Prevents Micro-Bubbles

LVA LVH A R P 3 port N.C. PA LVD N.C.

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

Digital Flow Switch (Manifold type)

(The value will be 7 s for the temperature sensor output.) 7: When the temperature sensor is used, it will be 250 VAC. 8: The Device ID varies depending on the product No.

MU

3 MUB40-PS Hard anodized Aluminum alloy Cylinder tube e MUB50-PS Chromated Aluminum alloy Piston r MUB63-PS Hard chrome plated Carbon steel Piston rod t Seal kit includes !1 to !3. Order the seal kit, based on each bore size.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

y OUT side IN side OUT side IN side Communication cable (With connector on both sides) t u t r EX260 Series EX600 Series Specifications Description Communication cable (With connector on one side) Field-wireable connector Part no.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

40 to 63/MLGPM, MLGPL/Extension locking (mm) LOCK 1in = 25.4mm T-slot dimensions XAH7 depth XL 4-YY depth YL XB XAH7 a b X0.02 c d e XAH7 XC XL X Section XX detail Bore size (mm) a b c d e 40 6.5 4 11 5.5 10.5 WB Z WA Section XX 8.5 50 4.5 13.5 7.5 13.5 11 7 18.5 63 10 17.8 Bottom view L 4-OA through 4-OB counter bore depth OL Section XX WA Z Section XX IA 4-NN through IC 4-MM depth ML R

Large blow and

E F 24.5 G 60.5 H 5 I 70 J 60 K 5.5 L 72 M 37 N 2 O 30 P Rc1/4 Q R 59 Sa Sb T 500 U 250 V 310 Model ZH30--X185 ZH40--X185 28.5 146.5 M4 x 0.7 10 203 90 64 25 27.2 33.5 196.8 74.5 6 90 78 6.5 92 47 2.3 42 Rc3/8 76 500 250 310 Note 1) This thread portion is intended to adjust the product characteristics.

MU

3 MUB40-PS Hard anodized Aluminum alloy Cylinder tube e MUB50-PS Chromated Aluminum alloy Piston r MUB63-PS Hard chrome plated Carbon steel Piston rod t Seal kit includes !1 to !3. Order the seal kit, based on each bore size.

VZ1000

location, P/R port with One-touch fitting for 6 VZ1000-3A-1D r VZ1000-3A-1U t SUP/EXH block assembly VZ1000-2A-1M y Note) Block pin (2 pcs.) is attached for q, e, t, y.

VDW

1 e r w e u r u t t y q y q Component Parts Description Material No.

Digital Flow Switches

Use after putting the unit label other than l/min, l. r Unit display/Orange e OUT1 CH r t y u Displays the selected channel. Channel display/Red t u UP button ( button) Use to change the mode or to increase the set value.

Modular Type Filter Regulator Series AW

r r u u u Drain Drain Drain Parts list Material No.

CLA

ack) 0-A54, D-B54, D-A44(C), D-A34(C) 0-A67 Zener <;Siode Reed SWitch , Blue b_ ~ue a, (black) <'ad) H Surge ab$Ol'bef D-A56 D-A33(C) :R~ ~tC h ---R;~~~r-: I-) ~: ( ';' ) L 0 ' , ' : Zener diode : ,--_.

Manifold Specifications

location, P/R port with One-touch fitting for 6 VZ1000-3A-1D r VZ1000-3A-1U t SUP/EXH block assembly VZ1000-2A-1M y Note) Block pin (2 pcs.) is attached for q, e, t, y.

Compact Rotary Actuator

e t p o s i t i o n I n t e r n a l s t r u c t u r e a n d o p e r a t i o n p r i n c i p l e C u s h i o n s M a i n t e n a n c e I n s p e c t i o n P e r i o d i c i n s p e c t i o n D i sassem ble and reassem bl e C a u t i o n o f d i s a s s e m b l e D i s a s s e m b l i n g p r o c e d u r e A s s e m b l e p r o c e d u r e T r o u bl e s hoo t i n g Safety

Refrigerated Air dryer Series IDU/IDF

37 5200 R 1 1/2 9000 IDU55C 55 7650 50C R 2 12400 IDU75C 75 10500 35C 0.75 100 IDF1D 120 Series IDF Standard inlet air temperature type Rated temperature of 35 to 40C 1.5 200 IDF2D 235 Rc 3/8 2.2 300 IDF3D 350 R134a 9 to 12 40C 3.7 430 IDF4D 500 R 1/2 5.5 640 IDF6D 750 R 3/4 7.5 850 IDF8D 1000 1300 IDF11D R134a 11 R 3/4 1500 1300 IDF11C 15 2400 2050 IDF15C/15C1 R 1 22 3700 3150 IDF22C/22C1

2/3 Port Valve

e, r are for selection of valve composition.

XL

Construction /Operation Auto switch (optional) Indicator (optional) Bonnet assembly (includes ) Piston seal Magnet (built-in only for auto switch) Actuation port Piston Exterior seal (maintenance part) Shaft seal Name plate Plate Port P (pressure port) P Port R (exhaust port) Solenoid valve R Heater (optional) Bellows side exhaust With solenoid valve Bellows Spring Body Valve Valve seal (

High Vacuum Angle Valve, XL Series

Construction /Operation Auto switch (optional) Indicator (optional) Bonnet assembly (includes ) Piston seal Magnet (built-in only for auto switch) Actuation port Piston Exterior seal (maintenance part) Shaft seal Name plate Plate Port P (pressure port) P Port R (exhaust port) Solenoid valve R Heater (optional) Bellows side exhaust With solenoid valve Bellows Spring Body Valve Valve seal (

MHL2

(mm) Gripping point R (mm) Gripping point R (mm) Gripping point R (mm) MHL2-40D1 2 MHL2-32D1 2 MHL2-40D MHL2-32D Pressure 0.6 MP 0.6 MPa Pressure 0.6 MPa 500 500 Pressure 0.6 MP 0.6 MPa Pressure 0.6 MPa 300 300 Pressure 0.6 MP 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) Gripping force (N) Gripping force (N) Gripping force (N) 400 400 250 250 0.5 MPa 0.5 MPa