MQQ

N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5 M5 x 0.8 10 15 6 74 114 22 30 22 12 21 19.5 20 M20 x 1.5 18 Rc 1/8 8 M8 x 1.25 13 25 8.5 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M26 x 1.5 18 Rc 1/8 10 M10 x 1.25 13 30 8.5 102.5 160 34.5 44.5 32 20.5 38 32 For details on rod end nut and mounting nut, refer to page 10-5-24. 10-5-20 20 Low

Compact Cylinder

Minimum Auto Switch Mounting Stroke (mm) Auto switch model Bore size (mm) D-A9 A9V D-M9 D-M9V D-F9W D-F9WV D-F9BAL Number of auto switches 2 pcs. 10 5 15 10 20 10 15 20 1 pc. 5 5 15 5 20 10 15 2 pcs. 10 5 10 10 20 10 10 25,32,40,50 1 pc. 5 5 10 5 20 10 10 2 pcs. 10 5 10 10 15 10 10 63 1 pc. 5 5 10 5 15 5 5 Besides the models listed in How to Order, the following auto switches are applicable

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

15 Series MGZ Construction y @9 #1 q i o r t !

EXxx-OMQ0015CN

2047 10.5 5.25 21 1934 5 20 1950 10 5 20 1024 3 12 1024 5.25 2.625 10.5 114 1 4 0 0 0 0 0 0.75 3 : 010 V 10 VPLC 1950 -49No.EX-OMQ0015CN (3) AD -3276732767 = : 15 V (1)15 V (2)5000 1000 1000 1 V 2000 2 V 3000 3 V 4000 4 V 5000 5 V (3)(5 V-1 V)(5000-1000)1/1000 15 V 1/1000 3000 AD 1000 5000 PLC (AD ) (ab) [V] [mA] 10 010 15 05 020 420 -32766 32767 10 5 5 20 20 -32767 32766

HRX-OM-Y120

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure *1 Alarm flag 1 6 Air exhaust fan failure *2 7 Reservation 8 CH1 abnormal rise of circulating fluid

JXCx-OMY0004

Please take appropriate countermeasures in accordance with alarm content in reference to the controller Operation Manual. 15. Alarm for Motor Control (P.64) SF Red LED is ON. Alarm generated Check the content of alarm Refer to the controller operation manual and take appropriate measures. 15.

Vacuum Unit Ejector / Vacuum Pump System

Note 14) When L is selected for (8) Options for the single unit model, specify L for manifold, too. (6) Manifold Assembly Symbol Delivery condition Nil Individual units assembled delivered as a manifold FA Delivered as individual parts (not assembled) Note 15, 16) Note 15) Kit consists of end plates for both ends and tension volts.

Vacuum Unit Ejector / Vacuum Pump System

In such cases, the entire silencer case assembly needs to be replaced. 4 For nozzle size 07, 10 6 For nozzle size 12, 15 8.2.4.

MHK2

Internal Grip External Grip MHK2-12S MHK2-12C 20 15 Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) Gripping force (N) 15 10 0.5 MPa 0.5 MPa 10 0.4 MPa 0.4 MPa 5 5 0.3 MPa 0.3 MPa F F 0 0 10 20 30 40 50 10 20 30 40 50 Note) In case of single acting type, the value is for stroke center.

CLK1

15 35 18 15 2-M6 thread depth 11 2-M6 thread depth 11 20 20 A 17 17 40 A 20 20 15 45 60 25 45 60 A Applicable clamp cylinder A Applicable clamp cylinder Part no.

CNG

(rod cover side) Number of auto switches Switch mounting surface Port surface Port surface Port surface Switch model 50st or more 50st or more 15 to 49st 15 to 49st 10st or more 10st or more D-C7, C8 D-H7, H7W D-H7BA, H7NF 60st or more 60st or more 15 to 59st 15 to 59st 10st or more 10st or more 65st or more 65st or more D-C73C, C80C, H7C 15 to 64st 15 to 64st 10st or more 10st or more 65st

MHK2

Internal Grip External Grip MHK2-12C MHK2-12S 20 15 Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) Gripping force (N) 15 10 0.5 MPa 0.5 MPa 10 0.4 MPa 0.4 MPa 5 5 0.3 MPa 0.3 MPa F F 0 0 10 20 30 40 50 10 20 30 40 50 Note) In case of single acting type, the value is for stroke center.

MB1

Contents 32 40 50 63 80 100 MB32-PS MB40-PS MB50-PS MB63-PS MB80-PS MB100-PS Kits include items 14 (2pcs.), 15, 16 & 18 from the table above.

MHF2

40 104 90 20 E 7.7 14.8 15 19 25 E 0 -0.1 4-3.4 through (mounting hole) 20 27 1 27 1 4-5.5 M5 x 0.8 +0.1 0 Close: 0 Finger opening port E-E Open: 481 Use the attached hexagon socket head screws for mounting holes. 4-M4 x 0.7 thread depth 5 Mounting thread 8-M3 x 0.5 thread depth 4 Attachment mounting thread 80 M3 x 0.5 5 33 15 20 Accessory option: Hexagon socket head screw (special screws

Table of Contents

29 or less 2 position 3 position Single VQ1131 Rubber seal 0.91 0.19 0.21 1.0 0.21 0.25 15 or less 20 or less 34 or less 57 VQ1230 Metal seal 0.77 0.14 0.18 0.84 0.14 0.19 12 or less 15 or less 29 or less Double (Latching) VQ1231 Rubber seal 0.91 0.19 0.21 1.0 0.21 0.25 15 or less 20 or less 34 or less VQ1330 Metal seal 0.67 0.13 0.16 0.73 0.13 0.17 20 or less 26 or less 40 or less Closed

Clamp Cylinder with Lock

15 35 18 15 2 x M6 thread depth 11 (for YA type) 2 x M6 thread depth 11 (for IA type) 20 20 17 17 40 A 20 20 19.5 0.2 0.5 15 45 60 25 45 60 A Part no.

Pressure Gauge Guide

The installation torque is 0.3 to 0.5 Nm. 14-11-15

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

to 35C) 5% F.S. 1 digit (0 to 50C) 2% F.S. 2% F.S. (15 to 35C) 2% F.S. (15 to 35C) Monitor unit Monitor unit Monitor unit Monitor unit (15 to 35C) 3% F.S. (15 to 35C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 0.5% F.S. 0.5% F.S. 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. 5% F.S. (0 to 50C) (0 to 50C) (0 to 50C) (0 to 50C) Repeatability 1% F .S.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Note) Types with 15 pin are also available. Refer to page 2-4-92 for details.

Thermo-con

External sensor connector (EXT.SENSOR) D-sub 15 pin (socket) Holding screw: M2.6 4 5 6 3 8 7 1 2 Pin No. Signal contents 1-2 Unused 3 Terminal A of resistance temperature detector 4 Terminal B of resistance temperature detector 5 Terminal B of resistance temperature detector 6-14 Unused 9 15 14 13 12 11 10 15 FG 4.