 20 , LEPK : 10 ORIG ACC /DEC 3000 Creep speed 20 ORIG sensor 0: Disable Note1) Become effective after restarting the controller.
Vale specifications Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for
Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding
5.6 100 8.2 115 2 60 3.1 80 5.6 100 8.2 115 2 60 3.1 80 5.6 100 8.2 115 2 60 Equivalent size Note 1) No freezing Note 2) This product cannot be used for water applications.
(Displays 0 when the value is below 30 L/min) 80 to 2100 L/min 40 to 1050 L/min (Displays 0 when the value is below 80 L/min) 4.0 0 to 4%F.S. (Displays 0 when the value is below 40 L/min) 100 to 2100 L/min 50 to 1050 L/min (Displays 0 when the value is below 100 L/min) 5.0 0 to 5%F.S.
Specifications Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 XLF-100 XLF-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the
: 5 (1.25 10-3) = 4000 [pulses] Travel speed: 20 (1.25 10-3) = 16000 [pulses/s] Acceleration time: 20 80 = 250 [ms] Deceleration time: 20 80 = 250 [ms] Flow chart (Reference) Controller (1) Turn "TL" signal OFF.
to 80 304 280 5 phase to 200 264 2 phase to 200 286 278 5 phase to 100 262 2 phase to 100 274 5 phase to 30 258 2 phase to 30 294 276 5 phase to 80 260 2 phase to 80 Page Standard stroke (mm) and 25 50 75 100 125 150 175 200 Model Maximum speed (mm/s) Capacity Standard Deflection LXFHABC LXFHABD to 50 288 304 to 100 LXPBABC LXPBABD LXPBABC-B LXPBABD-B to 50 to 100 290 304 to 50 30W
The AREA output signal is turned on from Area 1:80[mm] between Area 2:90[mm].
75 80 164 112 40 40 52.4 26.2 22.2 47.6 16.5 6 16.5 3/4B 1B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 1 1/2B 200 110 95 186 126 50 70 69.9 35.7 30.2 58.7 16.5 8 16.5 1 1/4B 1 1/2B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 2B 250 140 115 218 150 60 90 77.8 42.9 42.9 77.8 21.5 10 21.5 2B 2 1/2B M16 x 2 Thread depth 34 M16 x 2 Thread depth 34 300 170 150 268 180 80 120
Rc 1/8 Body ported 80 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 130 (Without subplate 80) N.C. Base mounted (with sub-plate) SYJA724-01 SYJA724-02 N.O.
. -4- 1.1.2 Specification Model LEJS100T9H LEJS100T9A LEJS100T9B Stroke [mm] *1 200300400500600800100012001500 3000(mm/s2) 60 150 400 5000(mm/s2) 43 93 150 Horizontal 9800(mm/s2) 22 36 Work load [kg] *2 3000(mm/s2) 14 29 80 5000(mm/s2) 12 29 30 Vertical 9800(mm/s2) 8 9 Actuatr specifications Electric specifications Lock unit to 500 2300 1250 500 Max. speed *3 501 to 1000 1600 800 320 [mm/
.: 1.7 mm) White(B side solenoid) Red (COM) Mold coil Black (A side solenoid) L/M plug connector assembly 80 A DXT170 Lead wire length Lead wire color Connector Lead wire with socket Symbol Lead wire length (mm) Symbol Note Lead wire Nil Socket only (2 pcs.)
(Note: l,/aximum speed for 80 & 100mm bore s ze is 28 in/sec ) Engineercd pislon Urethane bumpers available as I Available in I bore sizes and 9 different mounting styles.