HRX-OM-S010

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

Rotary Actuator

E L L K K D B C G G D B C N N T T 24 (30) 1 M M 25.5 2 x R (34.5: Connector type) Auto switch 2 x R Y Y W Auto switch CDRB2BW20/30-=S/D CDRB2BW40-=S/D W W 60o(69o) 2 8 8 z15 32.5o 1. The length is 24 when any of the following auto switches are used: D-90/90A/S99(V)/T99(V)/S9P(V) 65o The length is 30 when any of the following auto switches are used: 4 R22.5 D-97/93A 2.

Manifold Specifications

Flow Characteristics Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv Flow characteristics 1(P), 5/3(R) port 2(B), 4(A) port 1 4/2 (P A/B) 4/2 5/3 (A/B R) VV5Z5-21P-01 VV5Z5-21P-C6 VV5Z5-21P-C8 VZ523 1/4 1/4 1/4 1/8 C6 C8 2.1 1.4 1.8 0.36 0.32 0.37 0.55 0.36 0.50 2.3 2.1 2.1 0.26 0.24 0.20 0.54 0.50 0.50 Note) Value at manifold base mounted, 2 position single operating How

CL

11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.

Auto Switch Guide

(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-F1(-L) 70 14 2.8 depth 8.4 PF2M711/721-02(-L) 70 17 2.8 depth 6.2 PF2M711/721-N2(-L) 70 17 2.8 depth 6.2 PF2M711/721-F2(-L) 78 21 2.8 depth 6.2 PF2MmL-m1/2(-L) 48 A 18 OUT1 OUT2 10.2 DC() DC(+) 1.4 38.5 (30.9) 3 C 18 2 x 3.4 Width across flats B OUT IN 68 2 x Port size Port size: 1, 2 [mm] 28 Model A C B P PF2M701/702/705/710/ 725/750L-01(-L) 84.4 11 14 2.8 depth 8.4 8 PF2M701/702/705/710

One-touch Fittings Series KQ2

1 S 2 0 3 1 T 2 Q K 7 1 7 . 1 2 7 1 8 2 5 . 1 3 5 . 6 3 2 2 9 4 3 2 / 1 8 / 3 S 3 0 3 1 T 2 Q K 5 . 3 3 5 . 8 3 6 . 9 3 4 2 / 1 S 4 0 3 1 T 2 Q K 2 2 5 . 7 3 0 4 9 6 32 Series KQ2 One-touch Fittings Union tee: KQ2T Inch e l b a c i l p p A .

AC Servo Motor Driver (SSCNET /H Type)

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 1 0 17 1 2 1 18 2 3 2 19 3 4 3 20 4 5 4 21 5 6 5 22 6 7 6 23 ON ON 7 8 7 24 8 9 8 25 1 2 3 4 1 2 3 4 9 10 9 26 A 11 A 27 B 12 B 28 C 13 C 29 D 14 D 30 E 15 E 31 F 16 F 32 -13- Auxiliary axis number Auxiliary axis number Axis selection rotary switch Axis selection rotary switch Control Control setting switch setting switch axis No. axis No.

K35-OMW0030

Disassembly of the rod boot . 75 8-7-2. Assembly of the rod boot . 75 9. Alarm . 76 10. Trouble Shooting . 77 11. Limitations of Use . 79 11-1. Mounting . 79 11-2. Operating . 79 2 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

VQ

Part Material AXT662-11 (1: M5, 2: M3) 2 Sub-plate ZDC o Optional Parts Gasket, screw: VQ100-GS-5 Note) 1 set includes: 1 gasket and 2 screws.

VEX1

2 1 4 11 4 1 2 1 8 1 4 1 4 3 8 1 2 1 2 3 4 There were not many appropriate large capacity 5 port valves of a closed center.

Air cylinder

Specifications 2. Installation and Handling P4 2-1. Air supply 2-2. Design 2-3. Mounting and Installation 2-4. Environment 2-5. Speed control 2-6. Allowable kinetic energy 2-7. Air cushion 2-8. Control direction 2-9-1.Mounting brackets 2-9-2.Auto switches 3. Maintenance P23 3-1. Checks 3-2. Replacement of seals 3-3. Consumable parts 3-4. Troubleshooting 4.

Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM00201 2.

Manually Operated Integral Fitting Type/Threaded Type Series LVH

LVD LVQ How to Order Manifold Base LQ1 LLH 2 A 05 11 S LVN Body class TL/TIL Tubing size for port P and L side connection Tubing size for port P and R side connection Body class 2 3 4 Symbol 2 3 4 Body class 2 to 4 Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 Body class 2 to 4 Tubing size Plug LQ3 6 1/4" 6 1/4" Base type 2 8

REC

17 19 21 0.3 RHC G 7 11 13 13 0.5 10 10 50 100 200 300 400 (mm/s) (Initial cushioning speed) 4 7 9 9 0.7 500 MK(2) Rod side trunnion style: U Head side trunnion style: T 32 42 48 52 0.3 Clevis style: C, D RS Q G C 22 30 35 37 0.5 Graph (2) Applicable Max.

CXS

M L Z I 1 G 0.2 (G) H A E F (Through) N ( I ) (L) (Z) (G) C NN A B ZZ C D E M F G H I J K L N NN Q R U 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-Rc 1/8 thread depth 5 SS T Bore size (mm) 2 x 2-4.3 through 2 x 2-8 counterbore with depth 4.3 2 x 2-5.5 through 2 x 2-9.5 counterbore with depth 5.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2 x

CXS

J K L N NN Q R U 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-Rc 1/8 thread depth 5 SS T Bore size (mm) 2 x 2-4.3 through 2 x 2-8 counterbore with depth 4.3 2 x 2-5.5 through 2 x 2-9.5 counterbore with depth 5.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2-M4 x 0.7 with depth 6 15 54 19 70

HRX-OM-Z002

14.5 to 18.5 Rc1/2 Communication cable entry Electric wire diameter 6.5 to 10.5 Facility water outlet port Rc1/2 Circulating fluid outlet port(CH1) Rc1/2 Facility water inlet port Rc1/2 Drain port Rc1/4 Caster with stopper Fig. 2-2 Name of each part Table 2-2 Accessories Operation Manual 2 copy (English 1 pc. / Japanese 1 pc.)

SMC Wireless System EtherNet/IP ® compatible

Input Output EX600-W### (32 points) 0 1 4 EX600-W### (24 points) 01 3 Wireless unit WEN WSV EX600-W### (16 points) 01 2 EX600-W### (8 points) 01 1 EX600-W### (0 point) 0 1 0 EX600-DX#B (8 points) 1 0 EX600-DX#C (8 points) 1 0 EX600-DX#C1 (16 points) 2 0 Digital input unit DX EX600-DX#D (16 points) 2 0 EX600-DX#E (16 points) 2 0 EX600-DX#F (16 points) 2 0 EX600-DY#B (8 points) 0 1 EX600-DY

Sine Cylinder Series REC

17 19 21 0.3 G 7 11 13 13 0.5 1 10 50 100 200 300 400 v (mm/s) (Initial cushioning speed) 4 7 9 9 0.7 500 Clevis style: C, D Rod side trunnion style: U Head side trunnion style: T 32 42 48 52 0.3 C 22 30 35 37 0.5 Graph (2) Applicable Max.