Solid State Vacuum Regulator Series ITV2090/2091 Output pressure (kPa) 40 0 0 Out 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Count Input signal (%F.S.)
) AC200/220V10% 50Hz/60Hz ( 4) AC230V (50Hz) 4.3 6.9 10.7 AC200V (2) A (50/60Hz) 4.2/4.8 6.7/7.3 8.2/9.3 AC230V (50Hz) 960 1570 2300 AC200V (2) (50/60Hz) 1100/1450 1570/2050 2000/2850 AC230V (50Hz) 10 20 AC200V (3) A (50/60Hz) 10 15 R407C (HFC) AC230V (50Hz) 45010 76010 55010 74510 g AC200V (50/60Hz) 47010 83010 55010 74510 R1 R11/2 R2 mm 10 1 2 kg 90 130 160 166 kW 22 37 55 75
g 1 m: Approx. 105 g 2 m: Approx. 165 g 3 m: Approx. 225 g 5 m: Approx. 345 g 10 m: Approx. 645 g 0.5 m: Approx. 75 g 1 m: Approx. 105 g 2 m: Approx. 165 g 3 m: Approx. 225 g 5 m: Approx. 345 g 10 m: Approx. 645 g Weight 224-1 A Communication Cable/Connector M12 Example of Connection PLC !
. *1RSQB12-10m 5 45 CQ-M3X45L RSQB16-10m 7.5 55 CQ-M3X55L -15m 60 X60L RSQB20-10m 7 Example) CQ-M3X55L 2 pcs. 55 CQ-M5X55L -15m 60 X60L -20m 65 X65L RSQB32-10m 9 Mounting bolt 60 CQ-M5X60L -15m 65 X65L -20m 70 X70L RSQB40-20m 9.5 C D 75 CQ-M5X75L -25m 80 CQ-M5X80L -30m 85 X85L RSQB50-20m 9 75 CQ-M6X75L -25m 80 X80L -30m 85 X85L *1 Be sure to use the attached flat washers when mounting 12
VCC13-02(F) 45.9 Rc1/8 pilot (12) port G1/4, Rc1/4 IN(1) port 16.5 15 2 x 6 (for M5 mounting) G1/4, Rc1/4 OUT(2) port 6 22 22 58 6 25 25 50 15 15 G1/4, Rc1/4 RETURN(3) port M5 leakage detection port 30 19 11 23 Part number for sub-base VCC13-S02 02F [Rc1/4] [G1/4] 38.4 Sub-base material is aluminum + hard anodized containing PTFE. 70 0.5 to 2 650 Valve for Water and Chemical Base Fluids
(70.6) 700 -8 2.12 (53.8) Delivery pressure (mmHg abs) Derivery pressure (kPa) 600 -21 500 -35 400 -48 300 -61 200 -75 100 -88 0 -101 0 1 2 3 4 5 6 7 8 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.
Applicable Auto Switch Model Refer to p.5.3-2 to 5.3-75 for the detailed specifications of auto switches.
Output pressure (kPa) 40 0 0 Out 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Count Input signal (%F.S.)
100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 x 8 7 x 10 9 x 12 9 x 12 20 24 24 70 92 109 17-4-34 5 Series VNH High Pressure Coolant Valve 3.5 MPa, 7.0 MPa Precautions Be sure to read before handling.
Max.120'F(50'C) 2position : 20 ms or less 3position : 50 ms or less (70 PSI) Operating pressute range Ambient and fluid temPerature Flesponse time Max.
Hea\,y duty gu de rod type Wdide bearng lOpott typ" l l l l l l l l l l r r t t t r r l l l t t t t t t l l l l tza t t t t t t t t t l t t t t t t t t t l ,75 _ t t t l l l l l l l znn t r t t t t l t l l ' For bore sizes 12 & 16, only tu15 x 0.8 is availade.
Mounting: A (Both Ends Tapped), Bore Size: 63mm, Thread: Rc, Full Stroke: 75mm, First Stroke: 70mm
Mounting: L (Foot), Bore Size: 63mm, Thread: TN (NPT Thread), Full Stroke: 75mm, First Stroke: 70mm
Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 75/70, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket:
Mounting: B (Through Hole), Bore Size: 32mm, Thread: Rc, Full Stroke: 75mm, First Stroke: 70mm
Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 75/70, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket:
Mounting: Through Hole, Bore Size: 32mm, Thread: Rc, Full Stroke: 75mm, First Stroke: 70mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Mounting: Foot, Bore Size: 63mm, Thread: NPT Thread, Full Stroke: 75mm, First Stroke: 70mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
89 108 127 146 165 184 203 222 241 260 279 298 317 336 355 374 2 56 46 3 75 65 4 94 84 5 113 103 6 132 122 7 151 141 8 170 160 9 189 179 10 208 198 11 227 217 12 246 236 13 265 255 14 284 274 15 303 293 16 322 312 17 341 331 18 360 350 19 379 369 L1 L2 L3 1416 A VK300 Series 3 Port Solenoid Valve Direct Operated Poppet Type Type 42 Manifold/Base Mounted (Side ported) VV3K3-42Stations -01
Gasket INLET OUTLET 277 ZFA Series Dimensions: ZFA 100 200 Single unit Bracket Cover opened-up dimensions 70 Element extracted dimensions 55 2 x 4.5 2 x Port size Note) The above diagram is for ZFA200. The bracket location shows L side.