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t0 I Recommended Circuits I q+"'"' A,.r rr.nv . . . 1 1 I I I Construction/Parts List .12 l J l / 18-20 I nuto Switch Specif ications . .21 I nuto Switch Circuit Diagrams. .22 I Ruto Switch Dimensions/Operating Range .23 I Ruto Switch Connection . .24 I Ruto Switch MountinS. . .25 r"-"--'-""' I Annaccnriac I Pranar riinne .26 r "-"-" tri*,t l x}$x:? xxxs !

FQ1

EJ202S-075X11 30 1, 3, 5, 10 25, 50, 75 1 EJ302S-001X11 3 EJ302S-003X11 Pressure loss: 0.01 to 0.02MPa Operating temperature: 0 to 60C Differential pressure resistance: 0.2MPa 5 EJ302S-005X11 10 EJ302S-010X11 65 x 250 25 EJ302S-025X11 50 EJ302S-050X11 75 EJ302S-075X11 1 EJ402S-001X11 3 EJ402S-003X11 5 EJ402S-005X11 10 EJ402S-010X11 65 x 500 25 EJ402S-025X11 50 EJ402S-050X11 75 EJ402S-

AWG

2 IN OUT IN OUT u r t i u r t i Component Parts Material AWG20K AWG30K AWG40K Note No. Description Body 1 ZDC ADC Platinum silver Bonnet 2 PBT Black Handle 3 POM Black Replacement Parts Part no. AWG20K No.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Changeable range output 5 V (10 V) 20 mA At the time of shipment 1 V (0 V) 4 mA Grease-free 10% 100% 105% Display 0% Application example Analog Functions Adjustment point: 75 L/min , 100 L/min output pp. 27, 28 When 5 V output is required from the flow switch at 75 L/min, use a sensor that outputs 1 to 5 V at 1 to 100 L/min. 5 V Change Output operation Key-lock function Forced output function

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

R.

CJ2X/CUX/CQSX/CQ2X/CM2X

Low Speed Cylinder Double Acting, Single Rod Series CJ2X 10, 16 How to Order Bore size 10 16 10 mm 16 mm Standard stroke (mm) 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate stroke other than above is manufactured upon receipt of order.

MGQ

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

SFOD-OMT0010

) Note 1) For CIR-R and CIR-L, Axis 1 and 2 are based on interpolation.

AIR COMBINATION

25-MLAISE35-R-25-M (Switch body only)] Note 3 Digital pressure switch PNP output Wiring bottom entry ISE35-N-65-MLAISE35-N-65-M (Switch body only)] Note 3 PNP output Wiring top entry ISE35-R-65-MLAISE35-R-65-M (Switch body only)] Note 3 N.C.

Ejector Valve Unit Series ZYY/ZYX 1

Note 2) V, S and R specifications are 45T, 45T1.

100

6 @2 r y w t e t @2 u i !0 @0 !5 y !9 ZL6 Without valve or pressure switch, Silencer exhaust ZL6 With valve and pressure switch, Port exhaust @1 !2 !3 !1 !6 !8 !7 q !4 r y w t e t u i @0 !5 y !9 Component Parts No. Description Material Note No.

Refrigerated Air Dryer

R and S (Because S function is also included in R.) S and T (Because S function is also included in T.) Note 2) Voltage symbol 20 (200 VAC) is the terminal block connection as standard. Option S cannot be chosen. Voltage symbol 10 (100 VAC) is the power cable with plug as standard.

Electric Actuator Miniature Rod Type Miniature Slide table Type

75 I/O cable length [m] 6* 1* A* * Without cable Nil 1.5 Motor cable mounting direction 1 Top type 3 Nil 3 Entry on the right side 5 R 5 L Communication plug connector MJ * Entry on the left side Bottom entry None U Nil Straight type S T Actuator cable*1 T branch type Nil Number of axis, and type of power supply C9 * Without cable Standard cables 1 axisDC24V S 1 R * When "Without controller

MU

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

HAW

Accessory (Option) Basic size Symbol Description Nil Applicable air compressor kW Symbol F With screw flange Screw type Reciprocating type D With auto drain Port size 2 2.2 7.5 7 Caution on Design HAW2 Size Applicable model 04 Symbol Rc 06 14 20 30 22 37 55 75 22 37 55 75 110 15 22 37 55 75 1 2 Rc 3 4 Rc 1 1 2 Rc 2 Warning HAW7 HAW22, 37 HAW55, 75 HAW110 1.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

R.

Series HAW Water Cooled Aftercooler 1

Accessory (Option) Basic size (Applicable compressor kW) F With screw flange D With auto-drain Port size Symbol 2 Screw type Reciprocating type 2.2 7.5 15 22 37 55 75 04 06 14 20 30 Rc 1 2 Rc 3 4 Rc 1 1 2 Rc 2 3B flange HAW2 HAW7 HAW22/37 HAW55/75 HAW110 Caution on Design 7 22 22 Warning 1.

MU

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

3M/SMseries

) Ambient and fluid temperatureMax' 120'F(Max. 50'C) Response time 2 pooition single/double 20ms or less at 75 PSI (Skgf/cm'?) 3 position 40ms or less at 75 PSI (Skgf/cm'?)

I

Arntient and tluid temperatureMax .120'F(Max. 50'C) Respon time 2 poitl'| slngle/doubb 20ms or less at 75 PSI (skg/cm'?) 3 pcition 40ms or less at 75 PSI (skgf/cm'?)