240

10 6 0.01 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph b b Load Eccentricity 100 mm Graph , Load Eccentricity 100 mm Graph 1 Load Eccentricity 100 mm 1 10 10 Mass m (kg) Mass m (kg) Mass m (kg) 1 20 16 20 16 20 16 10 6 0.1 1 10 0.1 10 6 6 0.01 0 20 40 60 80 100 0.01 0.1 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

-Rc(PT)1/4 10 10 22 22 22 22 2-Rc(PT)1/4 31.5 18 18 31.5 (R1, R2 port) 63 63 [ ] for AC Other dimensions are the same as the grommet style

JXCx-OMY0008

Outlines of Product 7 2.1 Features 7 2.2 How to Order 8 2.3 Product configuration 9 2.4 Start up procedure 10 (1) Checking the contents of the package 10 (2) Mounting the controller 10 (3) Controller Setting 10 (4) PLC set up 10 (5) Wiring and Connection 10 (6) Supply of power 11 (7) Configuration 11 (8) Setup of the operation parameters 12 (9) Test run 12 3.

Cylinder with Lock Series CLS

(n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) 2 pcs. (Different surfaces, Same surface), 1 pc. 10 90 95 100 D-Y69 D-Y7PV D-Y7WV 90 + 30 (n4) 2 95 + 30 (n4) 2 100 + 30 (n4) 2 10 + 30 (n2) 2 n pcs. (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 2 pcs.

High Vacuum Angle Valve, XL Series

-6 {760 to 7.5 x 10 -9} 14 45 80 160 200 Main exhaust valve Conductance l/s Note 1) Initial exhaust valve 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 1.3 x 10 -10 {1 x 10 -9} at ordinary temperatures, excluding gas permeation Internal External Leakage Pa m 3/s {Torr l/s} 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Main exhaust valve Initial exhaust valve 0.10

CG1

Note) ( ): Long stroke 1.6-8 Standard: Double Acting Single Rod Series CG1 With Mounting Bracket Axial foot (mm) Z ZZ Bore (mm) LT W X B LC LD LH LS LZ M LX Y Without rod boot With rod boot Without rod boot With rod boot 67+l 74+l 75+l 83.5+l 95.5+l 95.5+l 104+l 104+l 20 25 32 40 50 63 80 100 10 10 10 10 15 15 16 4 4 4 4 5 5 6 6 6 6 45 (53) 3 3 3 3 34 20 44 49 58 71 86 3 32 36 44 54 66 82

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension

HRX-OM-X010

-100 to 100deg C:-10 to 10V] [-100 to 100deg C:-10 to 10V] +15V 100 + ANALOG CIRCUIT 10 10 Output DI PV Analog Output*3 DI PV Analog Output*3 -15V 22 22 Output ANALOG COM [0 to 20 M:0 to 10V] [0 to 20 M:0 to 10V] +15V 12 Intput Temp.SP Analog Input*3 Temp.SP Analog Input*3 12 + -15V 1M 24 Intput [-100 to 100 deg C:-10 to 10V] [-100 to 100 deg C:-10 to 10V] 24 ANALOG COM 13 Output EMO signal

Cylinder with Lock Series CNG

0.5MPaP 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 25 20 10 10 5 4 3 5 4 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) 1000 1000 Maximum speed: V(mm/s) Note: 1kg = 2.2046lb 1MPa = 1450psi 1in = 25.4mm 20

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

-VV5Q21-08C8FU2 2-position double Metal Rubber Note) Not applicable to the S kit. 2 10-VV5Q21-08C8FU2 10-VQ2100-51 10-VQ2200-51 VVQ2000-10A-1 1 set (F kit 8-station manifold base part no.) 3 sets (Single solenoid part no.) 4 sets (Double solenoid part no.) 1 set (Blanking plate part no.) 2-position double Coil voltage CE compliant 1 2 Note) 3 4 Note) 5 6 100 VAC (50/60 Hz) 200 VAC (50/60

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

-VV5Q21-08C8FU2 2-position double Metal Rubber Note) Not applicable to the S kit. 2 10-VV5Q21-08C8FU2 10-VQ2100-51 10-VQ2200-51 VVQ2000-10A-1 1 set (F kit 8-station manifold base part no.) 3 sets (Single solenoid part no.) 4 sets (Double solenoid part no.) 1 set (Blanking plate part no.) 2-position double Coil voltage CE compliant 1 2 Note) 3 4 Note) 5 6 100 VAC (50/60 Hz) 200 VAC (50/60

Air Fittings & Tubing

3.2 10 14 8 8 10 14 10 10 12 14 17 15.5 3.4 2.9 M5 X 0.8 M6 X 1.0 12.7 13.9 8 4 4 4 1 8 1 4 18 13.5 14.7 14.9 18.5 17 15.5 24 20.5 15.5 26 27.5 22.5 19 28.5 23.5 22 33 27.5 5.6 4 16 M5 X 0.8 M6 X 1.0 10 4 4 13.5 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 6 13.1 10.4 17 14 8 26.1 18.0 18.5 17 26.1 26.1 17 21 10 3 8 41.5 29.5 22 1 2 1 4 19 12 3 8 22 58.3 46.1 30 22 1 2 81 (81) 113 (96)

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: S, W, Y d1 = Q1 = M L2 + (3 x P) L1 = L2 = (mm) Size 30 50 63 80 100 Q2 = M Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc1/8 Rc 1/4 2.5 4 5 4 5 6.8 (mm) (mm) d1 Size 30 50 63 80 100 100 Q2 M3, M4 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 6.8 8.5 10.3 8 6.8 8.5 10.3 8 11 2.5 4 to 7 4.5 to 18 6.8 to 11 6.8 to 13

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: S, W, Y d1 = Q1 = M L2 + (3 x P) L1 = L2 = (mm) Size 30 50 63 80 100 Q2 = M Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc1/8 Rc 1/4 2.5 4 5 4 5 6.8 (mm) (mm) d1 Size 30 50 63 80 100 100 Q2 M3, M4 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 6.8 8.5 10.3 8 6.8 8.5 10.3 8 11 2.5 4 to 7 4.5 to 18 6.8 to 11 6.8 to 13

PFxx-OMA1007

Incorrect internal data processing of the product (Er0, 4 to 16, 40) System error (Er0, 4 to 16, 40) is displayed (2) Check if the power supply voltage is in the range 24 VDC 10%. (2) Check that the Power supply voltage is within 24 VDC 10%.

Fluoropolymer Tubing Variations

(mm) TLM0201 2 x 1 2 1 TLM0302 3 x 2 3 2 TLM0425 4 x 2.5 4 2.5 TLM0403 4 x 3 4 3 TLM0604 6 x 4 6 4 TLM0806 8 x 6 8 6 TLM1075 10 x 7.5 10 7.5 TLM1008 10 x 8 10 8 TLM1209 12 x 9 12 9 TLM1210 12 x 10 12 10 TLM1916 19 x 16 19 16 TLM2522 25 x 22 25 22 TLM1613 16 x 13 16 13 Length per roll Color Translucent Translucent Symbol N N R BU B N N N 10 m Red (Translucent) 20 m Blue (Translucent) Roll

Compact Cylinder with Solenoid Valve/

of the rated voltage DC Power consumption 0.35 (With light: 0.4) W Bore size Standard stroke 5, 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 Surge voltage suppressor Diode (Non-polar: Varistor) 32 1 Indicator light LED Note) The S and Z types of surge voltage

Electric Actuator / Guide rod Slider

100 100 900mm 1000mm 0 0 0 1 2 3 4 5 0 1 2 3 4 5 Workload[kg] Workload[kg] 300 300 Overhang direction:L3[mm] Overhang direction:L3[mm] 250 250 600mm stroke L3 m 200 200 500mm or less 150 150 600mm stroke or less 100 100 50 50 0 0 0 1 2 3 4 5 0 1 2 3 4 5 Workload[kg] Workload[kg] 300 300 250 250 Overhang direction:L4[mm] L4 m Overhang direction:L4[mm] 600mm stroke 200 200 600mm stroke or

C95Series

20 11 22 14 60 60 129 MB-SIO . 100 11 4 \20 90 15 158 132 \84 26 13.5 24 17 75 100 '29 25 +008001 (mm) [~ "r.

Vacuum Unit Ejector / Vacuum Pump System

3 -20 3 1 4 Not specified Not specified 10,000 4 +3 4 5 5 Not specified Not specified 100,000 5 +7 6 +10 -19No.