SMC

30 20 28 23 28 G 9 12 13 15 20 27 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA 82.5 132.5 GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 13-/22-MXS8L-10 13-/22-MXS8L-20 13-/22-MXS8L-30 13-/22-MXS8L-40 13-/22-MXS8L-50 13-/22-MXS8L-75 139 MXS Air slide table 1322Dimensions: MXS12 1322Basic style 2-M4 x 0.7 thread depth 5 Operating port 2-M5 x 0.8 9.5 2 Vacuum suction port M5 x 0.8 5.5 J 8 Max. 11 (With stroke

0.4

Note 2) Special wiring specifications are available as semi-standard to increase the maximum number of stations. 557 VQC Series S VQC1000 Series Kit (Serial transmission) For EX500 Gateway Decentralized System 2 (128 points) IP67 compliant VV5QC11 S kit (Serial transmission kit: EX500) L2 L1 42.5 (Pitch) P = 10.5 28 1.5 4 x M4 Mounting hole Indicator light 1.5 (12) 63.5 2 90.9 (8) B A B A

100

Thread size Recommended tightening torque [Nm] 1/8 3 to 5 1/2 28 to 30 3/4 28 to 30 1 36 to 38 Vacuum port Vacuum pressure detection port Exhaust block surface to be held (Width across flats 40) Body surface to be held (Width across flats 40) Exhaust port Branch Port Warning 1.

ZP

(mm) D Model B d H C SNJ-015A Y M10 x 1 3 14 16.2 E SN-015A M14 x 1 5 19 21.9 SNJ-010A M8 x 1 3 12 13.9 C A B Ball joint type: 40, 50 D E Y C A B (mm) D E Y ZP10F Model B A C 1.5 6.5 10 12 ZP13F 13 15 3 8.2 2 7 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 3 25 28 4 10.2 ZP32F 9 32 35 ZP40F 5 13 40 43 10 28 ZP50F 6 14 50 53 8 13-11-101 Vacuum Pad Series ZP Replacement Parts: Pad Unit (With lock ring/

IDG

Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ C D MRQ D(Picture of MSQB1A) 20Measurements mm Size Model Mass (g) 70 105 150 250 A B C D MSQB1A 50.5 28 25 16 1 MSQB2A 56 30 28 18 2 MSQB3A 60 34.5 30.5 20.5 3 MSQB7A 73.5 41 34.5 23 7 Variety of installation options for space-saving Offers

MLGP

Flat head watchmakers screwdriver Hexagon wrench key 2 Auto switch mounting bracket BMG1-040 Hexagon socket head cap screw (M2.5 x 8l ) Switch mounting screw (M2.5 x 4l ) (Included as accessory) Auto switch Hexagon wrench key 2.5 Hexagon socket head cap screw (M3 x 16l ) Auto switch 9-11-28 28 Compact Guide Cylinder with Lock Series MLGP Operating Range Auto switch model Bore size (mm) 25

Digital Flow Switch

--CNPN (1 output) + Analogue (4 to 20 mA) output type PFMB7--DMaximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop: 1 V or less C: Analogue output: 1 to 5 V Output impedance: 1 k D: Analogue output: 4 to 20 mA Maximum load impedance: 600 NPN (1 output) + External input type PFMB7--GMaximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop:

Digital Flow Switch (Integrated display type) ( compatible)

49 35 28 16.8 2.7 depth 12 PF3W711 3/4, 1 124 92 46 77 57.6 23 42 63 48 28 18 3.5 depth 14 Bracket dimensions Symbol Symbol Piping port size G GG Model Model S T U V W WX Y Z PF3W704 24 22 32 40 50 4.5 5 1.5 PF3W704 3/8 20.9 23.9 PF3W720 28 22 32 40 50 4.5 5 1.5 PF3W720 3/8, 1/2 20.9, 23.9 23.9, 26.9 PF3W740 34 30 42 48 58 4.5 5 1.5 PF3W740 1/2, 3/4 23.9, 29.9 26.9, 31.9 PF3W711 44 36 48

Digital Flow Switch (Remote type monitor unit)

Colour of cover Insulator outside diameter ZS-28-CA-4 (option) Blue 1.15 to 1.35 ZS-28-C-1 Yellow 1.0 to 1.2 : The standard value of the insulation outside diameter of AWG No.23 is 1.14, but ZS-28-CA-4 is recommended as an applicable connector, taking outside diameter error into consideration. Do not cut the insulator.

IZ-OMU0031-CN

L(2) ZS-27-01 -7No.IZ*-OMU0031 LCD (OUT1)() (OUT2)() (OUT1)() OUT1ON (OUT2)() OUT2ON LCD 4 ON/OFF ON/OFF -8No.IZ*-OMU0031 (2 m)ZS-28-A (1 )ZS-28-C 0.140.2mm 0.81.0 (M3X5 L(2))ZS-28-B (M3X8 L (2 ))ZS-27-C (M38 L(2))ZS-27-D ZS-27-01 -9No.IZ*-OMU0031 M3X5 L(2) 0.50.7 Nm M3X5L (ZS-28-B) M3X5L M3X8 L(2 ) M3X8L ( ZS-27-01) (ZS-27-C) 90 2 -10No.IZ*-OMU0031 ,FG 20mm () SMC 3M

HRX-OM-W038

Piping port size Table 3-5 Piping port size Name Port size1 Recommended Recommended proof tightening torque pressure for piping Circulating fluid supply Rc1/2 28 to 30Nm 0.8MPa more Circulating fluid return Rc1/2 28 to 30Nm 0.8MPa more Faiclity water inlet3 Rc3/8 22 to 24Nm 1.0MPa more (Facility water pressure 0.3 to 0.5 MPa) Faiclity water outlet3 Rc3/8 22 to 24Nm 1.0MPa more Automatic water-fill

HRX-OM-W002

Table 3-10 Piping port size Description Port Recommended Recommended piping size tightening torque specifications Circulating fluid outlet port Rc1/2 28 to 30Nm 0.4MPa or more*2 Circulating fluid return port Rc1/2 28 to 30Nm 0.4MPa or more*2 Facility water inlet port *3 Rc3/8 22 to 24Nm 1.0MPa or more (Supply puressure: 0.3 to 0.5MPa) Facility water outlet port *3 Rc3/8 22 to 24Nm 1 For NPT

SFOD-OMT0009CN

-COM3 19 -COM3 38 1) 28 N.C. -COM4 20 1) 9 N.C. -COM4 39 1) 29 N.C.

SI unit ( device)

27 26 25 24 31 30 29 28 27 26 25 24 Force output 4 24-31 Output 28-31: Setting value F0 1 1 1 1 0 0 0 0 0F 0 0 0 0 1 1 1 1 Hold last state Structure of Output Switching Counts (index 68) The output switching count parameter consists of thirty-two sub-indices that represent bit fields with a size of 32 bits each.

SFOD-OMT0010

Product Specifications . 25 4.1 Basic Specifications . 25 4.2 Parts Description . 26 4.3 Dimensions . 27 (1) Direct mounting . 27 (2) DIN rail mounting . 27 4.4 Mounting . 28 (1) Mounting . 28 (2) Grounding . 29 1 No.SFOD-OMT0010-B (3) Mounting location . 30 5.

Digital Flow Switch (Remote type sensor unit)

49 35 28 16.8 2.7 depth 12 PF3W511 3/4, 1 124 92 46 62.6 57.6 23 41 42 63 48 28 18 3.5 depth 14 Symbol Bracket dimensions Model S T U V W WX Y Z PF3W504 24 22 32 40 50 4.5 5 1.5 PF3W520 28 22 32 40 50 4.5 5 1.5 PF3W540 34 30 42 48 58 4.5 5 1.5 PF3W511 44 36 48 58 70 5.5 7 2 -41No.PF-OMN0010-J PF3W521 Basic type Symbol Piping port size A AA B DD E F G H J K L N P Model 11/4, 11/2 104 74 31

MLGP

50 128 124 200 200 300 300 52 72 54 62 156 188 80 100 M12 x 1.75 M12 x 1.75 10.5 12.5 20 17.5 236 M14 x 2.0 M14 x 2.0 WB Bore size (mm) X YY YL Z st25 st50 5028 28 35 92 97 128 135 178 185 54 71 M12 x 1.75 42 60 80 100 MLGPL (ball bushing)/Dimensions A, DB, E MLGPM (slide bearing)/Dimensions A, DB, E (mm) (mm) A E

MLGP

50 128 124 200 200 300 300 52 72 54 62 156 188 80 100 M12 x 1.75 M12 x 1.75 10.5 12.5 20 17.5 236 M14 x 2.0 M14 x 2.0 WB Bore size (mm) X YY YL Z st25 st50 5028 28 35 92 97 128 135 178 185 54 71 M12 x 1.75 42 60 80 100 MLGPL (ball bushing)/Dimensions A, DB, E MLGPM (slide bearing)/Dimensions A, DB, E (mm) (mm) A E

SYJ300/500/700

wire length) Pg7 80.5 [82.7] 90.5 70.7 [72.9] 79.6 72.2 65.7 49.7 23.5 10.9 23.5 10.9 23.5 10.9 23.5 10.9 21 21 21 21 25 25 25 25 2-3.2 (For mounting) 2-3.2 (For mounting) 28 2-3.2 (For mounting) 2-3.2 (For mounting) 28 28 28 Refer to page 4-4-61 for dimensions with connector cable. 4-4-40 41 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ700 Base Mounted (With Sub-plate) [