Safety Instructions

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Selection Selection Selection Selection Selection Warning 1. Check the specifications.

Made to Order Specifications:

391 80 540.5 80 11B 450 550 650 850 22B 37B 75B 1 2 1 2 14-20-55 Water Separator, Oil Mist Separator, Deodorizer Made to Order Specifications: Please consult with SMC for detailed specifications, size and delivery. 3.

ZSE2/ISE2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 IF Data Can be integrated with ZX or ZR ejector system.

1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MB MB1 CA2 CS1 C76 Copper-free C85 C95 CP95 NCM NCA DHow to Read the Table -X 1. For copper-free products or standard products for each series, refer to the list below.

TA301

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Manifold Model Model VOA301 Applicable manifold model Common/lndividual exhaust Accessory (Part no.)

VFRA3000

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5 3 position pressure center Port size VR W/o sub-plate (Pilot port: Rc) W/o sub-plate (Pilot port: Other than Rc) 1/4 3/8 Nil VH 00 VHS 02 03 How to Order Manifold Base 10 1 2 VV5FRA3 n Port size Thread type Indicate the same part number as VFR3000 manifold

VPA4

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VPA4270-14 Port size VR VPA4150-04 Port size Applicable valve model Note) 3 position is not available on Series VPA470.

ALF400 to 900, ALT-5/-9

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (1) Operating pressure differential range (Difference between tank pressure and line pressure) 0.1 to 0.6 MPa Vibration resistance (Pressure differential 0.3 MPa) 1 G (9.81 m/sec2) or less 120 : 65 : 100 : 120 190 220 1800 4 1 8 3 1 : 460 1 : 650 5000

Safety Instructions

Supply voltage Internal voltage drop of switch Voltage of operation load > Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2.

PA3145/3165/3185

650 670 650 670 2 2 1 2 (IN OUT) 230 3 4 1.5 VPA3165 1 11 4 11 4 11 4 11 2 VPA3185 2.3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions 3-Rc 1/8 pilot port 2-Mounting hole Port size Rc (EXH port) Port size 2-Rc (IN, OUT port) IN, OUT EXH Port size Rc

TM

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com No. of connecting tubes (Max.) 8 6 12 Applicable tubing O.D.

ALB900

AV Flow rate (m3/min (ANR)) AU Inlet pressure 0.5 MPa AF Inlet pressure 0.4 MPa Piping AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Warning IR If installing an air tank, install it upstream of the bypass oil feed adapter.

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 With neon light (110 VAC, Green) Flow range ZSP 3 With neon light (220 VAC, Red) Low flow setting possible (1 l/min) 10 1 to 10 l/min 4 With neon light (220 VAC, Green) 20 10 to 20 l/min Simple flow setting Without removing the cover, you can set

Drain Separator for Vacuum Series AMJ 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP ZCU AMJ Misc. Removes water droplets from air by simply installing in vacuum equipment connection lines.

Air Tank Series AT 1

650 650 1080 1080 1080 1300 1300 1268 1258 1978 2278 1550 2160 2770 2558 3288 1000 945 1340 1340 1100 1550 1650 1700 1700 550 645 740 740 750 750 750 850 850 6 9 9 9 12 12 12 16 16 460 665 693 693 1162 1162 1162 1416 1416 19 19 19 19 19 19 19 27 27 80 M16 x l 250 M16 x l 250 M16 x l 250 M16 x l 300 M16 x l 300 M16 x l 300 M16 x l 500 M24 x l 500 M24 x l 500 AT6C AT11C AT22C AT37C AT55C AT75C

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 150/50 (5) Grommet, DlN terminal VT Standard 100, 200 VAC, 50/60 Hz; 24 VDC 220, 110, 48, and 24 VAC (50/60 Hz) 100, 48, and 12 VDC Coil rated voltage VP Option 15 to 10% of rated voltage Allowable voltage fluctuation Coil insulation type VG Class B or

Safety Instructions

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Maintenance Caution Tube deformation ratio at the minimum bending radius = LD 2d 1 x 100 1.

AL800/900

Model AL800 AL900 AV 4 1 1 Port size 2 1 1 2 AU Fluid Air Proof pressure 1.5 MPa AF Max. operating pressure 1.0 MPa AR 4 1 1 : 460 1 : 650 Note) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Min. operating flow (/min (ANR)) 2 1 1800 IR Bowl capacity (cm 3) 440 Recommended

ISG

5 Wiring Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Warning 1. Do not have the internal wiring attached to the connection lever for switch operation. It may malfunction.

TL/TIL

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bundle 100 m 50 Ft. (16 m) 100 Ft. (33 m) 2 m Straight pipe Color Translucent (color of material) Applicable fluid Please refer to the applicable fluid in page 41.