VFS

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% System Components VS4 System Solenoid valve Speed controller Silencer Tube bore x Length VQ7 Series VFS2000 AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) A T0604 x 1 m 1 8 Rc EVS Series VFS2000 AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) VFN B T1075 x 1 m 1 4 Rc Double Check Spacer/Specifications Can hold an intermediate cylinder

I

www.stevenengineering.com I FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT REQUEST CATALOG REFERENCE E136 7.22 INSTRUMENTATION ELECTRO-PNEUMATIC REGULATOR D I M E N S I O N S S E R I E S VY1D00-M5 D I M E N S I O N S S E R I E S VY1A0 0 1-M5 D I M E N S I O N S S E R I E S VY1B0 0 1M5 01 Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 !

7.4

Type S0700-S-M5 For internal pilot S0700-S-M5-R For external pilot Note) Standard wire length of valve with plug connector is 300 mm. When ordering a lead wire length of 600 mm or longer, list the part numbers for the valve without connector and the connector assembly.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

A S N F M R V1 V2 Q2 Q1 Q1 U Glossary of Terms Series Bracket mount dimensions A F L1 L2 L3 M N Q1 Q2 R S U V1 V2 JSXM20 169.6 41.6 9 20 43.2 30 43.2 24 33 5.5 11.5 3.5 29 38 JSXM30 224.6 55.1 14.5 26.4 57.2 41 57.2 35 7 14 6 42.5 42.5 JSXM40 295.3 72.55 14.5 34.9 75.1 50 75.1 40 55 9 18 7 50 65 Specific Product Precautions 44 JSXM Series Spacer / Spacer with Bracket Spacer / Spacer with

High Vacuum Angle Valve, XL Series

S Valve seal M (maintenance part) Valve M Valve S Valve seal S (maintenance part) Valve seat S Valve side exhaust Operating principle Initial exhaust valve opening adjustment The initial exhaust rate should be adjusted before operation.

MXS

Model *1) * A B C D E E1 F G H K L M N J P Q MGF MXS 8 MXS12 MXS16 MXS20 MXS25 MXS-BT 8 38 23 12.5 14 40.8 5 8 12 1.4 16.6 7 15.5 14.6 M8 X 1 M3 X 12 M3 X 16 MXS-BT12 45 31 18 14 40.8 6 8 12 1.4 20.5 10 15 18.5 M8 X 1 M4 X 8 M4 X 15 CY1 MXS-BT16 55 37 23.5 16 46.7 7 10 14 1.4 23 12 18.5 21 M10 X 1 M5 X 10 M5 X 18 MXS-BT20 70 47 29 23 67.3 11 12 19 12 27 13 25.5 25 M14 X 1.5 M5 X 12 M6 X 25

MQQ

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.

MQQ

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.

MY1

GR-S-010 (10 g), GR-S-020 (20 g) Technical Data 1353 MY1W Series Dimensions: 16, 20 (LL) L 4 x MM depth M 4 x B counterbore depth C LD through-hole bottom side J depth K PA YW PB QW LW Q+ Stroke PG M5 x 0.8 M5 x 0.8 (Hexagon socket head plug) (Port) W CH LH RR SS NE H RR SS NH HH QQ NC M5 x 0.8 M5 x 0.8 2 x 2 x M5 x 0.8 PP TT UU (Port) This port is not available for use.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators GC GA NN MM Piping port 3 x M5 x 0.8 9 CA F A T NB 0 80.3 0 BA0.3 Z + Stroke S + Stroke NA H 10, 16 NDh8 Mounting nut Y Section Y detail GB GC GA Relief port M5 x 0.8 Rod end nut NN Piping port 2 x M5 x 0.8 Piping port M5 x 0.8 CA CB MM D BA 0 0.3 BB 0 0.3 BA 0 0.3 BB 0 0.3 Head cover port location Axial (R) Z + Stroke S + Stroke NB H NA F

Compact Guide Cylinder

L = 50 mm, V = 400 mm/s L = 100 mm, V = 400 mm/s 5 5 Load mass m [kg] Load mass m [kg] 1 1 0.3 0.3 10 30 31 101 200 100 10 30 31 100 101 200 Stroke [mm] Stroke [mm] MGPKL32 L = 50 mm, V = 400 mm/s L = 100 mm, V = 400 mm/s 50 50 Load mass m [kg] Load mass m [kg] 10 10 3 3 10 50 51 100 101 200 100 101 200 10 50 51 Stroke [mm] Stroke [mm] 18 MGPK Series L L m m Plate Material Aluminum Alloy

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

m s m s Type of impact s m Kinetic energy E1 1 2 m2 Thrust energy E2 Fs Fs + mgs Fs mgs Absorbed energy E E1 + E2 Symbol : Speed of impact object (m/s) m: Weight of impact object (kg) F: Cylinder thrust (N) g: Gravitational acceleration (9.8 m/s2) s: Shock absorber stroke (m) Note) The speed of the impact object is measured at the moment of impact with the shock absorber. 8-12-11 12 Series

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

m s m s Type of impact s m Kinetic energy E1 1 2 m2 Thrust energy E2 Fs Fs + mgs Fs mgs Absorbed energy E E1 + E2 Symbol : Speed of impact object (m/s) m: Weight of impact object (kg) F: Cylinder thrust (N) g: Gravitational acceleration (9.8 m/s2) s: Shock absorber stroke (m) Note) The speed of the impact object is measured at the moment of impact with the shock absorber. 8-12-11 12 Series

Series SV

block (m) No.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

-/22Double Foot Style (M) / CJ2M, CJ2M 10112122Rubber bumper View E GB F NN GC GA Mounting nut Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Cover surface Piping port 2 x M5 x 0.8 D LY LB LH LT LZ LX LT S + Stroke H NA A 4 x LC Mounting hole Y X X Y NB LS + Stroke Z + Stroke C B 0 0.3 B 0 0.3 Drawing of view (E) (mm) A 10 16 D 15 15 F 4 5 GA 8 8 GB 5 5 H 5 5 MM 28 28 NN M4 x 0.7 M5

Micro Mechanical Valve Series VM1000

T.T. 40 M5 x 0.8 OFF 39 (Pilot exhaust port) Max. 6 38 24.5 1.5 1.5 28 Symbol (C1) 2 (C2) 4 18.5 3 14 12 3 (E1) 1 (S) 5 (E2) (140.2) PE EXH.1 SUP.

Microspeed Cylinder

(0.04 to 7.9in/s) Ambient and fluid temperature Ambient and fluid temperature Piston speed Piston rod diameter Piston speed Piston rod diameter 1 to 200mm/s (0.04 to 7.9in/s) 0.5 to 200mm/s (0.02 to 7.9in/s) 16 M8 x 1.25 M14 x 1.5 JIS class 2 Standard stroke: mm M5 x 0.8 (10-32 nominal), Rc 1/8 M5 x 0.8 (10-32 nominal) 6 M3 x 0.5 M5 x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 12 M6 x

Modular F.R.L. Unit

Description Symbol Nil None AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AF + AR + [K] + AL AC20 to 40 K Check valve AW + [K] + AL AC20A to 40A AF + AR + [S] + AL AC20 to 60 Port size AW + [S] + AL AC20A to 40A S Body size Port size Pressure switch AF + [S] + AR AC20B to 60B Symbol 10 20 25 30 40 50 55 60 AF + AFM + [S] + AR AC20C to 40C M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 AW + [S]

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

M5 x 0.8 (A, B port) 10 5 10 2-3.2 (For mounting) 22 2.5 Manual override B A 11 A B 34.4 G: Approx. 300 H: Approx. 600 (Lead wire length) 78.8 [83.2] (Light/surge voltage suppressor) 41.5 [48.5] + 35.6 26.1 R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3240-L-M5 M8 connector (W0): SYJ3240-W0-M5 M plug connector (M): SYJ3240-M-M5 Approx. 300 (Lead wire

CNG

40 32 MLGP 30 40 50 30 40 50 25 40 RLQ Load weight: m (kg) Load weight: m (kg) 20 32 20 20 [Example] 25 MLU 10 10 20 ML1C 5 4 5 4 3 D3 2 2 -X 1 1 200.5 0.5 100 500 400 300 200 100 500 400 300 200 1000 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg