5

(mm) Bore size A B C D F GA GB H MM NA NB NDh8 NN S Z 10 15 12 14 4 8 8 5 28 M4 x 0.7 12.5 9.5 8 0 0.022 M8 x 1.0 46 74 16 15 18.3 20 5 8 8 5 28 M5 x 0.8 12.5 9.5 10 0 0.022 M10 x 1.0 47 75 Single foot (L) CJ2YL Bore size Stroke Head cover port location Z Mounting nut Rod end nut Piping port 2 x M5 x 0.8 GB NN F GA Cover surface MM C D 0 0.3 LY LB B LH 0 0.3 B LX LT Piping port M5 x 0.8

ZR

size 10, 13, 15 + with function plate For nozzle size 10, 13, 15 + with function plate M2.5 x 0.45 x 35 M2.5 x 0.45 x 39 M2.5 x 0.45 x 5 M2.5 x 0.45 x 8 M3 x 0.35 x 19 M3 x 0.35 x 23 M3 x 0.35 x 24 M3 x 0.35 x 28 M3 x 0.35 x 68 M3 x 0.35 x 72 M3 x 0.35 x 73 M3 x 0.35 x 77 y u Components Ejector unit + Vacuum switch/Filter unit i o For nozzle size 10, 13, 15 M3 x 0.35 x 84 4 [For ZSE4 spec

7.4

31.2 31.2 7 11.5 10 M5 x 0.8 2(B) port With plug connector/light 5.7 S07 5(R)-mM(O)-M5 2 A B C 8.4 18.6 19.5 M5 x 0.8 4(A) port M3 x 0.5 External pilot port (External pilot type only) 748 Base Mounted Single Unit S0700 Series Plug Lead Type Dimensions 3-Position Closed Center Grommet: S0735(R)-mG-M5 M5 x 0.8 1(P) port 21.2 SJ 11.4 5.2 7.7 M5 x 0.8 3(R) port SY 3 1 SY S0700 S0700 S0700 Manual

Rotary Actuator

(Example) For M4: L2 = 8 Applicable shaft types: X, Z L1 + (3 x P) Q1 = M C1 = C L2 = L1 = L2 = D1 = Q2 = M Q2 = M C1 Z axis X axis X = L1 = [mm] [mm] [mm] Size Q1 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size Q2 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size X L1max D1 30

3 Port Air Operated Valve Series SYJA300 1

M5 x 0.8 Body side VZA222-P-M5 M5 x 0.8 0.13 0.35 0.52 0.15 0.43 0.60 N.O. M5 x 0.8 Body side VZA214-1P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Sub-plate side VZA214-2P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Body side VZA224-1P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O. Rc 1/8 Sub-plate side VZA224-2P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O.

VZ100/300/500

-1 Model Manifold type Single base/B mount 21R-1 P(SUP)/R(EXH) Common SUP/Common EXH Valve stations 2 to 20 stations A port porting specifications Location Valve Bottom Top Rc Base Direction 1(P), 3(R) port Side 1 8 Rc 1 8 Rc 1 8 M5 x 0.8 M5 x 0.8 M5 x 0.8, Rc 1/8, C4 (One-touch fitting for 4), C6 (One-touch fitting for 6) M5 x 0.8 M5 x 0.8 Port size 2(A) port 1 8 X port Note) M5 x 0.8 Note

Vacuum

Pad tYPe '--l (Avail diameters: Relerto List O) 5 M5 x 0.8 a o A 6 r , N / 6 x 1 a o a a M 8 x 1 a a , jo o q l d g > N44 x 0.7 o B5 M5 x 0.8 o o o B6 M 6 x 1 o a B8 lVlS x 1 .25 o a B0r '/e PT a a a o n g List O Pad Dia.

Vacuum

Pad tYPe '--l (Avail diameters: Relerto List O) 5 M5 x 0.8 a o A 6 r , N / 6 x 1 a o a a M 8 x 1 a a , jo o q l d g > N44 x 0.7 o B5 M5 x 0.8 o o o B6 M 6 x 1 o a B8 lVlS x 1 .25 o a B0r '/e PT a a a o n g List O Pad Dia.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) MM TC W NA P S TA ZZ WA WH 30 30 25 20 20 20 20 20 147 157 159 187 218 218 264 264 16 16 16 16 18 18 22 22 23 25 28.5 33 40.5 47.5 60.5 71 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 24 29 35.5 44 55 69 80 100 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 1/2 77 77 79 87 102 102 122 122 11 11 11 12 13 13 M5 x 0.8 M6 x 0.75

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 67.00000 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 71.00000 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 67 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3-Screen High Precision Dig Press Switch, PRESSURE SWITCH, ISE1-6, N59, 71 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 67 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 67.00000 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 71 lb

REA/REB

E Q MM Model REBR15 14 53 4.3 5 6 M5 x 0.8 32 18 21 17 25 M5 x 0.8 x 7 84 M4 x 0.7 REBR25 15 70 5.6 6 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 M6 x 1 x 8 105 M5 x 0.8 REBR32 13 76 7 7 8.5 Rc 1/8 54 26 33 28 50 27 M8 x 1.25 x 10 116 M6 x 1 X Y Z Model REBR15 18 54.5 98 REBR25 28 72 125 REBR32 35 79 148 66 Sine Rodless Cylinder High Precision Guide Type Series REBR Max.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

) (Z) U N (G) NN (mm) A B C D E F G H I J L Y M N NN P Q QQ R U V X Model 2-3.4 through 2-6.5 counterbore depth 3.3 2-M4 x 0.7 4-M3 x 0.5 2-M3 x 0.5 thread depth 5 M3 x 0.5 x 10l CXS10 7.5 8 46 17 44 15 2-M4 x 0.7 35 20 4 20 6 33.6 8.5 7 M5 x 0.8 x 5l 30 thread depth 7 thread depth 4.5 2-4.3 through 2-8 counterbore depth 4.4 2-M5 x 0.8 4-M4 x 0.7 2-M4 x 0.7 thread depth 6 M5 x 0.8 x 10l CXS15

MHZ2/MHZJ2

Max. screw-in depth l mm Maximum torque Nm Model Bolts M3 x 0.5 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 5 8 10 12 0.69 2.1 4.3 7.3 Maximum torque Nm Max. screw-in depth l mm Model Bolts M4 x 0.7 Without clearance M5 x 0.8 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 0.88 2.1 4.3 7.3 6 8 10 12 Impact load M6 x 1 Using the body through hole Hole depth mm Bore mm 11H9 17H9 21H9

Rubber seal 5 Port Solenoid Valve Series SYJ5000

x 0.8, Port size C4 (One-touch fitting for 4) C4 (One-touch fitting for 4) A, B port C6 (One-touch fitting for 6) M5 x 0.8 Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4 1/4 1/8 0.46 0.62 0.79 0.55 0.59 0.74 0.71