Hand Valve Series VH

VH33l-02 to 03 (Bottom piping) 2 (A) 44 Panel cut dimension 1 (P) 3 (R) 2-A +0.3 0 C +0.5 0 4-Rc 1/4, 3/8 4 (B) B 0.1 Max. panel thickness D (mm) A 3.2 3.2 3.2 Model B 40 51 64 C 35 41 51 D 3.5 6 8 VH200 VH300 VH400 3.6-12 Series VH Panel Mounted/Dimensions VH41l-02 to 04 VH41l-06 2 (A) 4 (B) 4 (B) 2 (A) 25 25 3 (R) 1 (P) 3 (R) 1 (P) 107.5 19 l102 102 89 88 4-6.6 4-6.6 88 81 94 148 144

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

E-P HYREG ® Series VY1

03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5

KS/KX

(mm) D2 L A M D1 Applicable tubing KXH04-M5 KXH04-M6 KXH04-01S KXH06-M5 KXH06-M6 KXH06-01S KXH06-02S KXH08-01S KXH08-02S KXH08-03S KXH10-02S KXH10-03S KXH10-04S KXH12-03S KXH12-04S M5 x 0.8 M6 x 1 38.5 11 13 39 35 8 10.4 16 2.5 4.0 4.0 4 40 39.5 40 42 45 46 49 50 58 59 62 60 63 16 36 1 8 M5 x 0.8 M6 x 1 12 2.5 3 4.0 4.0 5.6 5.6 15 8 36 6 12.8 15 17 1 8 1 4 1 8 38 39 42 43 44 20 26 28 34 42

Pressure Relief 3 Port Valve With Locking Holes

How to Order (1) Single action type VHS 40 04 A BS Made to Order Body size Thread type X1 Body: Red 20 Nil Rc 30 F G Option 40 N NPT Symbol Description 50 Nil K Handle color: Black Port size Body size R Flow direction: RightLeft Symbol Port size 20 30 40 50 Z Note1) psi as unit displayed on label 01 1/8 X Note 1) Only for NPT thread.

ZFC Series

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

90

Flow Rate Characteristics Relief Characteristics IR3020-04-A Supply pressure: 0.7 MPa IR3020-04-A Back pressure: 0.7 MPa 0.7 0.7 0.6 0.6 Set pressure [MPa] Set pressure [MPa] 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 1000 2000 3000 4000 5000 6000 0 0 1000 2000 3000 4000 5000 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Pressure Characteristics Supply pressure: 0.3 to 1.0 MPa Set pressure

“

Flow Rate Characteristics Relief Characteristics IR3220-04-A Supply pressure: 0.7 MPa IR3220-04-A Back pressure: 0.7 MPa 0.7 0.7 0.6 0.6 Set pressure [MPa] Set pressure [MPa] 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 1000 2000 3000 4000 5000 6000 0 0 1000 2000 3000 4000 5000 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Pressure Characteristics Supply pressure: 0.3 to 1.0 MPa Set pressure

REGULATOR

Round type pressure gauge (with colour zone) G36-4-01-L 1 0.2MPa setting NPT G36-10-N01-L G36-4-N01-L 1 0.2MPa setting G G36-10-01-L G36-4-01-L 1 0.2MPa setting ARP20P-310AS-01 Rc Pressure gauge adaptor assembly ARP20P-310AS-N01 Aluminium die cast NPT ARP20P-310AS-F01 G ARP20P-320AS-01 Plug assembly Rc ARP20P-320AS-N01 NPT ARP20P-320AS-F01 G AR20P-370AS-01 Plug Rc AR20P-

KC

(mm) 4 6 8 10 12 Note) Weight (g) D L Q M Model KCT04-00 KCT06-00 KCT08-00 KCT10-00 KCT12-00 Note) D: Max. diameter 10.4 12.8 15.2 18.5 20.9 28.6 32.7 39.2 45.5 49.2 5.3 6.1 7.1 7.9 8.6 18 19 21.5 24 25.5 8 15 23 39 52 3-applicable tubing Union Y: KCU Applicable tubing O.D.

DM

(Option ) Multi-connector Socket side only Plug side only DMK6-23 DMK6S-23 DMK6P-23 6 DMK-C-6 DMK6-04 DMK6S-04 DMK6P-04 DMK12-23 DMK12S-23 DMK12P-23 12 DMK-C-12 DMK12-04 DMK12S-04 DMK12P-04 Specifications Applicable tubing materials Nylon, Soft nylon, Polyurethane Applicable tubing O.D.

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

AS1201F-M5, AS1211F-M5 AS2201F-01, AS2211F-01 AS2201F-02, AS2211F-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 80 60 40 20 0 0 2 4 6 8 Number of needle rotations Number of needle rotations Number of needle rotations AS3201F, AS3211F AS4201F, AS4211F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (

Vacuum Manifold for fieldbus system

D side U side -22No. ZKJ-OM00201-D 7.5.

FQ1

Filtration accuracy (m) 5 10 20 40 74 105 No.

FQ1

accuracy (m) 5 10 20 40 74 105 No.

Compact manifold regulator ARM5 Series

V L4=50+T+X 50 SMC H H L L O O S S U U C C P P K K 8 U 57 (at knob locked) DIN rail part no.

Quick Exhaust Valve Series AQ

Applicable tubing O.D. d VCHC ASS ASR ASQ KE TMH M1 L3 L2 L1 D2 Weight (g) D1 Weight (g) D1 L1 L2 L3 L4 M1 M2 Model Tubing O.D. d Model Tubing O.D. d AQ240F-04-04 AQ240F-04-00 12.9 14.3 5.2 39.2 6 4 9.3 5 4 10.0 9.3 39.2 5.2 13.7 23.5 12.9 12.9 AQ240F-06-06 AQ240F-06-00 13.7 15.4 6.2 40.7 8 6 6 10.0 11.6 6 11.6 40.7 6.2 14.7 26.7 13.7 13.7 AQ340F-06-06 AQ340F-06-00 13.7 19.5 6.3 44.8 13 6

KA

(mm) A D M L Part No.

Antistatic One-touch Fittings Series KA

M P D L A Part No.