Process Pump <Fluororesin Type> Series PA3000

[ANR]) Discharge pressure (MPa) 0.4MPa Discharge flow rate (l/min) SUP = 0.5MPa 0.3 0.3MPa SUP = 0.5MPa 150 10 0.4MPa SUP = 0.5MPa 0.2MPa 0.4MPa 0.2 100 0.3MPa 0.3MPa 5 0.2MPa 0.1 50 0.2MPa 00 5 10 00 5 10 15 00 50 100 150 Flow rate (l/min) Air consumption (l/min [ANR]) Operating cycle (Hz) 4 Series PA3000 Dimensions PAm331m-m03 152 4-7 64 2-M5 with depth 8 139 10 10 120 95 Bottom view

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Motor output [W]/Size [mm] 750/80 Motor type AC servo motor200 VAC Encoder Absolute 22-bit encoderResolution4194304 p/rev Horizontal 135 Power consumption [W] *7 Vertical 150 Horizontal 15 Stnadby power consumption when operating [W] *8 Vertical 45 power [W] *9 Max.1100 Type *10 Non-magnetizing lock specifications 24 VDC Rated voltage [V] Power consumption at at20 [W] *11 Holding force [N

MRQ

20 25 30 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 150 15 Allowable side load on the piston end Unit: N 100 10 Stroke of linear part Size 40 40 50 4 5 5 10 15 20 25 30 40 50 75 100 32 40 32 14 14 13 13 13 12 12 11 10 9 20 25 30 2 2.5 3 23 23 22 21 21 20 19 18 16 15 2) Using the cylinder body installed vertically: To operate the rotary cylinder with the cylinder body

Magnetically Coupled Rodless Cylinder Slider Type: Slide Bearing ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40 CY1S Series

Rubber bumper (Magnet type) Standard Strokes Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 50, 100, 150, 200 Made to Order Made to Order: Individual Specifications (For details, refer to pages 1507 and 1508.) 300 6 50, 100, 150, 200, 250, 300 500 Symbol Specifications 10 -X116 -X168 -X210 -X322 -X324 -X431 -X2423 Air-hydro 50, 100, 150, 200, 250, 300, 350, 400, 450

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

ø6, ø8, ø12, ø16, ø20, ø25 Series MXQR Air Slide Table/Reversible Type

Bore size (Stroke (mm)) 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 Applicable Auto Switches/Refer to Best Pneumatics No. 3 for further information on auto switches.

IZ-OMK0015

200 to 2000 200 to 300 15 200 to 2000 200 to 300 20 150 to 2000 150 to 250 30 50 to 2000 50 to 200 60 50 to 2000 50 to 150 (Note) After installation, verify the effects of static neutralization.

Table of Contents

30% 50% 70% 10% 30% 50% SY 150 300 Stroke (mm) 70% Stroke (mm) AS2201F -01-06 AS2200-01 AS2201F -01-08 AS2200-01 70% 100 SYJ 200 50 SX 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10% 30% 50% 70% 50% 30% 10% 0 0 200 CM2 25 400 MB 40 150 300 Stroke (mm) Stroke

5 Port Solenoid Valve Series SV

II Air Cylinder Drive Systems Total Stroke Time and Speed at the End Series SV Series SV1000 Applicable bore size: 20, 25, 32, 40 Applicable related components Total stroke time s Solenoid valve Tubing Speed controller Silencer 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 200 CM2 20 50% 70% 10% 30% 150 Stroke mm AS2201F -01-06 AS2200-01 70% 100 50 10% 30% 50% 0 200 CM2 25 150 Stroke mm AS2201F

Floating Joint Light Weight Type for Light Load JC Series

x 1.5 M18 x 1.5 300 800 1250 3100 0.5 0.5 0.75 1 5 Semi-standard/Thread nominal size 0.5 0.5 0.5 0.75 0.75 0.75 1 1 300 800 800 1250 1250 1250 3100 3100 JC20-8-100 JC25-10-150 JC32-10-100 JC40-12-125 JC40-12-150 JC40-12-175 JC50-16-150 JC63-16-200 M8 x 1 M10 x 1.5 M10 x 1 M12 x 1.25 M12 x 1.5 M12 x 1.75 M16 x 1.5 M16 x 2 20 25 32 32/40 40 32/40 50 50/63 5 How to Order 14-150 JC 40 Thread

How to Order MB Series ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Air Cylinder: Standard Type Double Acting, Single Rod

400, 450, 500 CA2 Up to 1800 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper -XC5 Heat resistant cylinder (10 to 110C) -XC6 Made of stainless steel*3 *4 Up to 2700 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 -XC7 Tie-rod

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

to 330 20 to 180 24 to 750 16 to 500 8 to 250 30 to 1140 20 to 760 10 to 350 range 801 to 900 24 to 610 16 to 410 8 to 200 30 to 930 20 to 620 10 to 280 Actuator specification 901 to 1000 24 to 500 16 to 340 8 to 170 30 to 780 20 to 520 10 to 250 1001 to 1100 30 to 660 20 to 440 10 to 220 1101 to 1200 30 to 570 20 to 380 10 to 190 10 Max acceleration/deceleration [mm/s2] 5000 Positioning

IDX-OM-Z004

IDX-OM-Z004 6 IDF150F-30-W K16K (10, 0.7m) () (10, 2m) JIS 80A 10K (10,0.7m) ) (10 ( (K16K) JIS 80A 10K 2m) 20 18 t 268 217 t 20 18 t 8x23 8x19 A A 8x23 8x19 20 4x 75 A 1056 A 720 9351 1290 160 150 150 160 t K K K K K16K JIS 80A 10K 64 (17) 17) 40 (K16K) 1823) (18~23) JIS 80A 10K 479 127 1332 1432 1,3 -W4 (-W4) -W4 Y3/4 (-W4) Y 3/4 () () R3/4 R3/4 20 50 165

Magnetically Coupled Rodless Cylinder/ Basic Type CY3B Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Standard stroke 6 10 15 20 25 32 40 50 63 6mm 10mm 15mm Port thread type 20mm Bore size 6, 10, 15 Type M thread Rc NPT G Symbol 25mm 32mm Nil 20, 25, 32, 40 40mm TN TF 50, 63 50mm 63mm Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) 300 50, 100, 150, 200 6 500 50, 100, 150, 200, 250, 300 10 15 20 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 1000 1500 100

Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) Made to Order: Individual Specifications (For details, refer to pages 1538 and 1539.) 6 10 300 500 50, 100, 150, 200 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350 400, 450, 500 Symbol Specifications -X116 -X168 -X322 -X431 Hydro specifications 15 750 Helical insert thread specifications 20 25

ZP

Thin flat Thin flat with ribs Table (2) Pad Diameter/Stroke Diameter (mm) Thin flat/Thin flat with ribs Stroke(mm) 2 8 3.5 x 7 4 x 10 4 6 10 13 16 20 25 32 40 50 2 x 4 13 16 10 6 10 15 20 25 30 50 40 Table (3) Vacuum Entry/Mounting Thread Diameter 2 to 8 2 x 4, 3.5 x 7, 4 x 10 Thin section series 10 to 16 10 to 32 40, 50 Symbol Thread dia.

Rotary Actuator/Vane Type

-4 P211070-10 15 P611090-1 P811020-3 P811020-4 P211090-10 20 P611060-1 P611060-8 P811030-3 P811030-4 P211060-10 30 P611080-1 P811040-3 P811040-4 P211080-10 40 P611010-1 P611010-8 P611010-9 P811050-3 P811050-4 P211010-10 *1.

CRBU

CRA1 CRQ MRQ MSQ MSUB L1 (mm) (mm) (mm) Size 10 15 20 30 X Size 10 15 20 30 L1 Y Size 10 15 20 30 L1 L2max X 5 (8 Y) to (Y to 1) 6 (9 Y) to (Y to 1.5) 7 (10 Y) to (Y to 1.5) 8 (13 Y) to (Y to 2) 19 (14 X) to (X 1) 10 (18 X) to (X 1.5) 10 (20 X) to (X 1.5) 12 (22 X) to (X 2) 3 to 8 3 to 9 3 to 10 5 to 13 3 to 14 3 to 18 3 to 20 5 to 22 3 to 14 5.5 to 18 7 to 20 7 to 22 9

Possible to transfer a workpiece at low-speed.

0 30 25 20 15 10 5 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 100 100 50 40 30 20 10 0 100 80 60 40 20 0 Load (N) Load (N) 336 MSQX Series Low-Speed Rotary Table Rack & Pinion Type Construction CRB2 CRB1 MSU CRJ CRA1 o i @5 @6 t y !

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Positioning distance (mm) 1 10 100 300 600 10 0.5 1.5 10.5 30.5 60.5 100 0.5 0.6 1.5 3.5 6.5 Speed (mm/s) 150 0.5 0.6 1.2 2.5 4.5 300 0.5 0.6 0.9 1.6 2.6 Values will vary slightly depending on the operating conditions.