VM

8 P . 5-6-12 P . 5-6-20 P . 5-6-41 P . 5-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 Effective area (mm2) Number of ports 1 2, 3 Poppet 2.5 2, 3 Poppet 19 2, 3 Poppet 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Function Dual pressure is available only on external pilot. 5-6-2 5-6-3 2 Series VM Transmitters Effective

LVQ

Size Symbol 2 2 2 3 3 4 4 5 5 6 6 A B C A B A B A B A B 2 2 3 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" LVC LVA LVH LVD With reducer Basic size LVQ Note 1) Select a fitting the same

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

17 18.1 43.3 141.2 121.2 143 48.9 [51.1] 6 8.5 6 6 6 40.6 8.5 8.5 8.5 48 58.9 58 21.5 21.5 21.5 21.5 39.1 [41.3] Refer to page 375 for dimensions with connector cable. 321 Series 10-SYJ5000 Manifold Specifications [Option] Directional Control Valves Air Grippers Modular F.

MHZ

6 6 6 6 6 4 4 4 4 4 4 26 27 26 27 26 27 Double acting 3.3 6.1 MHC Normally closed Normally open 1.9 Single acting MHT 3.7 Single acting type, Normally open MHY Note) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

MHZ

6 6 6 6 6 4 4 4 4 4 4 26 27 26 27 26 27 Double acting 3.3 6.1 MHC Normally closed Normally open 1.9 Single acting MHT 3.7 Single acting type, Normally open MHY Note) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

0.4

mA), Holding 1.26 VA (6 mA) 200 VAC 5(R1) 1(P) 3(R2) Inrush 1.38 VA (6 mA), Holding 1.38 VA (6 mA) 220 VAC 4-position dual 3-port valve Note) 2(B) 4(A) VQZ (B) Note 1) Use dry air to prevent condensation when operating at low temperatures.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

6 No.

45

Refer to external dimensions in pages 1-6-78 to 1-6-79, and then mount it.

Parallel Style Air Gripper Series MHZ

MHZ2-6 and MHZJ2-6.

VFS

Applicable cable: O.D. 6 to 8.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

2 6.

Air Slide Table

mm 25 mm 6 8 12 16 20 25 6 8 12 16 20 25 -X12 (adjustment range: 25 mm) is not available with the MXQR6 series.

Air Cylinder Series CA2

6 !2 t u !5 o !1 !

MY1

6 !7 !8 !

Mechanically Jointed Rodless Cylinder Series MY1

MY1M20 20 10 32 5.8 45.5 4 58 14 5 (Max. 11) RB0806 3.6 40.8 6 DMY1M25 24 12 38 6.5 53.5 6 70 66 54 13 5 (Max. 16.5) RB1007 13 3.5 46.7 7 MY1M32 29 14 50 8.5 67 6 80 88 67 17 12 8 (Max. 20) RB1412 16 4.5 67.3 -X MY1M40 35 17 57 10 83 6 91 104 78 17 12 9 (Max. 25) RB1412 17.5 4.5 67.3 MY1M50 40 20 66 14 106 6 26 5.5 73.2 15 13 (Max. 33) 128 RB2015 Individual -X MY1M63 52 26 77 14 129 6 31

Table of Contents

6 Seal kit includes !4, !5, !6.

Series VQ Base Mounted Metal Seal/Rubber Seal

(Except for L kit) Note 6) Indicate R for the valve with external pilot.

MXQ

6 !7 !8 !

CXS

6.5 C0.5 3.2 1 6 5.5 4.5 5 20 0.1 M5 x 0.8 6 1.25 6.5 3.5 +0.2 0 + 0.2 0 0 0.2 +0.016 +0.001 0.05 0.15 6 +0.3 0 CXS15 5 M5 x 0.8 8 7 8 C0.5 5.2 1.5 8 7.5 5 6 25 0.1 M6 x 1.0 8 2 9.5 5.5 3 +0.3 0 0 0.2 + 0.2 0 +0.2 0 +0.016 +0.001 8 CXS20 0.05 0.15 6 M6 x 1.0 10 8 9.5 C0.5 6.2 2 10 9.5 7 8 28 0.1 M8 x 1.25 10 2 11 6.6 +0.2 0 + 0.2 0 10 0 0.2 CXS25 +0.019 +0.001 0.05 0.15 +0.3 0 6 M6 x 1.0

Air Cylinder

/8 6 2 11/16 200 (2") 1.71 1 2 1/2 2.4 6 3/16 3/8 3 5/8 9/16 5/8 1/8 1.3 5/16-24 3/8 1 5/8 1.06 2.19 3/4 3/8 3.1 0 1 1/8 3/8 1 2 1/4 7/16-20 9/16 1 1/8 6 1/8 5 3/4 3 1/8 250 (2.5") 1.75 1 3 2.48 6 5/16 3/8 3 3/4 9/16 5/8 1/8 1.57 3/8-24 5/8 1 15/16 1.18 2.76 1 1/8 1/2 3.9 0 1 1/2 1/2 1 1/4 2 3/4 3/4-16 1 1/2 7/8 7 3/8 6 7/8 3 13/16 325 (3.25") 2.34 1 3/8 3 3/4 2.72 7 5/8 1/2 4 1/4 3/4 1 11