PF-OMM0004_C

Max.28 V80 mA 1 V C15 V 1 k D420 mA 12 V 300 24 V 600 NPN PF3W7--GPNP PF3W7--HMax.28 V80 mA 1 V 30 ms Max.80 mA 1.5 V 30 ms -22No.PF-OMM0004-D NPN2 PF3W7--A(T)NPN PF3W7--C(T)PF3W7--D(T)NPN PF3W7--GPNP2 PF3W7--B(T)PNP PF3W7--E(T)PF3W7--F(T)PNP PF3W7--HOFF OUT2 OUT2 / -23No.PF-OMM0004-D 30() 3 ON OFF ON OFF [F 1]OUT1(60)[F 2]OUT2(36) -24No.PF-OMM0004-D 3 1 [P_1][n_1] 1

Digital Flow Switch (Remote type monitor unit)

30 ms min duration Analogue 2 output type PF3W30J/PF3W30K J: Analogue output 1 to 5 V Output impedance 1 k K: Analogue output 4 to 20 mA Max. load impedance When power supply is 12 V: 300 When power supply is 24 V: 600 -19No.PF-OMN0012-H Example of wiring for accumulated pulse output NPN 2output type PF3W30A NPN + Analogue output type PF3W30C/PF3W30D NPN + External input type PF3W30G PNP

PF-OMN0011_C

Max.28 V80 mA 1 V C 15 V 1 k D420 mA 12 V 300 24 V 600 -18No.PF-OMN0011CN-C NPN PF3W30G PNP PF3W30H DC(+) DC(+) OUT1 OUT1 DC(-) DC(-) / / Max.80 mA 1.5 V 30 ms Max.28 V80 mA 1 V 30 ms 2 PF3W30J/PF3W30K DC(+) DC(-) / J15 V 1 k K420 mA 12 V 300 24 V 600 -19No.PF-OMN0011CN-C NPN2 PF3W30A NPN PF3W30C/PF3W30D NPN PF3W30G OUT1 OUT2(PF3W30A) DC(-) DC(+) PNP2

IZx-OMX0087

600 5m/s 800 800 2m/s 2m/s 1000 1000 3) Flow rate : 250L/min 6) Flow rate : 180L/min 75 50 25 0 25 50 75 Installation distance from ionizer to workpiece [mm] 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm ionizer to workpiece [mm] Installation distance from mm 200 200 20m/s 400 400 2m/s 20m/s 2m/s 600 600 10m/s 800 800 10m/s 5m/s 1000 1000 1200 5m/s 1400 5-4.

HEC-OM-Y008

Ambient temp. 35 deg.C Heating Capacity W Heating Capacity W Ambient temp. 35 deg.C 600 600 Oct X yX ZX AX BX CX DX . Nov y yy Zy Ay By Cy Dy . Danger In extreme conditions, there is a possibility of serious injury or loss of life. When the circulating fluid temperature is low, do not operate it at a low 500 500 flow rate.

LEF-OM007xx

*Refer to the table of Applicable stroke 6mm 6mm 8mm 8mm 10mm 10mm B B Cable type *Applicable stroke Standard produced upon receipt of order Without cable Nil Without cable Nil 100 100 200 200 300 300 400 400 500 500 600 600 700 700 800 800 900 900 1000 1000 Robotic type cable R Robotic type cable R 11-LEFS25 11-LEFS25 Standard cable S Standard cable S 11-LEFS32 11-LEFS32 Motor cable

SFOD-OMT0009CN

700 800 600 700 800 600 700 800 [mm/s] 500 250 1000 900 630 550 500 420 330 250 230 180 [mm/s] 10 5 20 12 6 () [mm/s] 17 9 33 20 10 () LEFS32 H A B [mm] 24 16 8 [mm] 600 700 800 900 1000 800 900 1000 800 900 1000 [mm/s] 1200 930 750 610 500 500 410 340 250 200 170 [mm/s] 24 16 8 () [mm/s] 39 26 13 () 108 No.SFOD-OMT0009CN-B LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100 1200 1000 1100

JXCx-OMT0001CN

700 800 600 700 800 600 700 800 mm/s 500 250 1000 900 630 550 500 420 330 250 230 180 [mm/s] () 10 5 20 12 6 [mm/s] () 17 9 33 20 10 LEFS32 H A B [mm] 24 16 8 [mm] 600 700 800 900 1000 800 900 1000 800 900 1000 mm/s 1200 930 750 610 500 500 410 340 250 200 170 [mm/s] () 24 16 8 [mm/s] () 39 26 13 -108No.JXC-OMT0001CN-C LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100 1200 1000 1100 1200

Membrane Air Dryer

750 1000 600 750 1000 Purge air flow rate L/min(ANR) 125 150 190 65 80 110 Inlet air pressure MPa Inlet air temperature oC Inlet air saturation temperature oC Ambient temperature oC *Note 1 *Note 1 -15 -20 *Note 2 Standard performance conditions *Note 3 0.7 25 25 25 Dew point indicator purge air flow rate 1L/min (ANR) {In case of inlet air pressure 0.7 MPa} 1/2 1/2 Port size 3/8 1/2 3/8

Fieldbus system Analog unit

Circuit diagram Input circuit diagram Output circuit diagram Input impedance Voltage input: 100 k Current input: 250 Load impedance Voltage output: 1 k or more Current output: 600 or less Precautions for handling Be sure to fit a seal cap on any unused connectors.

JXCx-OMT0002

700 800 600 700 800 600 700 800 Max. speed [mm/s] 500 250 1000 900 630 550 500 420 330 250 230 180 Min. speed [mm/s] (Independent and interpolation) 10 5 20 12 6 Min. speed [mm/s] (Speed tuning control) 17 9 33 20 10 Model LEFS32 Lead symbol H A B Lead [mm] 24 16 8 Stroke (mm) 600 700 800 900 1000 800 900 1000 800 900 1000 Max. speed [mm/s] 1200 930 750 610 500 500 410 340 250 200 170 Min

SFOD-OMT0010

700 800 600 700 800 600 700 800 Max. speed [mm/s] 500 250 1000 900 630 550 500 420 330 250 230 180 Min. speed [mm/s] (Independent and 10 5 20 12 6 interpolation) Min. speed [mm/s] 17 9 33 20 10 (Speed tuning control) Model LEFS32 Lead symbol H A B Lead [mm] 24 16 8 Stroke [mm] 600 700 800 900 1000 800 900 1000 800 900 1000 Max. speed [mm/s] 1200 930 750 610 500 500 410 340 250 200 170 Min

A_HEC-OM-I009

degC Fig. 6-1 Cooling capacity 2) Heating capacity Fluid: water Fluid: water 1000 2000 900 Ambient 35C 1800 Ambient 30C 800 1600 Ambient 25C Heating capacity W Heating capacity W 700 1400 600 Ambient 20C 1200 500 Ambient 15C 1000 400 800 300 Ambient 15C 600 200 400 100 0 200 10 15 20 25 30 35 40 45 50 10 15 20 25 30 35 40 45 50 Circulating fluid temperature degC Fluid temperature degC Fig

E-MY2_E_D

Heavy load Standard load Medium load Light load 1 10 50 100 200 1 0.25 0.49 0.98 1.96 2 20 2 0.49 75 200 400 0.74 1.47 2.94 3 30 3 0.74 100 300 600 0.98 1.96 3.92 4 40 125 400 800 4 0.98 1.23 2.45 4.90 5 50 5 1.23 150 500 1000 1.47 2.94 5.88 6 75 200 600 1200 6 1.47 1.96 3.92 7.84 7 100 250 700 1400 7 1.72 2.45 4.90 9.80 8 300 300 800 1600 8 1.96 2.94 5.88 11.76 9 500 500 900 1800 9 2.21

MLGC

Ball bushing bearing MLGCL 200, 250, 300 Bore size (mm) Auto switch model D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 40 350, 400, 450, 500, 600, 700, 800 20 25 32 40 BMA2 -020 BA -01 BA -02 BA -32 BA -04 BM1 -01 BM1 -02 BM1 -32 BM1 -04 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

CG5-S

109 35 32 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 176 63 to 600 109 35 32 27 90 38 20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 69 1/4 176 80 to 750 130 40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 3/8 210 100 to 750 110 10 131 40 37 41 125 60 30 100 14 10 29 20 71 16 M12 x 1.75 26 8 M26 x 1.5 100 1/2 212 Flange brackets

Compact Type

Vertical Mounting L L Mounting orientation m m Max. speed (mm/s) up to 200 up to 400 up to 600 up to 800 All strokes Stroke (mm) 6 10 15 Selection graph 1 2 3 4 20 25 32 Horizontal Mounting L Mounting orientation m m Refer to the caution notes below.

Lubrication Equipment

Description Material Note ALF400, 400-06 ALF500, 600 ALF800, 900 Painted silver Painted silver Body Housing Aluminum die cast Aluminum die cast Aluminum cast q w Replacement parts No. Description Material Part No.

MLGC

Both directions Lock direction MXW MXP Stroke Bearing Standard stroke (mm) Long stroke (mm) Bore size (mm) MG Model MGP 20 75, 100, 125, 150, 200 250, 300, 350, 400 MLGCM Slide bearing 25 350, 400, 450, 500 MGQ 75, 100, 125, 150, 32 350, 400, 450, 500, 600 MLGCL Ball bushing bearing 200, 250, 300 40 350, 400, 450, 500, 600, 700, 800 MGG * Middle strokes and short strokes other than shown

Table of Contents

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200