High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 Up to 1300 Up to 1400 Up to 1500 H 24 1800 1580 1170 910 720 580 480 410 A 16 1200 1050 780 600 480 390 320 270 LEJS40 100 W/ m40 B 8 600 520 390 300 240 190 160 130 (Motor rotation speed) (4500 rpm) (3938 rpm) (2925 rpm) (2250 rpm) (1800 rpm) (1463 rpm) (1200 rpm) (1013 rpm) H 30 1800 1390 1110 900 750

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

Series Standard Specifications AMR3000 AMR4000 AMR5000 AMR6000 Model 1 1 4, 3 8 1 4, 3 8, 1 2 1 2, 3 4 3 4, Port size Fluid Air Proof pressure 1.5 MPa 1.0 MPa Max. operating pressure 0.05 to 0.85 MPa Setting pressure range 5 to 60C (No freezing) Ambient and fluid temperature Relieving type Construction 0.3 m Filtration Max. 1.0 mgf/Nm3 ( 0.8 ppm) (1)(2) Oil mist density in the outlet side 750

AMR3000 to 6000

Filtration Max. 1.0 mgf/Nm3 ( 0.8 ppm) (1)(2) Oil mist density in the outlet side IR 750 1500 3500 6000 Rated flow (/min (ANR)) (3) 1.8 2.8 3.5 6.7 VEX Weight (kg) Note 1) Compressed air density: 30 mgf/Nm3. Note 2) An element for the mist separator is included on the inlet side. Mineral grease is applied on the sliding parts inside the regulator.

AMR3000 to 6000

with Mist Separator) AMR3000 to 6000 Standard Specifications AMR3000 AMR4000 AMR5000 AMR6000 Model 1 1 4, 3 8 1 4, 3 8, 1 2 1 2, 3 4 3 4, Port size Air Fluid 1.5MPa Proof pressure 1.0MPa Max. operating pressure Min. operating pressure (1) 0.05MPa 0.05 to 0.85MPa Setting pressure range 5 to 60C (No freezing) Ambient and fluid temperature Relieving style Construction Filtration 0.3m (2) (3) 750

Process Gas Diaphragm Valve

Specifications Wetted Parts Material AZ3652 Select compatible materials of construction for the gas Vacuum to 250 psig (1.7 MPa) 375 psig (2.6 MPa) 750 psig (5.1 MPa) -40 to 71 C (No freezing) AZ4652 S 316L SS Electropolish + Passivation Ni-Co Alloy PCTFE (Option: Polyimide) Operating Parameters Gas Operating pressure Proof pressure Burst pressure Ambient and operating temperature Cv Wetted

Compact Manifold Regulator

If vibration is applied, malfunction or setting errors may result. 750

•

rate tlin\~ 330 750 350 C ,oP/rolled flow . (A,MR~~N '(lmjQ' . 180 600 1100 1190 [Ereo flaw) Effettive ~IOnal 11.6 17 2.9 5.2 18.4 5.4 9.3 'ttrea mm 2 . N01e} The iMicaled 110w rate values are al a pressure 01 O.5MPa and a temperature 01 20 Q C. 1 Speed Controller 5 .

Basic Type/Direct Mount Type

Standard stroke (mm) Max. stroke without switch (mm) Max. stroke with switch (mm) Bore size (mm) Symbol Specifications 300 300 6 50, 100, 150, 200 -X116 -X160 -X322 -X1468 Hydro specifications 500 500 10 50, 100, 150, 200, 250, 300 High speed specifications 50, 100, 150, 200, 250, 300 350, 400, 450, 500 Outside of cylinder tube with hard chrome plating 15 1000 750 Interchangeable specification

76

200, 220 VAC (60 Hz) Power consumption (50/60 Hz) Note 8) (kW) 2.8/3.3 3.8/4.5 3.8/4.5 Operating current (50/60 Hz) Note 8) (A) 8.9/9.9 13.0/14.5 13.0/14.5 Electric Applicable earth leakage breaker capacity Note 9) (A) 20 30 Condenser Air-cooled Refrigerant R407C (HFC) Auto drain Heavy duty auto drain (Normally open) R2 JIS ange 65A 10K JIS ange 80A 10K Weight lb (kg) 503 (228) 562 (255) 750

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Note 1 2 3 4 5 6 7 8 9 10 11 12 13 Zinc alloy Brass Electroless nickel plated Chromate plated Body A Body B Needle Seat ring Spring U seal O-ring O-ring O-ring Brass Electroless nickel plated Brass Electroless nickel plated Steel wire (1) HNBR NBR NBR NBR NBR PBT O-ring Bushing NBR, Stainless steel Tool steel Gasket Retaining ring for hole type C Note 1) M5 and U10/32 type: Stainless steel 750

C76

Piston speed 50 to 750 mm/s Allowable kinetic energy 0.65 J 1.2 J Non-rotating accuracy 0.5 0.5 JIS Symbol Stroke tolerance (mm) 0/+1.4 Standard Spring return Spring extended Spring Force (Standard, Non-rotating) Spring Return (N) Non-rotating Spring return Spring extended Spring force Bore size (mm) Standard stroke 10 25 50 100 150 200 250 Extended Retract Extended Retract Extended Retract

Air-hydro Unit

100, 200, 300, 400, 500, 600 200, 300, 400, 500, 600, 700, 800 63 100 160 Specifications Operating pressure 0 to 0.7 MPa Proof pressure 1.05 MPa 5 to 50C Ambient and fluid temperature Fluid Turbine oil (40 to 100 mm2/s) Converter Standard Effective Oil Level Stroke/Effective Volume (cm3) Converter nominal size (mm) Limited flow (dm3/min) Standard effective oil level stroke (mm) 100 300 750

Air Cylinder

CS1 Minimum operating pressure 0.05 MPa Piston speed 50 to 750 mm/s CS2 Cushion Rubber bumper Bore size (mm) GA GB HD HH PD Basic, Axial foot, Rod flange, Head flange, Rod trunnion, Head trunnion, Clevis (used for changing the port location by 90) Auto switch can be mounted. Female rod end is not available. Use the current seal kit. HD Pipe O.D.

CHKD/CHKG

4846 8320 75 1117 1499 2101 3299 5661 9530 100 1332 1774 2471 3844 6476 10740 Unit: g CHKDL/Foot type Bore size (mm) Standard stroke (mm) 5 10 15 20 25 30 35 40 45 50 75 100 20 25 32 40 50 63 80 100 1505 2195 3310 5475 9150 14930 560 690 1060 1610 2515 4310 7410 12375 465 570 880 1375 2200 3845 6555 11355 490 600 925 1435 2280 3960 6725 11610 580 720 1100 1670 2595 4425 7580 12630 605 750

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Magnetic body (Iron plate, etc.) 750 CQS 2122CQS/ 1011Compact Cylinder 10112122Standard: CQSB12 to 25, CQSB12 to 25 12 17.5 5 M3 x 0.5 effective depth 6 2 x M5 x 0.8 2 x 2 x 6.5 counterbore 5.5 M5 x 0.8 (Piping port) (Relief port) 2 x 2 x M4 x 0.7 effective depth 7 Note 2) 2 x 3.5 through 32 0.5 15.5 25 6 Flat washer 5 10 4 4 3.5 27 + Stroke 15.5 30.5 + Stroke 25 16 17.5 5 5.5 2 x M5 x 0.8

CV/MVGQ

operating pressure 10 to 50C (No freezing) Ambient and fluid temperature RE A B Rubber bumper Cushion Not required (Non-lube) Lubrication REC JIS Class 2 Thread tolerance + 1.0 0 Stroke length tolerance CX 10, 16 Applicable bore size (mm) 1.8 mm2 (0.1) CY Effective area of valve (Cv factor) M5 x 0.8 Port size MQQ M Basic style, Axial foot style, Rod side flange style Mounting 10: 50 to 750

15

bumper (Magnet type) Standard Strokes Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 50, 100, 150, 200 Made to Order Made to Order: Individual Specifications (For details, refer to pages 1507 and 1508.) 300 6 50, 100, 150, 200, 250, 300 500 Symbol Specifications 10 -X116 -X168 -X210 -X322 -X324 -X431 -X2423 Air-hydro 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Inch size Body type Option (With/Without bracket) Symbol Bore size Applicable model Symbol Flow rate (l/min (ANR)) Filtration area (mm2) Symbol Nil B Option None (Without bracket) With bracket ZFC05 ZFC10 ZFC20 05 10 20 10 20 50 470 750 1255 01 03 07 09 1/8" 5/32" 1/4" 5/16" Inch size (Release button: Orange) Principal Parts Material Replacement Element Part No.

NCA1

3 3 1/2 2 1/4 -12 2 1/2 NY-1402 3.032 3 6 3/4 3 7/8 1 1/2 3 7/8 3 1/4 3 1/2 2 1/2 -12 2 3/4 Order to Match Rod Thread Rod Eyes Pivot Pin Pivot Pin Part No A CA CB CD ER KK Part No CD1 CD2 CL CP Part No CD CL NI-150 3/4 1 1/2 3/4 1/2 5/8 7/16 20 NCA1-150 1/2 1 7/8 NCDP-150 .500 0 -.002 .106 2.28 1.94 NCA1-325 3/4 2 5/8 NI-325 1 1/8 2 1/16 1 1/4 3/4 7/8 3/4 -16 NCA1-800 1 3 1/8 NCDP-325 .750

AFF

BM57 Accessory (Option)/For AFF75A to AFF220A AFF75A AFF125A AD402-03-2 G46-15-02 AFF150A AFF220A Applicable model Auto drain (2 pcs. each) Pressure gauge (2 pcs. each) Companion flange (2 pcs. each) Anchor bolt (3 pcs. each) AI-2S 2BJIS 10KFF 3BJIS 10KFF 4BJIS 10KFF Model AFF2B AFF4B AFF8B AFF11B AFF22B AFF37B AFF75B AFF75A AFF125A AFF150A AFF220A Model Note) Rated flow (l/min (ANR)) 300 750