Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor: A [Servo Motor (24 VDC)], Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 200mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic Flexible Cable)

Size: 25, Motor Mounting Position: D (In-line), Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 100mm, Motor Option: W (w/Lock/Motor Cover), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped/Body Bottom Tapped, Top Mounting & In-line, Actuator Cable Type, Length: RC (20m)

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Copper, fluorine and silicon-free + low particle generation Bore size (mm) Reed switch Type of auto switch Port type Z73 Solid state switch Y59A,Y59B Bore size 6 to 20 Type M5 x 0.8 Rc NPT G Symbol Nil 21 22 Relief type Vacuum suction type CXSL CXSM,CXSL TN TF 25, 32 Cylinder stroke (mm) Model Lubrication Action Cushion Rubber Air Bore size (mm) Standard stroke (mm) Auto switch mounting Port

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Bore size 6 to 20 Type M5 x 0.8 Rc NPT G Symbol 21 22 Relief type Vacuum suction type CXSL CXSL Nil TN TF 25, 32 Cylinder stroke (mm) Model Lubrication Action Cushion Rubber Air Bore size (mm) Standard stroke (mm) Auto switch mounting Port size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief

Compressed Air Preparation Filter

A A 1/4 G Maintenance space Drain J: Drain guide G Maintenance space Drain Thread type Rc, G: 10 One-touch fitting Thread type NPT: 3/8 One-touch fitting A 3/8 G Maintenance space Drain Figures indicate the auto drain (1.0 MPa).

AF800/900

Flow rate (/min (ANR)) 1 4 1 6 8 Rc 1 4 NPT 1 4 G 14-3-13 2 Series AF800/900 Construction Component Parts Material AF800 AF900 No. Description Note Platinum silver painted q Aluminum die-casted Aluminum die-casted Body Platinum silver painted y Aluminum die-casted Aluminum die-casted Housing Replacement Parts Part no. AF800 AF900 11345-5B No.

q"s

models are not Applicabl model Specitications 6 E Sel orergur max. 0.1 MPa ,o o Sel pressure ma-x. 0.5 MPa 3 o o Set pressure max. 0,9 MPr 5 O_l o Connection Rc 1/4 02 o o, Connection Rc 3/8 03 r) o Connectlon Rc 'l12 o4 o Bracket B O ,l Brackel c c :l: 6 A Connection NPTI/4 N02 _l ., connection NPT3/8 N03 C c co$nection NPT1/2 N04 a) Connection G 1/4 F02 o ll Connection G 3/8 F03 C al Connection

Stability of suction position,

Formula examples with beams (Reference) L a b L a b L L L/2 L/2 L/2 L/2 Load/Shape conditions P P P P A C RA RB B A C RA RB B C A E D B RA RB RC RA=Pb/L RB=Pa/L W=P Formula (Reactive force: R, Total load: W) RA=RC=5Pb/16 RB=11P/8 RA=RB=P/2 W=P Mounting Position The basic mounting method is a horizontal lift.

Booster Relay Series IL100

How to Order IL 100 02 Suffix Booster relay Nil Standard Thread type T High temperature (5 to 100C) Nil Rc N NPT* L Low temperature (30 to 60C) F G* * Semi-standard S Copper-free ST Copper-free/ High temperature (5 to 100C) Port size 02 1/4 03 3/8 SL Copper-free/ Low temperature (30 to 60C) Accessories Nil None B With bracket Standard Specifications Flow-rate Characteristics Supply pressure

Manifold Regulator Modular Type ARM2500/3000 Series

Number of stations 02 2 stations Port size (OUT side) Symbol Port size 02 03 1/4 3/8 Applicable model ARM2500 ARM3000 10 10 stations Thread type Nil Rc F N G NPT Piping ARM3000 Symbol A B Type Common IN Individual IN IN From end plate From OUT port or G port Standard Specifications Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Regulating pressure range 0.05 to 0.85 MPa ARM2500

Port sizes range from 1/8 to 3/4 with Rc(PT), NPTF & G(PF) thread types available. Various options also available. VFS2000, body ported & base mounted valves, Thread type: Rc(PT), Port sizes: 1/8, 1/4, Maximum operating pressure: 9.9kgf/cm², Ambient & fluid temperature: -10 to 60°C, Manual override: non locking push style, 5 port pilot operated valve, 4/5 PORT SOLENOID VALVE, 400 lb

Port sizes range from 1/8 to 3/4 with Rc(PT), NPTF & G(PF) thread types available. Various options also available. VFS2000, body ported & base mounted valves, Thread type: Rc(PT), Port sizes: 1/8, 1/4, Maximum operating pressure: 9.9kgf/cm², Ambient & fluid temperature: -10 to 60°C, Manual override: non locking push style, 5 port pilot operated valve, 4/5 PORT SOLENOID VALVE, 400 lb

Port sizes range from 1/8 to 3/4 with Rc(PT), NPTF & G(PF) thread types available. Various options also available. VFS2000, body ported & base mounted valves, Thread type: Rc(PT), Port sizes: 1/8, 1/4, Maximum operating pressure: 9.9kgf/cm², Ambient & fluid temperature: -10 to 60°C, Manual override: non locking push style, 5 port pilot operated valve, 4/5 PORT SOLENOID VALVE, 400 lb

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

(PT) Rc(PT) Standard Stroke Long stroke (2) (mm) Bore size (mm) Standard stroke (mm) 400 20 450 25 25, 50, 75, 100, 125, 150 200, 250, 300 450 32 500 40 Note 1) Any intermediate stroke that is not indicated above will be produced on order.

AMPSeries

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

AMP

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G Features 1 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With

VFN2000N

Model Weight Weight (g) VFN2000N/Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN2120N-5D-02F 260 400 C 3.48 3.48 b 0.25 0.25 Cv 0.85 0.85 C 4.57 4.57 b 0.17 0.17 Cv 1.06 1.06 VFN2220N-5D-02F 2 position Single solenoid Double solenoid How to Order VFN2 20 1 5 D N 02 F Z Thread type Solenoid Single solenoid Double solenoid 1 2 NAMUR Interface Rc (PT) G (PF

Clean Rodless Cylinder Series CYP

Nil S n Standard stroke Standard stroke (mm) 100, 150, 200, 250, 300 350, 400, 450, 500, 600, 700 Bore size (mm) Type of auto switch 15, 32 Nil Select auto switches from the table below.

Clean Room Regulator/Fluoro Resin Type Series SRF30

1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7 Integral fittings/SRF30-S IN OUT 67.7 32.3 52 (112) Pilot port identification symbols and port types (marking) Symbol R N Port type Rc 1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7

VFS2000, body ported & base mounted valves, Thread type: Rc(PT), Port sizes: 1/8, 1/4, Maximum operating pressure: 9.9kgf/cm², Ambient & fluid temperature: -10 to 60°C, Manual override: non locking push style, 5 port pilot operated valve, 4/5 PORT SOLENOID VALVE, I50, 400 lb