VCS

Model Y X N T S R Q VV2CS2 77 99 66 41.5 44 50.5 22 34.5 4.5 17.3 24.5 38 20 28 56 49 VV2CS3 86.5 101 68 51 45.5 60 24 38.5 5.5 19.3 28.5 42 25.5 30 66 57 VV2CS4 94 103 70 58.5 47.5 68 26 41.5 5.5 20.8 28.5 42 25.5 30 74 57 17-2-47

DOC1020530

For details, refer to "LECSN-T Operation Manual, Section 4.1.

VQC

L and M) 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM (Based on IEC529) Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram.)

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

Connector Grommel Solid slale Reed switch/Rail mount type 200vAc 5 1 0 Relay, Sequence controller 24VDC 5^40 '100vAc 5 -20 , r } , t r r r , 2+v B!

NCY2 series

Connector Grommel Solid slale Reed switch/Rail mount type 200vAc 5 1 0 Relay, Sequence controller 24VDC 5^40 '100vAc 5 -20 , r } , t r r r , 2+v B!

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

R.

Modular Type Regulator Series AR

t q e OUT IN OUT IN e q r r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Note No.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

DSM-60S DSM-60S DSM-75S DSM-75S (H) Cast iron r t y u i o !

I

How To Order Manifold Base NvvsFs<2o-H6S(T;-oo. . i r -007 serias vFsooo Manifoldl ;rY't5"r,on" Itanilold spsciticaliols+ : 1010 siations Appllcable itodel:NW5F5-2O R ' Series NVFSOO Construction,/Parts List Sngle Solenoid Symbol 3 Posiiion Cloced Center Main Parts No.

ISO Cylinder

t 6.

Soft Start-up Valve

This opens the flow passage to port 3 (R), exhausting the air pressure on the port 2 (A) side. The pilot air of the piston r is also exhausted from the pilot valve q, and the piston r is returned upward due to the spring, closing the flow passage from the needle t. r w Exhaust OFF t e 6 AV2000-A/3000-A/4000-A/5000-A Series Construction X X-X r e u q y t Component Parts No.

CYV

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Refrigerated Air Dryer

R and S (Because S function is also included in R.) S and T (Because S function is also included in T.) Note 2) Voltage symbol 20 (200 VAC) is the terminal block connection as standard. Option S cannot be chosen. Voltage symbol 10 (100 VAC) is the power cable with plug as standard.

CRJ

0 n r Ro 18 tio ta or tio ta t f n r Ro fla an le ge ng of si +10 0 0 Ro 19 tat or io t f n r fla an gle ge sin of With external stopper For 90 For 180 Single flat Single flat 5 A A e ng ng ng le le ra ad ad t ju ju en st st m m m st en en ju t r t r ad an an gle ge ge An 5 5 B port A port B port A port 90 A 5 ng ge le an ad t r ju en st m 180 Note) The drawings show the rotation range

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

0 n r Ro 18 tio ta or tio ta t f n r Ro fla an le ge ng of si +10 0 0 Ro 19 tat or io t f n r fla an gle ge sin of With external stopper For 90 For 180 Single flat Single flat 5 A A e ng ng ng le le ra ad ad t ju ju en st st m m m st en en ju t r t r ad an an gle ge ge An 5 5 B port A port B port A port 90 A 5 ng ge le an ad t r ju en st m 180 Note) The drawings show the rotation range

5 Port Solenoid Valve SY Series

w y q e (EB) 3 (EA) 5 (P) 1 t 2 position double JIS Symbol 2 position double (A) (B) 4 2 q w y u r (P) 1 (EB) 3 (EA) 5 t 3 Position Closed center / Exhaust center / Pressure center JIS Symbol 3 position closed center (A) (B) 4 2 q w y u r 3 position exhaust center 3 position pressure center (EB) 3 (EA) 5 (P) 1 t (This figure shows a closed center type.)

SZ3000

If connections are made incorrectly, failure may occur not only in the manifolds and valves, etc., but also in the PLC (control side) and power supply, etc. 9 Series SZ3000 Construction JIS symbol 2 position single 2 position single w e q r t y u o !0 (A) 4 (B) 2 5 (EA) 1 (P) 3 (EB) 4(A) 2(B) 5(EA) 1(P) 3(EB) i JIS symbol 2 position double 2 position double (A) 4 (B) 2 w e q r t y u o !

ZX

(Ordering example) If installed on station 1 and station 3: ZZX106-R 1 pc. ZX1101-K15LZ-EL 6 pcs. ZX1-R1-1 ZX1-R1-3 ZX1-R16 4 pcs. F G T NPTF (Ordering example) ZXX106-R1 pc. (Manifold base) ZX1101-K15LZ-EC5 pcs. (Vacuum single unit) ZX1-BM11 pc.

ISA2

(With HW, SW) M4 x 8 Rc, NPT, G 1/8 With DIN rail L1 5 38 3 38 L2 LED level meter Lead wire connector End plate L End plate R 3 0 3 0 3 0 center DIN rail 92 34 17 Setting dial P P P T T T U U U E E E L L L L L L S S S 81 6 9 6 9 6 9 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 18 12 Pressure gauge Plug 20.5 SUP port Rc, NPT, G 1/8 DIN rail mounting bracket 24 L3 11.2

Series VCL

R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M