0.01

Centralized wiring type IISA2S-1 IISA2S-2 IISA2S-3 IISA2S-4 IISA2S-5 IISA2S-6 Individual wiring type IISA2P-1 IISA2P-2 IISA2P-3 IISA2P-4 IISA2P-5 IISA2P-6 ISA-5-1 ISA-5-2 ISA-5-3 ISA-5-4 ISA-5-5 ISA-5-6 ISA-5-7 73.0 135.5 173.0 210.5 248.0 285.5 323.0 ZSE30 ISE30 ZSE40 ISE40 5.5 35 35 ZSE10 ISE10 Pressure Gauge for Air Catch Sensor ISE70 Square embedded pressure gauge Round pressure gauge

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Metric size ZFC7 ZFC5 Symbol Applicable tubing O.D. 4 6 8 10 12 3 4 5 6 7 Option Nil B None With bracket Inch size B D E F 5/32" 1/4" 5/16" 3/8" Max.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

size 80 5 x 28l SWRM Polished round 18SPCC 113 5 18 123 5 80 clevis type 100 5 x 30l SWRM Polished round 20SPCC 132 7.5 20 147 5 100 clevis type C1 E B 125 5 x 35l SWRM Polished round 22SPCC 154 7.5 22 169 5 125 clevis type A 160 5 x 35l SWRM Polished round 24SPCC 190 7.5 25 205 5 160 clevis type Knuckle bracket Material: Cast iron 3 U (H8) Bore size (mm) Applicable cylinder type Hexagon

VCL

(mm) 2 3 4 5 7 10 Class 4 v v v v v Symbol 2 3 4 5 7 10 VCW Refer to the below table for orifice and port size combinations.

AC Servo Motor Driver (Pulse input type/Positioning type)

end Reverse rotation stroke end (Note 5) LSP 6 LSN 7 10m max.

Digital Pressure Switch

R Current read value For example, when the display value is 2.00[kPa], 5%R.D. is 5% of 2.00[kPa], which becomes 0.10[kPa]. When the display value is 1.00[kPa], 5%R.D. is 5% of 1.00[kPa], which becomes 0.05[kPa]. R.D. The pressure range within which the product will meet all published specifications.

Table of Contents - Tubing

PEAPP04 4 (5/32) 2.5 25.4 Model O.D. mm I.D. mm Min. bending radius mm Length 100 ft (33m) 250 ft (100m) 500 ft (153m) 1000ft (305m) PEAPP13 8 (5/16) 5 38 PEAPP11 6 4 31.8 PEAPP15 10 5 51 PEAPP07 4 (5/32) 2.5 25.4 Model O.D. mm I.D. mm Min. bending radius mm Length 100 ft (33m) 250ft (100m) 500 ft (153m) 1000ft (305m) Roll Reel Specifications Operating fluid Operating temperature Material

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

200 2 phase to 200 5 phase to 100 2 phase to 30 5 phase to 30 2 phase to 80 5 phase to 80 2 phase to 100 Sanyo Denki Co., Ltd. 5 phase to 200 2 phase to 200 5 phase to 100 2 phase to 30 5 phase to 30 2 phase to 80 5 phase to 80 2 phase to 100 LXSH5SB LXSH2SB LXSH5SA LXSH2SA LXSH5BC LXSH2BC LXSH5BD LXSH2BD LXSH5SB-B LXSH2SB-B LXSH5SA-B LXSH2SA-B LXSH5BC-B LXSH2BC-B LXSH5BD-B LXSH2BD-B 5 phase

Single Axis Electric Actuator Series LJ1

5 phase to 200 2 phase to 200 5 phase to 100 2 phase to 100 5 phase to 30 2 phase to 30 5 phase to 80 2 phase to 80 Sanyo Denki Co., Ltd. 5 phase to 200 2 phase to 200 5 phase to 100 2 phase to 100 5 phase to 30 2 phase to 30 5 phase to 80 2 phase to 80 Standard stroke (mm) and 25 50 75 100 125 150 175 200 Model Motor Manufacturer Maximum speed (mm/s) Capacity LXFHABC LXFHABD to 50 to 100

AZ1000

to 150 psig (0.034 to 1.0 MPa) BP Material 5) Panel mounting hole: dia. 1.56 inch (39.6 mm).

In-line Air Filter

Metric size ZFC7 ZFC5 Symbol Applicable tubing O.D. 4 6 8 10 12 3 4 5 6 7 Option Nil B None With bracket Inch size B D E F 5/32" 1/4" 5/16" 3/8" Max.

48

Stroke can be modified in 5 mm increments. Part no.

Vacuum Regulator

SET side tubing O.D. 6, 8, 10 1/4" , 5/16" , 3/8" 6, 8 1/4" , 5/16" 135 g (IRV10-C08) 125 g (IRV10A-C08) 250 g (IRV20-C10) 250 g (IRV20A-C10) Weight (Without accessories) Standard connections Single sided connections Note 1) Use caution it varies depending on the pressure in vacuum pump side.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

AS2000 AS3000 Valve O-ring Spring 3 5 6 14283 14284 14282 143022 143021 143023 NBR, Brass NBR Stainless steel Construction: AS4000 Component Parts No.

Manifold Specifications

Non plug-in type N T F Symbol 24 24 stations NPTF G Option VV5ZS3-51FD-091-01-MP5 VZS3150-5FZ VZS3250-5FZ 1 5 2 Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Note) Maximum stations 51F 16 stations 51G 15 stations 51 24 stations Symbol Port size 1 1 8 02 Rc 1 4 01 Rc (Manifold base) (2 position single) VV5ZS3-50-071-01-M5 VZS3150-5G 1 5 Embedded type One-touch

Fieldbus system (DeviceNet compliant)

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

Multistage Ejector Series ZL112/212 1

5 SYJ514 With valve Release valve (N.C.) !

α PneuAlpha HARDWARE MANUAL

These default values can be changed in the Offset FB Overall Accuracy +/5% (0.5V DC) Input Impedance 150 kOhm or higher Input Voltage 0 10V DC Conversion Speed 10 ms Resolution 10/250 mv Analog Input Range 0 250 ECC-PNAL-20M*-D 8 Channels: I01 I08 ECC-PNAL-10M*-D 6 Channels: I01 I06 Description Analog Input Specication 7 2.4 Output Specication PneuAlpha Hardware Specification 2 Table 2.7

CC

Model CCVS CCVL Bore size (mm) Intermediate stop accuracy of CCVS: 50 mm/s x 0.015 sec. = 0.75 mm in case of 50 mm/s Graph 5 10-17-4 5 Air-hydro Unit Precautions Be sure to read before handling.

CYV

5 !1 !9 #4 #8 E @7 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.