MXW

(Roll moment) Moment MXW25 120 70 (Static moment/Dynamic moment) Allowable Moment MXW25 70 100 50 (Nm) 30 40 Maximum moment (Nm) Maximum moment (Nm) 50 MXW20 25 30 40 Roll moment Pitch moment Yaw moment MXW20 20 Model Mr Mp/Mep My/Mey 15 MXW16 20 MXW16 12 10 15 3 5 5 MXW8 7 10 MXW12 MXW12 2 10 10 MXW12 4 5 7 5 4 3 12 20 20 MXW16 MXW8 MXW8 3 2.5 25 40 40 MXW20 2 2 1.5 50 100 200 300 500 65

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

(mm) 15 27 57 86 160 224 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCUK N S NBR 40 50 40 50 Silicon rubber Urethane rubber Fluororubber Pad type U F E EPR 63 63 AMJ H Heavy duty 80 80 100 100 AMV Add NBR mass to the table on the right for other materials. 125 125 AEP Dimensions HEP ZP H 40 50 63 80 ZP H 100 125 ZP H Related Equipment 3 x 6.5 3 x 4 4 x 8 4 x 5 4 x 9.5 4

48

Operating Range Auto Switch Mounting Example Part no.: JMGPM20-45 A 5 mm width spacer is installed in the JMGPM20-50.

MHZ2/MHZJ2

External gripping force Internal gripping force MHZ 2-10D MHZ 2-10D Pressure 0.7MPa 25 20 0.6MPa 20 Pressure 0.7MPa 15 0.5MPa MHZ2/Standard MHZJ2/With dust cover Gripping force N Gripping force N 0.6MPa 0.5MPa 0.4MPa 0.3MPa 0.2MPa 15 0.4MPa 10 0.3MPa 10 0.2MPa 5 5 0 10 20 30 40 50 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm F F F F MHZ 2-16D MHZ 2-16D Pressure 0.7MPa 60 1N

RZQ

Piston A Piston A C A A Piston B Piston B First-stage extension First-stage retraction Piston A Piston A B A C A C Piston B Piston B Second-stage extension Second-stage retraction 10-10-4 5 3 Position Cylinder Series RZQ Weight Weight Table Unit: kg Cylinder stroke Bore size (mm) 25-5 50-5 75-5 100-5 125-5 150-5 175-5 200-5 250-5 300-5 32 40 50 63 0.81 0.88 0.94 1.01 1.07 1.13 1.20 1.26 1.39

Compact Guide Cylinder Series MGQ

2 2 2 2 2.5 2.5 1 1 1 1 1.5 1.5 80 90 100 110 140 170 5 10 10 10 15 15 100 110 124 132 166 200 M8 x 1.25 11 11 12.5 15 18 21 16 17 17 19 21 25 E DB A 50 st or less 53 54 60 61 84 89 Bore size (mm) Bore size (mm) 32 40 50 63 80 100 MGT A DB E M8 x 1.25 Over 50 st 90 90 102 102 143 153 50 st or less 5.5 0 4 0 9.5 5 Over 50 st 42.5 36 46 41 68.5 69 M10 x 1.5 32 40 50 63 80 100 20 20 25 25 28

Bag Filter

B to Nominal filtration accuracy of 5, 10, 25, 50, 100 m can be selected.

Series AP500

No code M V X 4) PTFE recommended for applications such as within a process tool. 5) Not available with SH material.

Digital Flow Switch (Integrated display type) ( compatible)

13.6 2.7 depth 12 PF3W740 1/2, 3/4 98 71 38 68 48.6 19.2 28 49 35 28 16.8 2.7 depth 12 PF3W711 3/4, 1 124 92 46 77 57.6 23 42 63 48 28 18 3.5 depth 14 Bracket dimensions Symbol Symbol Piping port size G GG Model Model S T U V W WX Y Z PF3W704 24 22 32 40 50 4.5 5 1.5 PF3W704 3/8 20.9 23.9 PF3W720 28 22 32 40 50 4.5 5 1.5 PF3W720 3/8, 1/2 20.9, 23.9 23.9, 26.9 PF3W740 34 30 42 48 58 4.5 5

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

(mm) 5 10 15 20 25 5 10 15 30 20 25 30 0.2 MXPJ6 1.4 2.3 2.6 3.5 MXP6 50 100 200 300 500 700 6.3 1.7 MXP10 8.5 4.2 Average speed Va (mm/s) Collision speed V (mm/s) 13 9.8 17 4.5 MXP12 Note) Use the average speed when calculating static moment.

IZx-OMX0087

Flow rate : 180L/min 75 50 25 0 25 50 75 Installation distance from ionizer to workpiece [mm] 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm ionizer to workpiece [mm] Installation distance from mm 200 200 20m/s 400 400 2m/s 20m/s 2m/s 600 600 10m/s 800 800 10m/s 5m/s 1000 1000 1200 5m/s 1400 5-4.

Magnetically Coupled Rodless Cylinder

Models suitable to satisfy the requirement of 100 (N) are CY332 or CY340. 300 100 200 50 100 20 30 40 50 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10111213 7 8 9 1 01 11 21 3 1 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Useable range 5 1 0 1 2 3 4 5 6 7 8 9 10111213 Distance

Digital Flow Switch ( compatible)

[i_o ] SW/external input setting 2 [ oUt] SW output [oUt1] Output mode of OUT1 [ HYS] Hysteresis mode [1ot ] Switch operation of OUT1 [ 1_P] Normal output 50% of maximums rated flow range [ 250] 250 L/min (500 L type) [ 500] 500 L/min (1000 L type) [1000] 1000 L/min (2000 L type) [P_1 ] Set value of OUT1 5% of maximums rated flow range [ 25] 25 L/min (500 L type) [ 50] 50 L/min (1000 L type

Series KV2 Fittings

Color Caps KQ2C-_ _[ _ _ ] L ID OD Code Color R YR BR Y G CB W B GR BU Red Orange Brown Yellow Green Sky Blue White Black Grey Blue Applicable Tube OD (Inch) Part Number ID L Bag/Box Quantity OD 5/32 1/4 3/8 1/2 5/8 KQ2C-04[ ] KQ2C-07[ ] KQ2C-11[ ] KQ2C-13[ ] KQ2C-16[ ] 10.5 12.6 16.6 20.6 26.3 7.0 7.5 10.7 13.9 17.2 2.7 2.9 3.1 3.1 3.9 50/500 50/500 50/500 50/500 50/500 Fitting Boots KR-

Air Cylinder Series MB

W 32 40 50 63 80 100 22 30 35 35 40 40 27 125 to 1000 50 223 97 15 17 120 1/2 38 M27 X 2.0 13 M12 X 1.75 6 20 19 27 60 32 110 136 54 46 52 65 75 95 114 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 16 16 16 16 16 16 4 4 5 5 5 5 M6 X 1 M6 X 1 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6 6 7 7 10 10 M10 X 1.25 M14 X 1.5 M18

3

Operating Range (mm) Auto switch model Bore size 12 16 20 25 32 40 50 63 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V 6.5 5 5 5 5.5 5 4 3 11 9.5 9.5 9 9 10 7.5 6 D-F7/J79 D-F7V/J79C D-F7W/F7WV D-J79W D-F79F/F7BA D-F7BAV/F7NT 7.5 6.5 6.5 6 6 6 Since this is a guideline including hysteresis, not meant to be guaranteed (assuming approximately 30% dispersion).

MGC

Bore size 20 25 32 40 50 Rear plate 20 mm 25 mm 32 mm 40 mm 50 mm Nil R Without rear plate With rear plate Cylinder stroke (mm) Refer to Standard Stroke on page 8-22-5. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Compact Type

2 @4 @5 !5 t !5 t r !9 !8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o !3 y !1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.

Slider Type/Ball Bushing Bearing

CY1H25 (Nm) 64 56 50 40 30 50 40 M1 1.5 10 13 M2 2.5 16 16 M3 1.5 10 13 M1 28 56 64 M2 26 85 96 M3 28 56 64 Model CY1H25 CY1HT25 CY1HT32 Model CY1H10 CY1H15 CY1H20 30 28 26 20 20 CY1H20 CY1H15 16 13 Moment Nm Moment Nm 10 10 2 2.5 3 4 5 3 4 5 CY1H10 M3 2 CY1H10 1.5 1 1 0.5 0.5 70 100 300 500 100 300 500 1000 1000 70 M1 M2 Piston speed mm/s Piston speed mm/s Graph (3) Graph (2) Moment generated

Information

fluid system Facility water system Electrical system Temperature range setting Note 2) (C) Cooling capacity Note 4) (50/60 Hz) (W) Temperature stability Note 6) (C) Pump capacity Note 7) (50/60 Hz) (MPa) Rated flow Note 8) (50/60 Hz) (L/min) Tank capacity (L) Port size 5 to 40 1100/1300 1500/1700 0.1 0.13/0.18 (at 7 L/min) 7/7 Approx. 5 Rc1/2 Stainless steel, Copper (Heat exchanger brazing