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The proof pressure is double the operating pressure range. -27No.LV50***-OMQ0004-F Analogue output Flow rate/Analogue output Output A B C Voltage output 1 V 1.1 V 5 V C Current output 4 mA 4.4 mA 20 mA Rated flow rate[L/min] B Model Minimum Maximum A LFE1 0.5 20 Flow rate 0 Minimum rated flow Maximum rated flow LFE2 2.5 100 LFE3 5 200 Out of range -28No.LV50***-OMQ0004-F Dimensions Note)

-(BJMT) . 9-5 9.3.2 HRS030-W-20-(BJMT) . 9-5 9.4 Cooling capacity . 9-6 9.4.1 HRS030--20-(BJMT) . 9-6 9.5 Heating capacity . 9-6 9.5.1 HRS030-A-20-(BJMT) . 9-6 9.5.2 HRS030-W-20-(BJMT) . 9-6 9.6 Pump capacity. 9-7 9.6.1 HRS030--20-(BJM) . 9-7 9.6.2 HRS030--20-T . 9-7 HRS Series HRX-OM-R016 Contents 9.6.3 HRS030--20-MT . 9-8 9.7 Required facility water flow (for water-cooled type) . 9-8 9.8

5 G H 0 E A F 4 (20) 14 (10) 32 (0) 50 (10) 68 (20) 86 (30) 104 (40) 122 (50) 140 (60) 32 (0) 50 (10) 68 (20) 86 (30) 104 (40) 122 (50) 140 (60) 158 (70) 176 (80) Ambient temperature (Air compressor intake air temperature) F (C) Pressure dew point F (C) How to calculate the amount of condensed water Example) To obtain the amount of condensed water when the pressure is applied to air up to

Q N F I NA F N CC 0.1 + CY3B6 to 15 CY3B50, 63 (mm) B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 K 5 4 11 8 10 15 16 25 26 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111

M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm J D side G1/4 port part Tightening torque: 10 1 Nm K G e w q Note) H r q w e Note) e w q Note) F q w E C A U side B D M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm Block Assembly C: 2 port valve manifold block assembly Manifold block assembly for gate valve D: 3 port valve manifold block assembly

Up to 3.5 MPa JA20-8-100 JA25-10-150 JA32-10-100 JA40-12-125 JA40-12-150 JA40-12-175 JA50-16-150 JA63-16-200 JA80-20-250 JA100-24-300 JA100-27-150 JA125-27-200 JA160-33-200 20 25 32 30, 40 40 30, 40 50 50, 63 80 100 100 125 160 8 10 10 12 12 12 16 16 20 24 27 27 33 44 49.5 49.5 60 60 60 71.5 71.5 90.5 110 110 123 165 17.5 19.5 19.5 20 20 20 22 22 27 32 35 34 38 30.5 34 34 38 38 38 44.5 44.5

16 20 25 32, 40 50, 63 80 100 125, 140 160 12 16 20 25 40 63 80 100 140 160 3-050 4-070 5-080 6-100 8-125 10-150 16-200 20-250 22-250 24-300 Precautions 2.

VVTA300 05 1 01 Exhaust type Thread type Stations 02 1 Nil F N T 2 stations Individual exhaust 3 Common exhaust Rc G NPT NPTF For manifold Caution 20 20 stations 1. Each valve is fixed on the manifold with two M4 mounting screws. Please tighten the screws properly when valves are reassembled. Screw tightening torque: 1.4 Nm 2.

MM Depth A1 Eh8 NA D MM AL A F H ZZ + Stroke S + Stroke 1.5 H NA ZZ + Stroke Female rod end Female Rod End [mm] [mm] Bore size A AL B1 D E F FL H H1 KA MM NA NN Bore size A1 H MM 20 14.5 12 13 8 18 0 0.033 11 8.5 30 5 Width across flats 6 length 3.5 M8 x 1.25 24 M18 x 1.5 20 8 15.5 M4 x 0.7 25 17.5 15 17 10 22 0 0.033 11 8.5 33 6 Width across flats 8 length 3.5 M10 x 1.25 27 M22 x 1.5 25

L F G D Bore size 12 16 20 25 12 mm 16 mm 20 mm 25 mm In the case of long strokes, use either ends tapped mounting or bracket mounting. Mounting brackets are shipped together, (but not assembled).

] F LEY63 Workpiece Load: F [N] 10 LEY32 LEY25 Center of gravity 1 0 100 200 300 400 500 600 700 800 900 1000 Stroke [mm] 852 Motorless Type Electric Actuator/ Rod Type LEY Series LEY25, 32, 63 How to Order q y u i o NZ 25 500 B w LEY e r t H q Accuracy w Size r Motor type t Lead [mm] y Stroke [mm] Symbol LEY25 LEY32 LEY63 A 12 16 (20) 20 B 6 8 (10) 10 C 3 4 (5) 5 L 2.862 25 32 63 Nil Basic

to 1000 150 to 700 150 to 700 21 19.5 19.5 15.5 14 12 10 8 20-0.033 56.2 46.5 37.5 33.5 7 5.5 5.5 5 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 26.5 22 20 20 51 42.5 34.5 30 181 159 146 146 M26 x 1.5 M26 x 1.5 M20 x 1.5 247 217 204 200 1/8 40 32 25 20 24 22 22 18 26-0.033 0 1/4 1/8 1/8 16 13 13 26-0.033 0 32-0.039 0 8 10 M32 x 2 1011Axial foot (L): RECL G H G F Width across flats B2 A K 2

(continued) -23No.PF-OMG0008-F Selection of reference condition Operate only the PF2A3 series. Select standard condition or normal condition for the display unit. Press the button to select. [ Anr]: Standard condition. Flow display which is converted in atmospheric pressure at 20 C, 65%R.H. [ nor]: Normal condition.

20 11 22 14 60 60 129 MB-SIO . 100 11 4 \20 90 15 158 132 \84 26 13.5 24 17 75 100 '29 25 +008001 (mm) [~ "r.

Cable length (L)[m] A1 1 2 5 6 (17.7) (10.2) (14) (18) 1 3 5 8 A B C 1.5 3 5 8 A6 B1 B3 A1 A3 B6 (13.5) 1 2 15 16 Connector B Connector D (30.7) L (11) (14.7) (10) 10 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m (Produced upon receipt of order) 15 20 Actuator side Controller side (5.5) (6.3) (5.7) (14.2) Connector C (Terminal no.)

Dimensions [mm] Model L1 L2 A B C D E F G J K LEPS10-25 138 152.5 61.8 20 22 30 29 20 29 39 88.2 LEPS10-50 163 177.5 24 43 34 50 24 50 60 113.2 LEPS10L-25 124 138.5 47.8 20 22 30 29 20 29 39 88.2 LEPS10L-50 149 163.5 24 43 34 50 24 50 60 113.2 394 LEPY/LEPS Series Specific Product Precautions 1 Be sure to read this before handling the products.

F = one finger thrust. 2 1 2 1 MHL2-10D MHL2-16D MHL2-16D MHL2-10D 60 60 25 25 Gripping force (N) Gripping force (N) Gripping force (N) Gripping force (N) Pressure 0.6 -MPa Pressure 0.6 MPa 50 50 20 20 Pressure 0.6 MPa 0.5 MPa 0.5 MPa Pressure 0.6 MPa 40 40 15 15 0.4 MPa 0.5 MPa 0.4 MPa 0.5 MPa 0.4 MPa 30 30 0.4 MPa 10 10 0.3 MPa 20 20 0.3 MPa 0.3 MPa 0.3 MPa 5 0.2 MPa 5 10 10 0.2 MPa 0.2

Refer to page 449 for details of the replacement. 235 Regulator/Single Unit Type Series ARM10 Replacement Procedure is P.453 Construction ARM10 ARM10F E A F D E B D C B C F G A G *BLUE links will lead to purchase pages. Replacement Parts Description Note Material Part no.