4/5 Port Air Operated Valve Series SYJA3000

5 port 4 port 3 position exhaust center 5 3 position pressure center 2 position single 2 position single (B) 2 (B) 2 (A) 4 (A) 4 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) How to Order Manifold Base 2 position double 2 position double (B) 2 (A) 4 (B) 2 (A) 4 Same manifolds as series SYJ3000 are prepared. 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) SS5YJA3 Fill the same as SS5YJ3 3 position closed center 3 position

VFR

0, Metal joint q, w, O-ring t, y, u Terminal i, Junction cover o, Adaptor plate, Pin housing, Guide AXT625-20A(2) 1 2 C6 C8 Plug-in type Manifold block assembly (1) !0 1 2 C6 C8 AXT625-10A(3) Manifold block !0, Metal joint q, w, O-ring t, y, u Non plug-in type Plug-in type With terminal block (3) For 01T 01T1 AXT625-2A-20 End plate (U side) assembly End plate (U) !

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

M4 mounting hole A B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken

Vacuum System Peripherals:

S U D side D U side 2 to 10 stations B Special specifications M 2 to 20 stations Both sides Made to order. When using both types, specify C4 and C6 specifically; do not just use X marking.

42

SYJ SZ VF VP4 VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 Plug lead type Plug-in type VQZ Lead wire length L 0: Approx. 600 mm L 1: Approx. 1500 mm L 2: Approx. 3000 mm 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port SQ 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port 106.5 155.4 (Single) 164.4 (Double) 178.5 (3-position) 3.5 VFS 3.5 139.9 (Single) 148.9 (Double) 163 (3-position

VZS

fitting Applicable tubing O.D.: 6 C6 2 stations are needed to mount control unit.

SYJ300/500/700

C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4 C6 Type SS3YJ5-41R-C6 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (Example) Instruct

3 Port Air Operated Valve Series SYJA300

(Value in the initial state) VA Body ported SA Series SYJA500 VA With Bracket VM VR Air operated valve type SYJA5 2-M5-F, SYJA7 2-01-F 1 2 1 2 Note) Bracket is not mounted.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

2.6 (For mounting) 2-2.6 (For mounting) 2-2.6 (For mounting) 20 20 20 2-2.6 (For mounting) (2.3) (2.3) 20 (2.3) 23 23 23 23 27 Refer to the page 91 for dimentions with connector cable. 28 Series SYJ5000 2 Position Double [ ]: AC G H Grommet (G), (H): SYJ5220-M5 Built-in one-touch fitting: SYJ5220G H C4, N3 C6, N7 G: Approx. 300 H: Approx. 600 (Lead wire length) 87.2 [91.6] 43 3.5 11 5 B

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

position single 2 position double 3 position 0.1 to 0.7 0.2 to 0.7 100kPa to 0.7 2 to 16 stations Location Direction P/R ports Base Side C8 (8 One-touch fitting) C10 (10 One-touch fitting) C4 (4 One-touch fitting)/C6 (6 One-touch fitting) C4 (4 One-touch fitting) C6 (6 One-touch fitting)/C8 (8 One-touch fitting) C6: PA/B 4.68 (0.26) A/BR 4.68 (0.26) C8: PA/B 12.6 (0.7) A/BR 12.6 (0.7) A,

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Note 2) ( ): Denotes without sub-plate. 5-2-6 5 5 Port Air Operated Valve Series SYA3000/5000/7000 Series SYA3000: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" Manual override (Non-locking) SA VA 2 2.2 (For manifold mounting) SA 2 3.2 (For mounting

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

How to Order Manifold Assemblies (Example) Double solenoid (24VDC) SY3260-5G-C6 (2 sets) Cylinder port size M5: M5 x 0.8 Example Single solenoid (24VDC) SY3160-5G-M5 (2 sets) Cylinder port size C6: With 6 One-touch fitting Manifold base (4 stations) SS5Y3-60-04U R D side Port R C8: With 8 One-touch fitting P Stations 1 2 n Port P C8: With 8 One-touch fitting U side SS5Y3-60-04U 1 set (type

Rubber seal 5 Port Solenoid Valve Series SYJ7000

) (3.6) (3.6) (3.6) (3.6) 2-3.2 (For mounting) 2-3.2 (For mounting) 25 25 25 28 28 28 28 Refer to the page 91 for dimentions with connector cable. 52 Series SYJ7000 2 Position Double [ ]: AC G H G H C6, N7 C8, N9 Grommet (G), (H): SYJ7220-01 Built-in one-touch fitting: SYJ7220G: Approx. 300 H: Approx. 600 (Lead wire length) 107.4 [111.8] 63 3 13 B A B A Manual override 17 35 17 2-3.2 (For

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

per/station: 19 2 stations: 126 Addition per/station: 38 2 stations: 209 Addition per/station: 60 C3 (For 3.2) C4 (For 4) C6 (For 6) M5 (M5 thread) Side Top 2 to 20 stations Rc 1/8 VV3QZ15VQZ100 VQZ115 V100 C4 (For 4) C6 (For 6) C8 (For 8) Rc 1/8 2 to 20 stations VV3QZ25VQZ200 Rc 1/4 Side VQZ25 SY SYJ 1(P) port Rc 3/8 3(R) port Rc 1/4 C6 (For 6) C8 (For 8) C10 (For 10) Rc 1/4 2 to 20 stations

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

C6 :One-touch fitting 6 VVQZ200-10A-5 2.10-33 VQZ100/200/300 Base Mounted Dimensions: VQZ100 VV3QZ15C Station Port size (35) 27 (11) Grommet(G) C6: One-touch fitting for 6 C4: One-touch fitting for 4 C3: One-touch fitting for 3.2 n-C3,C4,C6,M5 (5.5) 20 (7.5) 2-4.5 Mounting holes (4.5) 11.7 M5: M5 thread DIN rail clamp screw U side n Maual override 5.5 A 2 A 2 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

0, Metal joint q, w, O-ring t, y, u Terminal i, Junction cover o, Adaptor plate, Pin housing, Guide (2) 1 2 C6 C8 AXT625-20APlug-in type Manifold block assembly (1) 10 1 2 C6 C8 (3) AXT625-10AManifold block !

5 Port Solenoid Valve

x M4 Mounting hole Connector for Handheld Terminal End plate n 8 7 6 5 4 3 2 D side U side Stations 1 3/4" 3(R) port 1/2" 1(P) port 30 101.2 8 95.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.3 11.5 56.6 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 11.5 12 1/8" External pilot port 15.7 27.9 33.5 1/8" PE. port 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port 37.5 45.2

Bottom

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

2 C43, C6, 1/8 PF2M702 0.05 5 PF2M705 0.01 0.1 10 PF2M710 0.3 25 PF2M725 C6, N7, 1/8 0.5 50 PF2M750 0.1 1 100 PF2M711 C8, N7, 1/4 2 200 1 PF2M721 New New Compatible The flow rate value and the device status can be figured out easily via the process data.

VZ100/300/500

40-2 40R-1 40-1 Model Manifold type Single base/B mount 21R-1 P(SUP)/R(EXH) Common SUP/Common EXH Valve stations 2 to 20 stations A port porting specifications Location Valve Bottom Top Rc Base Direction 1(P), 3(R) port Side 1 8 Rc 1 8 Rc 1 8 M5 x 0.8 M5 x 0.8 M5 x 0.8, Rc 1/8, C4 (One-touch fitting for 4), C6 (One-touch fitting for 6) M5 x 0.8 M5 x 0.8 Port size 2(A) port 1 8 X port Note

The PFM is available in four maximum flow rate options 10, 25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon or carbon dioxide. 2-color display flow switch., Sensor and monitor separation, which allows remote monitors centralization., Integrated flow adjustment valve as an option, reducing piping and saving space (unique feature in the market)., Operation indication