Stations: 04 Stations, Port Size: ø4 One-touch Fitting, Cable Length: 2 [Lead Wire (25 Cores) 3.0 m Lead Wire], Option 1: None, Option 2: Built-in Silencer, Direct Exhaust

Stations: 04 Stations, Port Size: ø6 One-touch Fitting, Cable Length: 1 [Lead Wire (25 Cores) 1.5 m Lead Wire], Option 1: None, Option 2: Built-in Silencer, Direct Exhaust

m(200 mesh)105 ?m(150 mesh)149 ?m(100 mesh)74 ?m(200 mesh)105 ?m(150 mesh)149 ?m(100 mesh)FH990-04/06EM520-074NEM520-105NEM520-149NEM230-074NEM230-105NEM230-149N?65 x 90

Indicator: S, Control Range: M (1 to 50mm/s), Control Method: E (Meter-out), Stud Position: A (Right Side), Tube Diameter: 04 (ø4), Thread: R, Port Size: M3 (M3 x 0.5)

Indicator: S, Control Range: M (1 to 50mm/s), Control Method: E (Meter-out), Stud Position: B (Left Side), Tube Diameter: 04 (ø4), Thread: R, Port Size: M3 (M3 x 0.5)

Stations: 04 Stations, Port Size: C6 (ø6 One-touch Fitting), Cable Length: 2 [Lead Wire (25 Cores) 3.0 m Lead Wire], Option 1: D0 (DIN Rail Mount w/o DIN Rail)

Body Size: 40, Thread: N (NPT), Port Size: 04 (1/2), Option: CM (C + M), Attachment: SV (S + V), Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: NZ (N + Z)

Body Size: 40, Thread: Rc, Port Size: 04 (1/2), Option: M (Round Type Pressure Gauge w/Color Zone), Attachment: S (Pressure Switch), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 4 (1/4), Socket, Plug Type: P (Plug), Port Size: 04 (R, Rc(PT) 1/2 or Ø4 Tube), Connection: M (Male Thread), Sealant: S (Sealant-Male Thread Only)

Body Size: 4 (1/4), Socket, Plug Type: S (Socket), Port Size: 04 (R, Rc(PT) 1/2 or Ø4 Tube), Connection: M (Male Thread), Sealant: S (Sealant-Male Thread Only)

Body Size: 6 (1/2), Socket, Plug Type: P (Plug), Port Size: 04 (R, Rc(PT) 1/2 or Ø4 Tube), Connection: M (Male Thread), Sealant: S (Sealant-Male Thread Only)

Body Size: 6 (1/2), Socket, Plug Type: S (Socket), Port Size: 04 (R, Rc(PT) 1/2 or Ø4 Tube), Connection: M (Male Thread), Sealant: S (Sealant-Male Thread Only)

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 04 (1/2), Option: BDM (B + D + M), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 04 (1/2), Option: BCM (B + C + M), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Clean Series: Copper, Fluorine and Silicon-free + Low Particle Generation, Stations: 04, Cylinder Port: w/One-touch Fitting for ø6, Kit: w/1.5 m Cable, Top Entry, Option: w/Name Plate

Stations: 04 Stations, Port Size: ø6 One-touch Fitting, Cable Length: 1 [Lead Wire (25 Cores) 1.5 m Lead Wire], Option 1: Name Plate, Option 2: Built-in Silencer, Direct Exhaust

Stations: 04 Stations, Port Size: ø6 One-touch Fitting, Cable Length: 2 [Lead Wire (25 Cores) 3.0 m Lead Wire], Option 1: DIN Rail Mount w/o DIN Rail, Option 2: -

Indicator: S, Control Range: M (1 to 50mm/s), Control Method: E (Meter-out), Stud Position: A (Right Side), Tube Diameter: 04 (ø4), Thread: R, Port Size: M5 (M5 x 0.8)

Stations: 04 Stations, Port Size: C6 (ø6 One-touch Fitting), Cable Length: 2 [Lead Wire (25 Cores) 3.0 m Lead Wire], Option 1: None, Option 2: S (Built-in Silencer, Direct Exhaust)

Stations: 04 Stations, Port Size: C4 (ø4 One-touch Fitting), Cable Length: 2 [Lead Wire (25 Cores) 3.0 m Lead Wire], Option 1: None, Option 2: S (Built-in Silencer, Direct Exhaust)