OMU0023

(1 bit) 145 20 10 85 15 10 Reading of internal parameters (7 words) 270 40 15 150 25 10 Operation mode selection 165 25 10 95 15 10 Commands for virtual I/O operation by serial communication 195 30 15 110 20 10 Reading of alarm history (4 words) 215 30 15 120 20 10 Clearing of alarm history 245 35 15 135 20 10 Confirmation of communication connection 165 25 10 95 15 10 The communication

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8

Booster Regulator/Air Tank

05 10 20 38 Drain valve/ VBAT-V2 22 (Width across flats 19) When the tank OUT port is 3/8, use 3/8 fittings.

Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

SMC

146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 44 G 15 15 15 15 15 19 37 41 19 N 4 4 4 4 6 6 6 8 8 NA 2 2 2 2 2 2 4 4 4 HA 35 35 35 35 35 70 70 76 88 FF 40 40 40 50 35 60 70 70 80 GA 25 25 25

LG1H

24 55 Body mounting reference plane Stroke + 386 52.5 125 1 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 30 95 100 8(4)-6.2 B 95 () () (170) 110 20 95 A 95 () () (150) A B 100 200 300 400 The body mounting reference plane and work piece mounting reference plane should be used as standards when mounting onto equipment.

Series AS-FM/AS-M/ASD-FM

Type 2 3 Elbow Universal Applicable tube outside diameter Metric size Inch size 3.2 4 6 8 10 01 03 05 07 09 11 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 23 04 06 08 10 Control system 0 1 Meter-out Meter-in Use a 1/8" tube.

Plug-in Unit

27 31 38.7 External pilot port 2-Rc 1/8 P=25 65.5 2n-Rc 1/4, 3/8, C8, C10, C12 <4(A), 2(B) port> Rc 1/4: 1/4" Female thread Rc 3/8: 3/8" Female thread C8 : 8 One-touch fitting C10 : 10 One-touch fitting C12 : 12 One-touch fitting L2 6.5 5.5 108 L1 Manual override Indicator light 65.5 P=25 A A A B A B A B A B A B 21 21 63 9 A A A A A A A 143 163 66 41.5 9 B B B B B SI unit Input block 10 n

V

(mm) 2, 4, 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 10, 13, 16, 20, 25, 32, 40, 50 10, 16, 25, 40 D I M E N S I O N S PA D D I A M E T E R S 2, 4, 6, 8 Material (colour) NBR (Black) Hardness 50 shore S P R I N G F O R C E ( N) Pad dia.

VQ7-6/7-8

C6 (for 6) C8 (for 8) C10 (for 10) Note) Right, Left Rc1/4 Rc3/8 C12 (for 12) ISO size 1 VQ7-6 ISO size 1 series 0.43n + 0.49 (n: Stations) 10 stations max.

Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 1/8" O.D. 5/32" 5/16" 5/32" 1/4" Meter-out type Meter-in type Inch size 3/16" 5/16" 3/8"

HRX-OM-Y098

-20 . 8-6 8.4 Cooling Capacity . 8-7 8.4.1 HRL100-A-20 CH1 . 8-7 8.4.2 HRL200-A-20 CH1 . 8-7 8.4.3 HRL300-A-20 CH1 . 8-8 8.4.4 HRL100/200/300-A-20 CH2 . 8-8 8.5 Pump Capacity . 8-9 8.5.1 HRL100-A-20 CH1 . 8-9 8.5.2 HRL200-A-20 CH1 . 8-9 8.5.3 HRL300A20 CH1 . 8-10 8.5.4 HRL-A-20CH2 . 8-10 8.6 Types of Hazard Labels . 8-11 8.6.1 Positions of danger warning label . 8-12 8.7 Standards . 8-13

EXxx-OMY0006CN

IoT 5. 6. 8 7. PC 8. OS 9. /IDS/IPS 10.

CLQ

10 20 25 27 31 39.2 43.2 18 20 8 10 16 20 18.5 22.5 9 10 4.5 5 Rod end nut L1 9-10-15 15 Series CLQ Dimensions: 32 Both ends tapped style: CLQA32 16 3.2 2 x 4-M5 x 0.8 16 3.2 Basic style (Through-hole): CLQB32 Extension locking LOCK 31.5 (unlocks when pressurized) 7.5 42.5 22.5 Rc 1/8 Rod side cylinder port Rc 1/8 Rc 1/8 unlocking port M8 x 1.25 (Effective thread depth 13) Head side cylinder

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

side D side 3 m D-sub connector cable AXT100-DS25-030 Cylinder port fitting C8: 8 One-touch fittings Manifold base (8 stations) 10-SS5Q23-08FD2-D F kit (D-sub connector kit) 10-SS5Q23-08FD2-D 1 set (F kit 8-station manifold base) 10-SQ2131-51-C8 3 sets (2 position single) 10-SQ2231D-51-C8 3 sets (2 position double) 10-SQ2331-51-C8 1 set (3 position closed center) SSQ2000-10A-3 1

JIS Standard Hydraulic Cylinder

(n = 4, 8, 12, 16) Note 4) 135 + 50 (n 4) 2 110 + 50 (n = 4, 8, 12, 16) Note 4) Different surfaces (n = 4, 8, 12, 16) Note 4) n 75 + 50 (n 2) (n = 2, 3, 4) 90 + 50 (n 2) (n = 2, 4, 6, 8) Note 3) 115 + 50 (n 2) (n = 2, 4, 6, 8) Note 3) 125 + 50 (n 2) (n = 2, 4, 6, 8) Note 3) 135 + 50 (n 2) (n = 2, 4, 6, 8) Note 3) 145 + 50 (n 2) (n = 2, 4, 6, 8) Note 3) same surface 10 20 75 145 115

7

Port size Size Orifice diameter Body material Model One-touch fitting Flange Thread 1/4 3/8 3/4 1 32A 40A 50A 1/2 10 3/8" 12 Aluminum 8A 10A 15A Resin VXD2 3 A 10 mm C37 Stainless steel C37 10A 15A VXD2 4 B 15 mm Stainless steel C37 VXD2 5 C 20A 20 mm Stainless steel C37 VXD2 6 D 25A 25 mm Stainless steel VXD2 7 E VXD2 8 F VXD2 9 G 32A 35 mm CAC408 40A 40 mm 50A 50 mm 114 INDEX Pilot Operated

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

ZH15D ZH18D ZH20D 12/Rc 3 8 Body ported type (Without silencer) 8/Rc 1 8 10/Rc 1 4 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 8/Rc 1 8 8/Rc 1 8 10/Rc 1 4 10/Rc 1 4 3 8 12/Rc 10/Rc 1 4 12/Rc 3 8 12/Rc 3 8 16/Rc 1 2 16/Rc 1 2 13-5-2 3 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Ejector JIS Symbol Body ported type (Without silencer) Box type: Type B Body ported