Model Option AR10 AR25(K) AR20(K) AR30(K) AR40(K) AR40(K)-06 AR50(K) AR60(K) Bracket assembly Note 1) AR30P-270AS AR30P-260S AR40P-270AS AR40P-260S AR50P-270AS Note 2) AR20P-270AS AR20P-260S AR25P-270AS AR25P-260S G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L AR10P-270AS AR10P-260S G27-10-R1 Set nut Note 3) Note 3) G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L GC3-10AS [GC3P-010AS (Pressure gauge
Model Optional specifications AW10(K) AW20P-270AS AR20P-260S AW20(K) AW30(K) AR40P-270AS AR40P-260S AW40(K) AW40(K)-06 AW60(K) AW60P-270AS Note 6) Bracket assembly Note 1) AR10P-270AS AR10P-260S G27-10-R1 G27-10-R1 Note 3) AR30P-270AS AR30P-260S Note 7) Set nut G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L Round type Note 2) Standard 0.02 to 0.2 MPa
$ ' $ # ' ,*# ./ 01 ( *# ./ 2 01 $ ./ 23 ##4 #1 /47 .81 < :# /4; .71 + + 47 ./1 + /4 ./31 /;3 /;> /3 /3 17-3-4 Series VX / VXZ22/23 VXH22 VXF21/22 VX31/32/33 . !"! !#! !"! !"! !"! 0 !#! 0"!#! !"! 0 !#! 0" #!
PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 PFM7-01/02--X693 PFM7S-01/02--X693 -73No.PF-OMJ0006-J PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 PFM7-01/02--X694 PFM7S-01/02--X694 -74No.PF-OMJ0006-J For a mixture of Argon (Ar) and carbon dioxide (CO2) The mixture ratio can be selected from Ar : CO2 = 92 : 8, 90 : 10, 80 : 20, 70 : 30 or 60 : 40.
Port size 3 5 10 20 Port size Symbol Nil H Nil H H Nil H Nil 01 02 $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ 1/8 1/4 Thread type Symbol Type Nil Rc N F NPT G Component equipment 3 10 20 5 Component equipment Nil H Nil H Nil H Nil H Mist separator AFM20 AFD20 AFM30 AFD30 Micro mist separator Differential pressure gauge GD40-2-01 Regulator AR20 AR25 Replacement Parts (Element for mist separator, micro
Data No. : [0][0] Data : 07 Data No. : [0][0] Data : 01 (SON turned ON) (SON, LSP, LSN turned ON) End Command : [8][B] Cancel the JOG operation. Data No. : [0][0] Data : 0 (JOG operation cancel) Power on the servo amplifier. Shift to the CC-Link operation mode. Power on the drivers 14 34 14.
C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.
Data No. : [0][0] Data : 07 Data No. : [0][0] Data : 01 (SON turned ON) (SON, LSP, LSN turned ON) End Command : [8][B] Cancel the JOG operation. Data No. : [0][0] Data : 0 (JOG operation cancel) Power on the servo amplifier. Shift to the CC-Link operation mode. Power on the drivers 14 35 14.
. ## Description 01 Axis No. 1 64 Axis No. 64 2. ** indicates the alarm No. and the warning No. 3. Requires the setup software (MR Configurator2TM). 4 13 4. STARTUP 4.4 Test operation Before starting actual operation, perform test operation to make sure that the machine operates normally. Refer to section 4.2 for the power on and off methods of the driver.
. ## ## 01 1 64 64 2. *** 3.
N01 C4H C6H N7H C4L C6L N7L M5X0.8 R1/8 NPT1/8 4 mm 6 mm 1/4 inch 5/32 inch 4 mm 6 mm 1/4 inch 5/32 inch () PBTCB156PPSO HNBR C3604( ) POMSUS304NBRC3604 SUS304NBR 24 g 34 g 36 g 27 g 28 g 29 g 30 g 30 g 36 g +39 g 0.15mm 2(AWG26) 1.0 mm (5 ) 3.5 -77No.PS-OMU0002CN-D M5 42.6 7 M50.8 3.5 01/N01 A 01 R1/8 10 N01 NPT1/8 12 C4HC6HN7H 2.5 A B C4H 15.6 8 C6H 16.5 10 N7H 16
22 For Positive Pressure ZSE40 01 22 For Vacuum/Compound Pressure Option Set pressure range Nil F For vacuum pressure For compound pressure Nil None Bracket A (ZS-24-A) 10.0 to 101.3kPa 100.0 to 100.0kPa A Piping specifications Bracket B (ZS-24-B) W1: Rc1/8 01: R1/8 (with M5 female threads) T1: NPT1/8 (with M5 female threads) Rc1/8 Reverse pressure two directions B R1/8, NPT1/8 M5 x 0.8
Note 4) Not available for piping specifications of M5R, 01 and N01. Note 5) The DIN rail needs to be prepared by the customer.
36 132 50 41 200 74 60 230 74 60 271 86 70 22 36 110 180 544 612 873 JIS Symbol 1 4 1 2 2 Construction/Parts/Dimensions ANA1-01 to 06 Sound absorbing Case material (PFV ) End plate Hexagonal flats ANA1-06: PP How to Order Cover ANA1-10 to 20 Sound absorbing material Body Tension bolt End plate A1 03 AN Port size Symbol Connection Port size 1 8 01 1 4 3 8 1 2 3 4 02 03 04 06 10 12 14 20 (
TB Td TE TF TH TN Rod End Nut CG-020-24A CG-025-24A CG-032-24A CG-040-24A CG-050-24A CG-063-24A CG-080-24A CG-100-24A 3.2 3.2 4.5 4.5 6 8 11 12 (29.3) (33.1) (40.4) (49.2) (60.4) (74.6) 28 01 13 15 17 21 24 26 36 50 36 43 50 58 70 82 73 90 8 10 12 14 16 18 18 22 10 10 10 10 20 20 5.5 5.5 6.6 6.6 9 11 11 13.5 25 30 35 40 50 60 55 65 RZQ 03 32 01 03 Applicable bore (mm) 20 25 32 40 50 63
For vacuum/ compound pressure ZSE30A 01 N M ISA2 Option 3 Note) Calibration certificate Nil Y K T Note) Operation manual ISE35 Symbol Rated pressure range ZSE30A ZSE30AF 0 to 101 kPa 100 to 100 kPa PSE Piping specifications IS 01 Note) All texts in both English and Japanese.
RE A B Model Recommended Speed Controller REC Model Elbow type Straight type In-line type CX REC20 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 REC25 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 CY REC32 AS2201F-01-06-X214 AS2301F-01-06-X214 AS3001F-08-X214 REC40 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way
[V] A B C 0-101 kPa 0 -101 kPa 10.1 kPa -100100 kPa -100 kPa 100 kPa 01 MPa 0 1 MPa -0.1 MPa 0500 kPa 0 500 kPa -50 kPa -13No.PS-OMG0005CN-E PSE5601 PSE56N01 02 N02 PSE56-C01 A B PSE56-01 8.2 R1/8 PSE56-02 12 R1/4 PSE56-N01 9.2 NPT1/8 PSE56-N02 12.2 NPT1/4 PSE56-A2 PSE56-C01 Rc1/8 PSE56-A2 15.5 URJ1/4 PSE56-B2 9.5 TSJ1/4 PSE56-B2 ZS-31-X D E F G H I ZS-31-X188 20 9 R1/8 R1/8 14 1.5
Caution
(Only for EX510-S 01 ) -28No.EX-OMI0001-I No.