XLDV Series

Closing the valve for initial pumping and the valve for main pumping When the initial and main pumping solenoid valves are de-energized, the valve S and M will return and start sealing. 9 XL-OMM0005-A 5 Dimensions 57.6 XLDV-25 (For AC) 55.4 (For DC) 2.2 8.5 C E B 1(P) D (KF flange) Fn G M5 1(P) SUP A M5 3(R) EXE H A XLDV-40160 C C E B 8.5 8.5 5.5 D (KF flange) Fd (K flange) M5 G Fn 1(P) SUP

S070

VP r VG e !

End Lock Cylinder Series CBG1

With double locks: CBG1BN Bore size Stroke W (mm) Bore size (mm) S ZZ 20 92 129 25 92 134 32 91 133 40 101 153 50 119 179 63 119 179 S + Stroke 80 146 220 ZZ + Stroke 100 146 220 With rod boot IJ e JH 8 l f h + l JW ZZ + l + Stroke (mm) Front lock (-R) ZZ Double locks (-W) Rear lock (-H) Bore size (mm) e f h IJ JH JW l ZZ ZZ 20 30 16 55 27 (14.5) (11.5) 138 137 (145) 149 25 30 17 62 32

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

S) (mm) Dimensions PB S Model LVD2m-Tm LVD3m-Tm LVD4m-Tm LVD5m-Tm PA 12.5 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2m-Tm LVD3m-Tm LVD4m-Tm LVD5m-Tm 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 x 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45 105.5 76 25 169.5 65 17.5

Table of Contents

500 Maximum speed (mm/s) 2.

VZ3000

M5 x 0.8 C4 C6 One-touch fitting for 4 One-touch fitting for 6 3 position exhaust center 3(R) port PE port Note) 1(P), 5(R1), 3(R2) port: M5 x 0.8 4 Rated voltage Manual override 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz Nil: Non-locking push type C: Locking type C (Manual) 3 position pressure center 4 5 24 VDC 12 VDC B: Locking type B (Slotted) 5 6 9 Other

MHK2

x 0.8 (Finger closing port) 4-M5 x 0.8 MHC Adjustment needle for finger speed Auto switch mounting groove (2 positions) MHT S O 3 20 MHY 4 16 12 0 0.05 6 12 8 MHW Note) For single acting, one port is used as a breather port. 23 M5 x 0.8 (Finger opening port) MRHQ 2.3 Misc.

MHK2

groove (2 positions) S O 15 3 15 10 0 0.05 5 9 4 7.5 Note) For single acting, one port is used as a breather port. 21 M5 x 0.8 (Finger opening port) 2.5 MHKL2-20: Long stroke type 18.6 2-M5 x 0.8 thread depth 8 (Mounting thread) 24 4H9 depth 4 +0.030 0 21H9 depth 1.5 +0.052 0 2-M5 x 0.8 thread depth 10 (Mounting thread) 24-M5 x 0.8 thread depth 10 (Mounting thread) Bottom hole 4.3 through

Smooth Cylinder

Through-hole/CQ2YB, CDQ2YB Both ends tapped/CQ2YA, CDQ2YA Both ends tapped (mm) Bore size (mm) 63 O1 R O1 thread R R M10 x 1.5 18 80 M12 x 1.75 22 100 M12 x 1.75 22 H thread effective depth C 4-N through 8-O counter bore U Q F 2-P (Port size) (Rc, NPT, G) I 22 M E D Z 11 Lead wire min. bending radius 10 Auto switch D-A7, A8 K M E S J B + Stroke A + Stroke L Rod end male thread H1 Rod end

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Grease pack part number: GR-S010 (10 g), GR-S-020 (20 g) 59 Series C96 Dimensions Bore size Stroke Basic: C96S(D)B SW PL 2 x EE PL KK WA B D B R E WB Cushion valve 8 x RT VD L9 BG L2 L12 A WH G H G L8 + Stroke VA ZZ + Stroke R E With rod boot e d f l h h + L8 + VA + Stroke Stroke range (mm) A B d11 D EE PL RT L12 KK SW G BG L8 VD VA WA WB WH ZZ E R Bore size (mm) Without rod boot With rod

CRQ2

auto switch CRQ2B S 20 90 CDRQ2B S 20 90 A90 S Shaft type Built-in magnet Single shaft Double shaft S W Rotation 90 80 to 100 170 to 190 180 Size Shaft type 10 15 20 30 40 Air cushion Single shaft Double shaft S W Rotation Air cushion Without Without With Sizes 10, 15 Nil Nil C 90 80 to 100 170 to 190 180 Size 20, 30, 40 10 15 20 30 40 Air cushion Auto switch model Air cushion Without Without

10

22 24.5 24.5 3 Electrical entry DIN terminal Grommet (with surge voltage suppressor) Conduit terminal Port size P Size Grommet Q S 64.5 67 69.5 69.5 R Q 34 (39.5) 45 (53) 49.5 (57.5) 53 R 36 (41.5) 47 (55) 51.5 (59.5) 55 S 68.5 71 73.5 73.5 T 77 (83) 89.5 (97.5) 94 (102) 100.5 Q 27 29.5 32 32 R 42 (47.5) 53.5 (61.5) 57.5 (65.5) 61 Q 30 32.5 35 35 R 28.5 (34) 39.5 (47.5) 44 (52) 47.5 1 2

S070

Grommet type 16.5 3 7 15 21 2-3.4 mounting hole Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 150 (Lead wire AWG#26) 22 5 6 22 20.5 3 2 11 1 7 6 5 12 12.3 12 25 M5 x 0.8 3 (EXH) port M5 x 0.8 2 (OUT) port M5 x 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with

MU

M CQS J79W S B 25 10 S M MDU With auto switch CQM CQ2 Built-in magnet Number of auto switches Mounting style RQ Nil S n 2 pcs. 1 pc. n pcs.

MU

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

Air Slide Table Series MXP

0 r e t Polyurethane 10 Steel ball High carbon chrome bearing steel 11 Electroless nickel plated Plug Brass, Stainless steel, NBR Replacement Parts/ Grease Pack 12 O-ring NBR 13 Grease pack part no. Applied unit Piston seal NBR GR-S-005 (5g) Replacement Parts/Seal Kit GR-S-010 (10g) Guide unit GR-S-020 (20g) Bore size (mm) Kit no. Contents GR-S-050 (50g) 6 2 pieces of no. !2 and !

CJ2X/CUX/CQSX/CQ2X/CM2X

1.5 Effective area (mm2) 7 3.5 4.5 2 Note) Supply pressure: 0.5 MPa, Temperature: 20C CEP1 Elbow Type (Metal body) CE1 Air Flow/Effective Area AS220M-02 AS120M AS220M-01 CE2 Model R 1/4 Cylinder side M5 x 0.8 10-32 UNF NPT 1/8 NPT 1/4 R 1/8 Port size ML2B Rc 1/4 Rc 1/8 Tube side Air flow (l/min (ANR)) 38 7 12 Controlled flow Effective area (mm2) C J G5-S 0.6 0.1 0.2 Flow rate (l/min (ANR)

Rotary Table: High Precision Type

MSUA1-*S P402070-2A MSUA1-*SE P402070-2B MSUA3-*S P402090-2A MSUA3-*SE P402090-2B MSUA7-*S P402060-2A MSUA7-*SE P402060-2B MSUA20-*S P402080-2A MSUA20-*SE P402080-2B Table. 15 Model Unit part no.

MHF2

MHF2-16D1 Scale: 50% 4H9 +0.030 0 depth 3 60 4H9 +0.030 0 depth 3 2-M5 x 0.8 thread depth 12 Mounting thread 6 79.5 5 M5 x 0.8 2-M5 x 0.8 thread depth 5.5 50 94 Mounting thread Finger closing port 26 74 10.6 E 20 20 24 33 E 0 -0.1 1.2 2-4.3 through (mounting hole) 27 29 1.2 29 M5 x 0.8 2-7.5 +0.1 0 Close: 0 Finger opening port E-E Open: 321 58 4-M5 x 0.8 thread depth 5.5 8-M4 x 0.7 thread

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

With auto switch CRQ2B S 20 90 CDRQ2B S 20 90 A90 S Shaft type Built-in magnet Single shaft Double shaft S W Rotation 90 80 to 100 170 to 190 180 Size Shaft type 10 15 20 30 40 Air cushion Single shaft Double shaft S W Rotation Air cushion Without Without With Sizes 10, 15 Nil Nil C 90 80 to 100 170 to 190 180 Size 20, 30, 40 10 15 20 30 40 Air cushion Auto switch model Air cushion Without