MQQ 2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !
Rubber back of the belt is softened and sticky f . Cracks on the back of the belt are visible The traveling parallelism is the reference plane for the body mounting reference plane. If the traveling parallelism for a table is required, set the reference plane against parallel pins, etc.
1 u t w y CHK CHN CHM CHM CHS CH2 o !
With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 Regulator 3 0 3 0 3 0 3 0 3 0 3 0 Supply port Supply port P P P P P P T T T T T T U U U U U U E E E E E E L L L L L L S S S L L L S S S L L L 6 9 6 9 6
With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 3 0 3 0 3 0 Regulator 3 0 3 0 3 0 Supply port P P P T T T U U U E E E L L L Supply port S S S L L L P P P T T T U U U E E E L L L S S S L L L 6 9 6 9 6
8.4 4.5 2.8 7.8 25 5.4 8.4 4.5 3 8.2 Bore size [mm] f Bore size [mm] f 12 4.5 16 4.5 20 8.5 25 8 Section XX 4 x YY depth YL Bottom view 4 x MM depth ML 4 x NN through Z WA L 4 x OA through 4 x OB counterbore depth OL Section XX Section XX HA: T-slot for hexagon bolt (OL) X0.02 X0.02 DA DB H VA VB T R U X PW MGJ JMGP Section EE 1 G K J PB Q S GA GB T-slot 2 x P (Plug) PA + Stroke 2 x P XA
(ON when there is no problem) B5 White A5 Purple Error signal OUT (B contact) Wiring Circuit Shield IZF21/31 IZF21/31 Shield Green F . G. Ground the F.G. cable with a resistance of 100 or less Green F . G.
Metric Size, Connection Thread: M, R, Rc Oval Type How to Order Oval Type A S 06 01 KQ2 H 1 Threaded Type Metric Size M, R, Rc Inch Size UNF, NPT Inch Size M, R, Rc Metric Size G Metric Size R, Rc Inch Size NPT Inch Size R Metric Size Uni Inch Size Uni One-touch fittings Oval type release button Model Male thread seal method Symbol Model H Male connector S Hexagon socket head male connector F
2 u #3#2 $3 #4@6 80, 100 Component Parts Component Parts No. Description Material Qty.
5 Pilot valve: SF4 u Pilot valve i Rated voltage !1 Manual override SF4 Nil 1 2 3 4 5 6 7 9 Push type Slotted locking type Nil B 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Others Equivalent to the standard models except for u, i, !1. Refer to page 378.
These features plus its small wear area make the figure-8 more efficient and guarantee that it will have a longer life than the "0" ring or "U" packing. Standard Small lK)lnt Q f contacl f!)$utls In 1 8% 1 1'11:11011.
F: Angle adjustment range 5 m u im ax 0 M 7 M 1 in e i gl m n u a m 0 nt a e M dj m us t 19 ax e im gl Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u an m t ad en ju m st Friction fittings Note) The diagram shows the rotation angle with a reference position set
A displayed value can be adjusted within 7% F .S. of the pressure when ex-factory. (3.5% F .S. for ZSE30AF (compound pressure)) Adjustable range of display calibration function Note) When the precision indicator setting function is used, the set pressure value may change 1 digit. 10 Series ZSE30A(F)/ISE30A 2-Color Display High-Precision Digital Pressure Switch Fl in brackets stand for the
Port thread GB Width across flats B1 H1 C NA C NA D E E AL A H S + Stroke ZZ + Stroke F NA C NA C MM 4 x JA 4 x JB Female thread MM Depth A1 H ZZ + Stroke Female rod end Female Rod End [mm] [mm] Bore size A AL B1 C D E F H H1 JA JB KA MM NA Bore size A1 H MM 20 14.5 12 13 15.5 8 14 0 0.1 2 21 5 M4 x 0.7 depth 7 M4 x 0.7 depth 5.5 Width across flats 6 length 3.5 M8 x 1.25 24 20 8 6.5 M4 x
10-/21-AR20-B30-B: Max. 3.5 10-/21-AW40-B: Max. 5 AR50-B/60-B 10212 x P1 (Port size) A BB Pressure gauge (Option) C H K IN OUT B Q AA Applicable tubing 6/4 P2 (Pressure gauge port size) R F J M D J U Bracket (Option) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount P1 P2 A B Note 1) C D Q R S T U V W Y Z F J K AA BB H
Note 2) Dimensions E and F are 7 mm longer for the auto switches with connector (D-A7lC, A80C, J79C).
(N) Allowable end load F (N) Allowable end load F (N) MGCM40Stroke -R (Slide bearing type) St: Stroke (mm) Allowable end load F (N) MGCM50Stroke -R (Slide bearing type) St: Stroke (mm) Allowable end load F (N) 8-22-8 9 Series MGC Guide Cylinder Compact Type Ball Bushing Bearing Allowable End Load and Deflection MGCL20Stroke -R MGCL25Stroke -R MGCL32Stroke -R (Ball busing bearing type) (Ball
Tubing material Nil Rc Locking direction n L Foot style TN NPT Nil Aluminum tube F Rod side flange style F Steel tube D Both directions G Head side flange style Auto switches are not available with steel tube.
Valve side exhaust Refer to page 478 for the maintenance parts. 470 XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17