7

B VXK G1/2 R VXD VXD A VXZ IN OUT N SMC 8 x 18 VXS VXB F S D Q VXE VXP Conduit C E U 280 VXR VXH 23 B G1/2 VXF R T VX3 A IN OUT N SMC VXA 8 x 18 F S Q D Flat terminal C E U 11 R T B A IN OUT N SMC 8 x 18 S Q D F (mm) Electrical entry Model Flat terminal Conduit terminal Conduit Applicable flange A B C E F N Q R S D T T U U U 84 (92) V T 90 (98) 179.5 (187.5) 92.5 (100.5) 92.5 (100.5) 98.5

NCQ8

T NCDQ8200-T NCDQ8250-T Super Compact with Built-in Magnet (OZ) Stroke Model 025 (1/4") 037 (3/8") 050 (1/2") 062 (5/8") 075 (3/4") 087 (7/8") 100 (1") 125 (1-1/4") 150 (1-1/2") 175 (1-3/4") 200 (2") 012 (1/8") 2.35 3.75 7.11 11.5 16.5 25.7 NCDQ8Z056-T NCDQ8Z075-T NCDQ8Z106-T NCDQ8Z150-T NCDQ8Z200-T NCDQ8Z250-T 4.84 5.44 13.9 21.8 26.9 36.3 4.55 6.40 13.2 20.7 25.3 34.6 4.27 5.98 12.4 19.6

HEC_W-E

Temp. upper/lower 4 Fig.9-3 limit alarm occurrence 9-1 Alarm 9.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.9-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.9-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N

Electric Actuator with Integrated Guide

Screw lead LC1-1(Either T-nuts or T-brackets for mounting) LC1-1-1000 (Controller connector) LC1-1-2000 (Controller connector) (Refer to page 85.) F H L 6mm 10mm 20mm Note) The following options are necessary for operating and setting the controller.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! ! , , + r l r c o M . 2 { + l .r!9!4t i I '.*"{ c o M . r s r + t '.*{ la:q.B js t ) L l s ! r 6 L + r tL--g.S!" i6 t+l r-fP!3zo r t I r-V-ru ?sdm,{t-!:-!!.Fst-r ?i,oxl+4r5"a, I l r c o M " I r + r t r c o M c , + l ll coM" i q (+) ( coMo ro(+) /r'Y;-"' M* fr'fi-"" ' ire!.f s | ) ,-Js!

air-filter-e

metal T N V Fiber (Honeycomb) Note 1) Not used with fiber elements.

Air Preparation Equipment

metal T N V Fiber (Honeycomb) Note 1) Not used with fiber elements.

MG

1 !7 @6 !0 r @4 e o t 16: 25 stroke MX 20, 25: 75 stroke or less !8 MTS !

Air Cylinder

Auto switch model Different surfaces Same surface Different surfaces Same surface CJ1 D-M9 5 15 Note 1) 40 Note 1) 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 55 + 35 (n 2) (n = 2, 3, 4, 5) CJP D-M9W 10 15 Note 1) 40 Note 1) 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 55 + 35 (n 2) (n = 2, 3, 4, 5) CJ2 D-M9A 10 25 40 Note 1) 25 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 35 (n 2) (n = 2, 3, 4, 5) JCM

Micro Mechanical Valve Series VM1000

N F.O.F. 2 x 1 8 3 x 1 4 P.T.

ITV-E

0 2 I nput si gnal 010VD C I TV 0 3 Preset i nput t ypeI TV 0 4 Pow er suppl y 24VD C I TV 0 04 Brow n 1215VD C I TV 0 14 + Bl ue Pow er suppl y Fi g. 1 Rel at i on bet w een preset pressure and sw i t ch S1 W hi t e Preset pressure P_1 P_2 P_3 P_4 Bl ack S2 S1 O FF O N O FF O N S2 O FF O FF O N O N 5 W i ri ng di agram M oni t or out put CAU TI O N W hen t he m oni t or out put i

O

0 2 I nput si gnal 010VD C I TV 0 3 Preset i nput t ypeI TV 0 4 Pow er suppl y 24VD C I TV 0 04 Brow n 1215VD C I TV 0 14 + Bl ue Pow er suppl y Fi g. 1 Rel at i on bet w een preset pressure and sw i t ch S1 W hi t e Preset pressure P_1 P_2 P_3 P_4 Bl ack S2 S1 O FF O N O FF O N S2 O FF O FF O N O N 5 W i ri ng di agram M oni t or out put CAU TI O N W hen t he m oni t or out put i

O

0 2 I nput si gnal 010VD C I TV 0 3 Preset i nput t ypeI TV 0 4 Pow er suppl y 24VD C I TV 0 04 Brow n 1215VD C I TV 0 14 + Bl ue Pow er suppl y Fi g. 1 Rel at i on bet w een preset pressure and sw i t ch S1 W hi t e Preset pressure P_1 P_2 P_3 P_4 Bl ack S2 S1 O FF O N O FF O N S2 O FF O FF O N O N 5 W i ri ng di agram M oni t or out put CAU TI O N W hen t he m oni t or out put i

CQ2

Note No. q w e r t y u i o !0 !1 !2 !3 !

C85

Description Qty. 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 q Rod cover Head cover N Head cover E Head cover F Cylinder tube Piston rod Piston Plain washer Bush Bush Retaining ring Return spring 2A 2B 2C e r t y u i o !

MB

D-Y59 D-Y7P D-Y7W 15 CP95 (n2) 2 15 + 40 n = 2, 4, 6, 8 n side NCM 2 (Different sides or Same side) 1 10 D-Y69 D-Y7PV D-Y7WV NCA (n2) 2 10 + 30 n = 2, 4, 6, 8 n D2 (Different sides or Same side) 1 20 -X D-Y7BAL (n2) 2 20 + 45 n = 2, 4, 6, 8 n 202 (Different sides or Same side) 1 15 20 Data D-P5DWL (n2) 2 (n2) 2 15 + 65 n = 2, 4, 6, 8 20 + 65 n = 2, 4, 6, 8 n 6-6-15 15 Air Cylinder: Standard

ISO Cylinder

n n Type A Bottom side mounting B*1 Front side mounting *1 20, 25 only.

Stopper Cylinder

4 y q r e w @1 @2 !5 !6 t u i o !7 !9 !8 @0 u i !8 !9 !6 @0 o 20 32, 40, 50 w @2 @1 !5 !4 t i i u !8 !9 w @2 u !5 !4 y q !9 @0 @1 t e @0 !6 !6 !8 o y q e o Double acting with spring loaded (B) !0 20, 32, 40, 50 12, 16 !0 Single acting / spring extend (T) !1 !2 !0 12, 16 20, 32, 40, 50 !0 !3 Component Parts No.

MGP

Nil High precision ball bushing S 1 pc. n "n" pcs.

Vacuum Unit

Combination of direct exhaust and end plate exhaust from each station C V None V Cannot be selected when t is N r Rated voltage (Supply valve/Release valve) C1 V None None Cannot be selected when t is P or T Symbol Voltage 5 24 VDC 6 12 VDC L None V V Cannot be selected when t is N L1 None None V L2 None V None Cannot be selected when t is P or T L3 None None None 4 For the connector length