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female threads) T1: NPT1/8 (with M5 female threads) Reverse pressure two directions B R1/8, NPT1/8 Rc1/8 M5 x 0.8 female threads Panel mount (ZS-22-A) Rc1/8 E * M5: M5 x 0.8 (female threads) * C4: With 4 One-touch fitting * C6: With 6 One-touch fitting Wall mount Wall mount Panel mount + Front protective cover (ZS-24-C) M5 x 0.8 F 4, 6 One-touch fitting * Optional * When optional parts only

ZSE3/ISE3

x 0.8, NPTF 1/8, M5 x 0.8 Port size R 1/8, M5 x 0.8 NPTF 1/8, M5 x 0.8 ZX ejector mounted type: M5 x 0.8 Enclosure IP40 Note 1) Instant pressure supply of 0.5 MPa has no influence on the switch.

ZSE40/ISE40

x 0.8, T1: NPT1/8, M5 x 0.8, W1: Rc 1/8 C4: With 4 One-touch fitting, C6: With 6 One-touch fitting, M5: M5 female threads 5-wire oil resistant heavy-duty cord (0.15 mm2) 01/T1 types approx. 60 g, W1 type approx. 80 g, C4/C6/M5 types approx. 92 g (Each including 0.6 m lead wires) Port size Lead wire Weight Note) When equipped with auto shift function, the following ranges can be set.

VQ

SY SYJ (L5) Plug assembly (L4) VK 2-4.5Mounting hole 1 2 3 VVQ100-12A(L3) 88 (8.5) L2 VZ 48.7 L1 VT VT (45) (35) 33 25 (5.5) VP 23.5 12.3 VG R11 Manual override 21.5 (Min. bending inner radius) (29.3) VP 104 VQ VQZ Stations 1 2 3 4 5 n Dside Uside VZ 2-M5 X 0.8(E port) VS 2-M5 X 0.8(P port) 42.9 A A 20 (8.5) 1.5 5 n-M5 X 0.8 (A port) 5 (7.5) 15 P=10 38 Equation: L1=10n+32 L2=10n+43

Precision Clean Regulator

SRP1-M5 SRP1-01 Pressure gauge part no.

EX120/121/122

Thread piping 2 4 6 M3 M5 SJ2000 SJ3000 0.36 0.56 25 32 SZ Port size for A, B ports Applicable cylinder size (reference) Sonic conductance: C [dm3/(sbar)] (representative value) Series Piping with one-touch fittings Metric size Inch size Thread piping 4 6 5/32" 1/4" M5 SZ3000 0.77 32 SY Port size for A, B ports Applicable cylinder size (reference) Sonic conductance: C [dm3/(sbar)] (representative

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

M1 Weight (g) ASV120F-M3-04 ASV220F-M5-04 ASV220F-M5-06 Model 5 8 9 M3 x 0.5 M5 x 0.8 M5 x 0.8 5.5 8 8 9.3 9.3 11.6 7.2 9.6 9.6 21.4 22.8 23.6 25 27.6 28.4 9.8 11.1 11.1 28.6 31.4 31.4 26.1 28.6 28.6 25.8 27.7 27.7 23.3 24.9 24.9 12.7 12.7 13.5 4 4 6 Reference dimensions of M thread after installation. Inch Size Applicable tubing O.D. d T H D1 D2 L1 L2 L3 L4 A Max. Min. Max. Min.

LCD Readout Digital Pressure Switch Series ZSE3 (For Vacuum)/ISE3 (For Positive Pressure) For General Pneumatics Easy pressure setting with the digital display Can be integrated with a vacuum unit, Series ZX ZSE ISE ZSP PS ISA PSE IS ISG ZSM Built-in fail

: M5 x 0.8 0XY: M6 x 1.0 771

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

x 0.8) Pilot EXH port M5 x 0.8 VQ 1 8 ( ): Rc VQ4 Grommet terminal: VFS2610-E-01 02 DIN terminal: VFS2610-D Y-01 02 VQ5 Lead wire O.D.

Electric Actuator

Body fixed A L Maintenance L (mm) A (mm) 20 24 30 31 Model Bolt Warning LEF;16 LEF;25 LEF;32 LEFS40 3.5 4.5 5.5 6.6 M3 M4 M5 M6 Maintenance frequency Perform maintenance according to the table below.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

A RR1 A1 L1 MM RR1 U1 NZ L L1 E1 10 12 16 20 +0.048 0 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 +0.048 0 5 6.5 8 10 0.4 0.2 0.2 0 0.4 0.2 0.4 0.2 10 12 16 20 12 16 20 25 12 16 20 25 5 6.4 8 10 21.5 32 34 41 6 8 8.5 10.5 16 25 25 30 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 6.3 8.1 10.3 12.8 7 14 11.5 14 21.5 6 11 8.5 16 21 25 30 M5 x 0.8 6.3 8.1 7 10 10 14.6 I-G012 I-Z015A I-G02 I-G03 Y-G012

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

M5 6 47 8 61 26 70 9.5 6.0 28.5 41 92 40 M6 x 1.0 M5 6 55 8 71 Note 1) Dimension F provides a clearance of 1mm between the body and the floating joint, but does not consider dead weight deflection of the cylinder tube, etc.

Low torque Metal seal type Rotary joint Series MQR

Model MQR1-M5 MQR2-M5 MQR4-M5 MQR8-M5 MQR12-M5 Number of circuits 1 2 4 8 12 Operating fluid Air / Inert gas Seal structure Metal seal Guide structure Bearing supported Bearing supported at both ends Port size Male R1/8 Female M5 x 0.8 M5 x 0.8 Flow rate C[dm3/(s.bar)] b Cv characteristics 0.50 0.40 0.17 Lubrication Not required Min. operating pressure -100kPa Max. operating pressure 1.0MPa

End Lock Cylinder Series CBJ2

6 15 8 0 -0.3 18.3 9.5 21 28 55.5 + Stroke 83.5 + Stroke With rear end lock / CBJ2B16-HN 0 h8-0.022 10 6 2-M10 x 1 Piping port 2-M5 x 0.8 8 M5 x 0.8 20 19.8 5 0 -0.3 18.3 12.5 15 8 12.5 50 + Stroke 8 28 86 + Stroke 3 Series CBJ2 Dimensions Flange With front end lock / CBJ2F16-RN 14.5 M10 x 1 Cover side (rear side) Piping port 2-M5 x 0.8 5 6 20 M5 x 0.8 20.3 19 20 2-5.5 Mounting hole 2.3

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

01 M5 x 0.8 Rc(PT) 1/8 (port A) VKF332 (with bracket) Body ported (single type) 5 G M5 Body ported (for manifold) 5 G M5 VKF333 5 G 01 VKF334 Base mounted Light/Surge voltage suppressor Valve option Port size For vacuum For low power consumption For vacuum/low power consumption For long loading time 01 Nil V Y Rc(PT) 1/8 (with sub plate) Without sub plate None With surge voltage suppressor

High Precision Digital Pressure Switch, Series ZSE40/ISE40

female threads) T1: NPT1/8 (with M5 female threads) Rc1/8 Reverse pressure two directions B R1/8, NPT1/8 M5 x 0.8 female threads Panel mount (ZS-22-A) Rc1/8 E M5: M5 x 0.8 (female threads) C4: With 4 One-touch fitting C6: With 6 One-touch fitting Wall mount Wall mount Panel mount + Front protective cover (ZS-24-C) M5 x 0.8 F 4, 6 One-touch fitting Optional When optional parts only are

LJ1H

mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 2 3 Standard Motor/Horizontal Mount Specification Series LJ1H10 Dimensions/LJ1H101PB Scale: 15% 10 6 Work piece mounting reference plane LJ1 LG1 LX LC6D/LC6C Switches LC1 80 5H10 depth 8 8-M5

48

(M3, M5, and G threads) Use SMCs recommended grease. Grease pack part number: GR-S-010 (10 g) M3, M5, Rc port, NPT port Use the correct tightening torques listed below.

Modular Type Lubricators Series AL

Example) AL30-03B-2R Symbol Description Body size 20 30 40 50 60 10 Metric thread (M5) Rc NPT G Nil Thread type N F + M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 Port size + Nil B Note 1) Option (Mounting) Without mounting option With bracket + Polycarbonate bowl 1000 cm3 tank 1000 cm3 tank (with switch) Lowest limit ON 1000 cm3 tank (with switch) Lowest limit OFF Metal bowl Nylon bowl

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

M5 x 0.8 Prepared hole diameter 4.2 20 W 0.50.05 D B Vacuum port M5 x 0.8 Piping port 2 x M5 x 0.8 33 32 10 J depth 1.5 3 5.5 5 12 9.5 +0.030 0 4 Section AA B D Mounting base side +0.030 0 depth 1.5 3 Q QL 11-/22-MXP12-25 Without magnet and switch rail 2 x M2 x 0.4 depth 3 8 5.7 3.5 L 20 20 6 x M4 x 0.7 depth 4.5 2 x M3 x 0.5 depth 3.5 (mm) G H J K L M Q QL S V W Z Model 11-/22-MXP12-15