60

75 90 37.5 49 63 63 76 14 19 22 22 26 46.6 52 58 58 76 33.6 38 44 44 61 28 30 36 44 53 37.5 49 63 63 81 24 30 38 43 50 4.5 4.5 5.5 5.5 6.5 14.8 19 24 26 31 9 9 10 10 12 VHS20 VHS30 VHS40 VHS40-06 VHS50 1/4, 3/8, 1/2 3/4 3/4, 1 Options specifications Model Built-in silencer With bracket N Q R S T U V W X Y AA BB 5.4 6.5 8.5 8.5 11 8.4 10 19 19 27.5 27 36.5 43.5 43.5 49.5 40 53 70 70 90 75.4

WRF100

Contents q Cover L (1 pc.) w Cover R (1 pc.) e Top covers (2 pcs.) r Hexagon head bolts (4 pcs.) t Flat washers (4 pcs.) y Cover mounting bolts (8 pcs.)

VDW Series

Leakage voltage Particularly when using a resistor in parallel with a switching element and using a C-R element (surge voltage suppressor) to protect the switching element, take note that leakage current will flow through the resistor and C-R element, etc., creating a danger that the valve may not shut OFF.

XL-OMV0002

Kalrez R Chemraz R VMQ PLASMA ARMOR R No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro R Kalrez R dupont dupont Chemraz R Greene Tweed & Co ULTIC ARMOR R Nippon Valqua Industries, Ltd. 6 XL-OMV0002 3. 3-1.

XL-OMY0002

R R R EPDM PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro Kalrez R R Greene, Tweed Technologies, Inc.

XL-OMY0003

R Kalrez Chemraz VMQ R PLASMA R Perfluoro No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro R R Kalrez Greene, Tweed Technologies, Inc.

End Lock Cylinder Series CBG1

Stroke Table Long strokes (mm) Max. manufacturable stroke (mm) Bore size (mm) Standard strokes (mm) Note 1) Lock Unlock 20 25, 50, 75, 100, 125, 150, 200 201 to 350 25 301 to 400 32 301 to 450 25, 50, 75, 100, 125, 150, 200, 250, 300 40 1500 301 to 800 50, 63 301 to 1200 80 301 to 1400 Locked condition Unlocked condition 100 301 to 1500 Note 1) Intermediate strokes other than the above are

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

R.

Electro-Pneumatic Positioner Series IP8000/8100

D. 9 to 11:P368010-27 At accessory H: (with external scale plate) 100 44 46 IP8100-01 (With terminal box) OUT2.Rc1/4 110 38 192 251 110 40 35 58 218 OUT1.Rc1/4 SUP.Rc1/4 23.5 43 23.5 38 39 11 9 39 OUT2 MPa 0% 50 42 20 162 117 25% MPa 65 A 15 122 ELECTORO PNEUMATIC IP8100 P O S I T I O N E R DA 50% 22.5 75% 100% 125 View A 12 168 8 2 x M8 x 1.25 depth12 Female thread for side mounting 2 x

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

However, the piston speed at this time should be adjusted to the minimum speed. 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) (n = 2, 3, 4, 5 ) 20 + 50 n 2 2 20 65 10 D-H7LF (n = 2, 4, 6 ) 15 + 50 n 2 2 D-B5 D-B6 15 75 10 (n = 2, 4, 6 ) Mounting 75 + 55 (n 2) (n = 2, 3, 4, 5 ) 20 + 50 n 2 2 Caution D-B59W 20 75 15 (n = 2, 4, 6 ) 1.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

2 e CEP1 Hard anodized Aluminium alloy Cover r Plug !3 (MIW12 to 25 ... M-5P) White anodized Aluminium alloy Cap (S) t CE1 (MIW32 ... Rc1/8) Hexagon socket taper plug Urethane rubber Bumper y !4 Urethane rubber Head bumper u CE2 (MIS8) Carbon steel Clip i (MIS12 to 32) Carbon steel R shape snap ring o ML2B No. Description Material Note Option: Adjuster No.

I/O Configurator (NFC version)

R/W undetected: NFC reader/writer driver is installed. NFC reader/ writer is not identified or USB is not connected. 5 R/W connection status R/W detected: NFC communication with the wireless unit is available. When the Advanced Card Systems Ltd. ACR1251U/ACR1252U is used. No driver: NFC reader/writer is not identified or USB is not connected.

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

XL-OMY0001

R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 R 1Barrel Perfluoro R Kalrez Chemraz Greene, Tweed Technologies, Inc.

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

2 e CEP1 Hard anodized Aluminium alloy Cover r Plug !3 (MIW12 to 25 ... M-5P) White anodized Aluminium alloy Cap (S) t CE1 (MIW32 ... Rc1/8) Hexagon socket taper plug Urethane rubber Bumper y !4 Urethane rubber Head bumper u CE2 (MIS8) Carbon steel Clip i (MIS12 to 32) Carbon steel R shape snap ring o ML2B No. Description Material Note Option: Adjuster No.

Clean Room Regulator/Fluoro Resin Type Series SRF30

N Port type Rc 1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7 Integral fittings/SRF30-S IN OUT 67.7 32.3 52 (112) Pilot port identification symbols and port types (marking) Symbol R N Port type Rc 1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7

VXA21/22

Refer to p.4.1-74, 4.1-75 for specifications and models.

HEC-OM-S008

[CR][LF] :01 06 0052 0032 75 [CR][LF] Set at 0.50 deg.C.

Dedicated Controller Series LC1 Uniaxial Type

LC1-1-S1 (PC-98 (MS-DOS) edition LC1-1-W1 (Windows 95 edition) and LC1-1-R (dedicated communication cable) Power supply 1 2 Note 2) 100/110VAC 50/60Hz 200/220VAC 50/60Hz or LC1-1-T1(Teaching box) are required. For ordering information, refer to the option part numbers on page 62.