Rotary Table/

B B When D-F8 is used Size: 10 to 200 B A Reed switch Solid state switch Size 10 20 30 50 70 100 200 Rotation A B Actuation range A B Rotation range m Actuation range Rotation range m 36 50 66 68 78 91 115 10 190 90 10 90 40 54 60 72 82 95 19 21 27 31 37 41 48 61 17 23 27 33 37 44 57 190 80 10 80 10 10 65 10 190 65 10 10 50 190 50 10 190 45 10 45 Operating range at proper mounting position

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 11 11 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14

Ionizer

mA Residual voltage: 1 V or less (Load current at 100 mA) Max. applied voltage: 28 VDC Max. load current: 100 mA Residual voltage: 1 V or less (Load current at 100 mA) Output signal Voltage output 1 to 5 V (Connect a 10 k or larger load.) 50 to 2000 mm (Sensing DC mode: 200 to 2000 mm) 0 to 50C 35 to 80% Rh (No condensation) Cover of ionizer: ABS, Emitter: Tungsten, Single crystal silicon

Rotary Actuator/Vane Style Series CRB2

P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 Series CDRB1BW50 Series CRB1 Series CRB2 Single/Double type CDRB1BW63,80,100 Solid state switch for size 10 and 15 requires no switch block, therefore the unit part no. will be P211070-13.

VQZ1000/2000/3000

part number consists of 10 units.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

40 35 190 190 190 190 190 190 190 10 10 10 10 10 10 10 10 10 10 10 10 10 10 90 80 65 50 45 40 35 60 50 50 40 40 30 20 17 23 27 33 37 44 57 36 50 66 68 78 91 115 40 54 60 72 82 95 19 40 54 60 72 82 95 19 21 27 31 37 41 48 61 21 27 31 37 41 48 61 10 20 30 50 70 100 200 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

ISO Standard Hydraulic Cylinder

(CHSD) (CHSG) 212 40 231 50 257 63 Cylinder with built-in cover and mounting bracket allows easy disassembly and assembly. 295 80 325 100 Conforming to ISO 10762 (JIS B 8367-5:2002) CHSD Series/10 MPa 40, 50, 63, 80, 100 Conforming to ISO 6020-2 (JIS B 8367-2:2002) CHSG Series/16 MPa 32, 40, 50, 63, 80, 100 332 ISO Standard Hydraulic Cylinder 40, 50, 63, 80, 100 CHSD Series 10 MPa CHQ How

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

10 ISO Class 8 10 10 0 L/min (ANR) ISO Class 7 ISO Class 7 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] ISO Class 6 ISO Class 6 10 10 0 L/min (ANR) 50 L/min (ANR) ISO Class 5 ISO Class 5 10 10 1000 1000 20 L/min (ANR) ISO Class 4 ISO Class 4 100 100 70 L/min (ANR) 30 L/min (ANR) 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle diameter

1.1 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCJ2 SERIES NCJ2 BORE SIZES Ø6•10•16 Double Acting Single Rod / Double Rod Single Spring Return / Extend Compact and Lightweight Auto Switch Sensing Optional M A D E I N USA Non Rotating Piston Rod Optional High

, 150, 200 10 (3/8) 050. 100. 150, 200, 300, 400, 500, 600 16 (5/8) 050, 100, 150, 200, 300, 400, 500, 600, 700, 800 MaxImum Operating Pressure 0.7MPa / 100 PSI 6 0.1MPa / 17 PSI Minimum Operating Pressure 10, 16 0.05MPa / 8.5 PSI Ambient and Fluid Temperature -10C~+70C / 14~158F P O R T L O C AT I O N O N H E A D C O V E R Cushion Rubber Cushion (Standard) Symbol Bore Size: 6 10, 16 R In-Line

New

Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

SYJ300/500/700

M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to

100

ANR)] 200 100 400 300 600 500 700 0 Time to Reach Vacuum (Representative value) ZL1 Series ZL3/ZL6 Series ZL3m ZL6m (Tank capacity: 1 L) (Tank capacity: 1 L) 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure in tank [kPa] Vacuum pressure in tank [kPa] ZL6H ZL6M ZL3H ZL3M Time to reach vacuum [S] 1 2 3 4 5 6 0 Time to reach vacuum [S] 1 2 3 4 5 6 7 8 9 10 0

air-filter-e

, 100 Fiber 65 x L250 1, 5, 10, 20 5, 10, 20, 40 74, 105 Micromesh 65 x L250 Refer to pages 256 and 257 for the replacement element type.

Air Preparation Equipment

, 100 Fiber 65 x L250 1, 5, 10, 20 5, 10, 20, 40 74, 105 Micromesh 65 x L250 Refer to pages 256 and 257 for the replacement element type.

Compact Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

Rotary Actuator

Size Current model [kg] Reduction rate [%] CRA1 [kg] Angle adjustable type 30 50 63 80 100 0.3 10 0.27 Size: 50, 63, 80, 100 Size: 50, 63, 80, 100 1.5 13 1.3 D50 to 100 50 to 100 Rotating angle 2.5 12 2.2 90, 180, 100, 190 90, 180, 100, 190 4.3 10 3.9 8.5 14 7.3 With solenoid valve Size: 50, 63, 80, 100 Size: 50, 63, 80, 100 Mounting interchangeable with the current model 50 to 100 50 to

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

kPa 100 kPa 100 kPa to 100 kPa Black OUT + 12 to 24 VDC (Analog output) For positive pressure 0.1 MPa 1 MPa 0 0 to 1 MPa Load Blue DC () 1 0.6 A C B Pressure Dimensions PSE54M3 M5 PSE54R04 R06 ZSE ISE ZSP PS B 10 10 A ISA B PSE With across flats 7 M3: M3 x 0.5 M5: M5 x 0.8 IS A ISG (mm) (mm) PSE54-M5 PSE54-M3 PSE54-R06 PSE54-R04 ZSM A A 11.5 10.8 6 4 B 3.5 3 B 20 18 Common Dimensions PSE54

7

9 100 12 100 12 100 15 100 15 100 Note 1) Power consumption: The value at ambient temperature of 20C and when the rated voltage is applied.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

For analog voltage output of 0 to 10 V Can be changed Can be changed 10 5 At the time of shipment At the time of shipment Analog output [V] Analog output [V] 1 0 105 10 0 105 10 10% of the rated flow range 1 100 1 100 10% of the rated flow range 100% of the rated Max. value of 100% of the rated flow range Max. value of the display range flow range the display range Flow [L/min] Flow [L/min

MY1

MY1MW16 MY1MW16 MY1MW16 MY1MW16 1 0.1 MY1MW16 MY1MW16 MY1MW16 0.3 0.2 100 200 300400500 1000 1500 0.05 0.5100 200 300400500 1000 1500 100 200 300400500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Maximum Load Weight: MY1MW MY1MW: m3 MY1MW: m2 MY1MW: m1 30 100 200 20 40 50 100 10 30 50 20 40 4 5 30 MY1MW63 MY1MW63 MY1MW63 MY1MW63 3 10 Load weight (kg) Load weight