Rotary Actuator

V V V J* Z* J* J, Z* J* -XA56 Change of double shaft length (Both with four chamfers) V V V Z* -XA57 Change of double shaft length (Without keyway, With hour chamfers) V V V J* -XA58 Reversed shaft, Change of shaft length (With four chamfers, Without keyway) V V V V T* J* -XA59 Reversed shaft, Change of shaft length (With four chamfers) V V X* MRQ Combination Chart of

NCA1

2-EE (NPTF) Y 4-DD KK A WF AA B 0.63 R AE AH AT D across flats F G J 6-AB (Hole) S AL AL AO AO LF + Stroke SA + Stroke Bore size (in) KK A AA AB AE AH AL AO AT B BA C D DD E EA EE F G J S WF Y R P LF SA XA ZA 150 (1.5") 7/16-20 3/4 2.02 3/8 2 3/16 1 3/16 1 7/16 1/8 1 1/8 1 1/8 3/8 0.551 1/4-28 2 0.3 3/8 3/8 1.26 1.1 1 1/4 1 1.71 1.43 2.36 3 5/8 6 5 5/8 6.062 200 (2") 7/16-20 3/4 2.6 3/8

NCA1

J G R CM2 WF E TL TL LF + Stroke ZB + Stroke A CG1 MB TD0.001 0 ZB P LF Y WF TL R J G Bore size (in) MM KK A AA B C D DD E EA EE 150 (1.5") 5/8 7/16-20 3/4 2.02 1 1/8 3/8 9/16 1/4-28 2 0.3 1 4 3/4 2.36 3 5/8 1.71 1 1 1.43 1.1 1.26 3/8 MB1 200 (2") 5/8 7/16-20 3/4 2.6 1 1/8 3/8 9/16 5/16-24 2 1/2 0.3 1 4 3/4 2.4 3 5/8 1.71 1 1 1.84 1.06 1.26 3/8 250 (2.5") 5/8 7/16-20 3/4 3.1 1 1/8 3/8 9/16

ZP

N A B C D E M Y E N Y A B C D M Model Model ZPY20B--A10 ZPY40B-6-A14 51.5 12.4 25 23.5 33.5 20 22 16 62 24.4 48 40 43 34 44 10.5 ZPY25B--A10 ZPY50B-6-A14 50 53 38 48 66 32.4 57 19 52 15.6 28 24 34 25 27 ZPY32B--A10 32 34 29 39 57 18.9 37 14 Dimensions by Stroke Dimensions by Stroke 40 50 H Model F G F G Model 20 25 32 H 4 tube 6 tube ZPYB10-6-A14 74 142 78 146 F G F G F G J K L J K L ZPYB20

Possible to transfer a workpiece at low-speed.

Change of double shaft length Change of double shaft length XA38 K 10, 15, 20, 30, 40 MRQ K J XA39 XA40 XA41 XA45 K K K XA46 Y Y Y Y Y 20, 30, 40 Y J K K, T K, T K 10, 15, 20, 30, 40 K K K K, T K Z X X, Z J J J, Z Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 T J Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft length Combination

TABLE OF CONTENTS

(G or L) LW53KK8XGB (G or L) 215 215 135 70 55 120 120 10 55 85 70 55 50 50 35 135 120 50 35 30 70 50 35 30 40 35 30 30 30 20 215 120 40 30 25 120 40 30 25 40 30 25 30 25 25 135 65 30 20 15 65 30 20 15 30 20 15 20 15 15 G 132 G 132 DE-ENERGIZED ENERGIZED G 132 H 364 G 132 J 116 G 132 V 564 G 132 K 332 H 364 H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564

5

Z + Stroke TZ Clevis: CG1YD 20 to 63 TT CZ C RR L 8 x J (mm) Clevis CD hole H10 Axis d9 Bore size (mm) CD CX CZ L RR V 20 8 29 14 11 25 10 33 16 13 32 12 40 20 15 40 14 49 22 18 50 16 60 25 20 63 18 74 30 22 80 18 28 56 35 18 26 100 22 32 64 43 22 32 C ZZ + Stroke Z + Stroke TZ (The above shows the case port location is changed by 90.)

NCA1

Type NC A1KG (in) Bore (in) KK A AA B BA C D DD E EA EE F FB G J R TF UF WF Y P XF ZF 150 (1.5) 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 0.551 1/4-28 2 0.3 3/8 3/8 5/16 1.26 1.1 1.43 2 3/4 3 3/8 1 1.71 2.36 4 5/8 5 200 (2) 7/16-20 3/4 2.6 1 1/8 1 1/8 3/8 0.551 5/16-24 2.5 0.3 3/8 3/8 3/8 1.26 1.06 1.84 3 3/8 4 1/8 1 1.71 2.4 4 5/8 5 250 (2.5) 7/16-20 3/4 3.1 1 1/8 1 1/8 3/8 0.551 5/16-24 3 0 3/8

Smooth Cylinder/Low Speed Cylinder

Z + Stroke TZ Clevis style: CG1YD 20 to 63 TT CZ C 0.1 RR L 8 x J Clevis Style (mm) CD hole H10 Axis d9 Bore size (mm) V RR L CZ CX CD C 0.1 20 25 32 40 50 63 80 100 26 32 11 13 15 18 20 22 18 22 14 16 20 22 25 30 35 43 29 33 40 49 60 74 56 64 28 32 8 10 12 14 16 18 18 22 ZZ + Stroke Z + Stroke TZ (The above shows the case port location is changed by 90.)

MXS

MX With end lock(20) MXS20-llR With buffer(20) MXS20-llF MXU Operating port 2-Rc (PT)1/8 2-M6 X 1 thread 13 deep J 15.5 MXS MXQ 15 20 58 MXF 25 44.5 MXW 30.5 0.5 45.5 MXP * Dimensions not indicated are the same as the basic style.

MXS Series Air Slide Table

With end lock (20) MXS20R With buffer (20) MXS20F 2-M6 X 1 thread 13 deep Operating port 2-Rc(PT)1/8 J 15.5 15 20 58 25 44.5 30.5 0.5 45.5 Dimensions not indicated are the same as basic type.

AC

Coef. for compensation 20 10 0 10 30 40 50 60 Air temp.

2/3 Port Valve

Option Symbol and Configuration Fluid and Options Option symbol Seal material Coil insulation Body, Shading coil material Option symbol and body material Brass SUS304 F L X F, B L, J B J B J J T A H A H A H D N G, J S Q E P V M Y A H K K A H A H B J V M V M Y D, E N, P B J Fluid(Application) Standard A B C D E F NBR FPM Argon Argon(long life) Ethyl Alcohol Ethylene glycol Ozone(low

ZP

K Y A J K B Y C D Misc.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Through-hole Mounting 2050 to 500 mm/s Piston speed Data Allowable Kinetic Energy (J) Bore size (mm) 12 16 20 25 32 40 50 63 0.022 0.038 0.055 0.09 0.15 0.26 0.46 0.77 Allowable kinetic energy Minimum Operating Pressure (MPa) Standard Stroke 12 16 20 25 32 40 50 63 Bore (mm) Bore (mm) 12, 16 20, 25 32, 40 50, 63 Standard stroke Minimum operating pressure 5, 10, 15, 20, 25, 30 0.07 0.07 0.05

7

K L F I J (D) Flat terminal C E U 11 T A OUT IN M B 2 x P Port size I F J L K (D) (mm) Electrical entry Model Flat terminal Conduit terminal Conduit Port size P A B C E F I J K L D M T T V U U T 68.5 (74.5) 126.5 (134.5) 76.5 (84.5) 76.5 (84.5) 82.5 (90.5) U 62.5 (68.5) 107.5 (113.5) 29 62.5 (68.5) 5 C VXD2 30 3/4 99.5 68.5 47.5 23 71 20 4.5 17 51 32.5 38.5 35 6 D VXD2 33 35 1 102 71 50

CL

32 37 37 16 20 20 25 30 to 500 to 600 to 600 to 750 to 750 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 CXS +0.3 +0.1 +0.3 +0.1 +0.3 +0.1 CXT +0.3 +0.1 MX Bore (mm) W/o rod boot W/ rod boot KA L LZ MM PG S N PH U P PL W H 51 58 58 71 72 PW RR J K Z 244 273 296 347 381 Z 252 281 304 356 390 ZZ 43 52 52 65 65 e 11.2 11.2 11.2 12.5 14.0 f 59 66 66 80 81 ZZ 14 18 18 22 26 h l 40 50 63 80

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 40 22.5 1.2 11 6 46 25 14.5 10 56 29 20.5 04 A J K 3 40 22.5 1.8 11 6 46 25 14.5 10 56 29 20.5 06 08 N S U F GN GS HS 18 11 15 59 42.5 1.2 10 20 66.5 50 06 08 15 59 42.5 1.8 20 66.5 50 04 JB K ZP3 Y UM B5 3 41 23.5 11 6 47 26 14.5 10 57 30 20.5 JB K 15 60 43.5 10 20 67.5 57 J K 4 10 13 16 D

JXCx-OMU0004

[mm/s] 20 2] 100 [mm/s [mm/s] 20 2] 500 [mm/s [mm] 1 3 LESH**J 20mm/s LESH**K 10mm/s LESH8R LESH16R LESH25R J K J K J K 4 6 15 23.5 43 77 7 10.5 25 39 71.5 128.5 [N] 10 15 35 55 100 180 *20%F.S.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

CY1S15/20/25/32/40 14 (mm) J x K B C D d EA EB FA H HA HG HP HT HS HB GP G FB A L Model CY1S15 CDY1S15 CY1S20 CDY1S20 CY1S25 CDY1S25 CY1S32 CDY1S32 CY1S40 CDY1S40 M6 x 1.0 x 9.5 7.5 9.5 5 16.6 12 6 13 3 40 29 13 39 21 15 1 52 6.5 6 60 M6 x 1.0 x 9.5 10 9.5 5.2 21.6 16 46 36 17 45 20 25.5 4.5 62 8.5 70 M8 x 1.25 x 10 10 11 6.5 26.4 16 8 14 4 54 40 20 53 20 23 9 70 8.5 7 70 M10 x 1.5 x 15