Rotary Actuator Vane Type CRB2 Series Size: 10, 15, 20, 30, 40

range between 0 to 110 W, S, J, K, T, Y XC7 Reversed shaft W, J XC30 Fluorine grease W, S, J, K, T, Y X5 For M5 port (90/180) W, S, J, K, T, Y Rotation time adjustment range s/90 Note 1) 0.03 to 0.3 0.04 to 0.3 0.07 to 0.5 Allowable kinetic energy [J] 0.0003 0.0012 0.0033 0.02 0.04 Shaft load [N] Allowable radial load 15 15 25 30 60 Allowable thrust load 10 10 20 25 40 Port location Side

MHZ

D4-MM thread depth L (Thread for mounting attachment) 20K K J J B A A D G D B F C S W O (mm) Model A B C D F G Open Closed Double acting Single acting J K L Weight (g) MM W MHZL2-103 MHZL2-163 MHZL2-203 MHZL2-253 +2.2 0 2H9 2.5H9 3H9 4H9 0 0.2 0 0.2 0 0.2 0 0.2 +0.025 0 5 8 10 12 0 0.05 0 0.05 0 0.05 0 0.05 70 145 290 505 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 5 6 8 10 60 135 270 460 7 9

MHZ

Flat Type Fingers [3] D4-MM thread depth L (Thread for mounting attachment) 20K J A A D G B D B K J F C S W O (mm) Model Open Closed Weight (g) F G A W B C D J K MM L MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 2H9 2.5H9 3H9 4H9 5H9 6H9 +0.2 0 2 2.45 3.05 3.95 4.9 7.3 8.7 5 1 1.4 1.4 1.6 2 3 3 4 5 8 10 12 15 18 3.5 6 8 10 12 20 24 7.2 5.2 8.3 10.5 13.1 18 22 7.5

Electromagnetic Digital Flow Switch

LFE Remote type sensor unit 1 3 J Remote type monitor unit For details, refer to p. 10. Remote type sensor unit 3 A LFE 1 Integrated display type Rated flow range Made to Order (Refer to p. 17.)

-fl Seies

-tn rommet Termina DIN Connector NWsFR3 -10 t Series NVFR3000 Manifold valve a Individual wiring for each valve a Port size Non plug-in type See 'How to Order Manifold Assemblies," pg. 46 Manifold S ifieations a Base mounted VPe Wiring soecitiPort size I'Jo. of Statioos Applicable solenoid valve A,B port P,EA,EB A,B Plug-in type NW5FB3.O1T With terminal blocks Side, Bottom % NPTF 2-10 NVFR3OOO-OF

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

-tn rommet Termina DIN Connector NWsFR3 -10 t Series NVFR3000 Manifold valve a Individual wiring for each valve a Port size Non plug-in type See 'How to Order Manifold Assemblies," pg. 46 Manifold S ifieations a Base mounted VPe Wiring soecitiPort size I'Jo. of Statioos Applicable solenoid valve A,B port P,EA,EB A,B Plug-in type NW5FB3.O1T With terminal blocks Side, Bottom % NPTF 2-10 NVFR3OOO-OF

Refrigerated Thermo-chiller

60% Ethylene Glycol Physical property value Temperature Density Specific heat C [kg/m 3] [g/l] ([kcal/kg C]) [J/(kgK)] 1.10 x 10 3 3.02 x 10 3 (0.72) 10C 1.08 x 10 3 3.15 x 10 3 (0.75) 20C 1.06 x 10 3 3.27 x 10 3 (0.78) 50C 1.04 x 10 3 3.40 x 10 3 (0.81) 80C Water Density : 1 x 10 3 [kg/m 3] [g/l] Specific heat C: 4.2 x 10 3 [J/(kgK)] (1.0 [kcal/kg C]) 79 Thermo-chiller Series HRZ Fluorinated

Air preparation filter

Dimensions H Bracket K L N M D Auto drain (MAX1.6MPa) C I Bracket (accessory) () P E A F J B 1/4 1/4 female Maintenance G OUT IN Drain space Drain guide A A 3/8 female 3/8 G Maintenance Drain space Thread type Rc, G: 10 NPT: 3/8 Rc,G10 NPT3/8" Maintenance space Drain G Auto drain (MAX1.0MPa) Auto drain (MAX1.6MPa) Drain guide B C D E F G Model Port size A AFF,AM,AMD 70D 11 1/2

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

+ Stroke Relief port With air cushion Cushion valve (Width across flats WH) WA GA RA Relief port M5 x 0.8 WB 20 10 S + Stroke ZZ + Stroke (mm) AL Bore size Stroke range 1 2 A GB I J MM P S ZZ K NA C H RA B1 KA D H1 E F GA Standard Long 20 25 32 40 50 63 80 100 35 40 40 50 58 58 71 71 5 5.5 5.5 6 7 7 10 10 24 29 35.5 44 55 69 86 106 7 7 7 9 10 10 10 10 0 0 0 10 10 10 10 10 15.5 19.5 19.5

Process Valve

6 to 8 (D, DL) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below G (Air operated) H (Grommet: G) I (DIN terminal: D, DZ) Manual override (Non-locking push type) P2 P1 F E D B A A J B C Main port 1(A) (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model VNB5-32A VNB6-40A VNB7-50A 1 8 1 4 1 4 1 4 1 2 1 1 2

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

1(0) 1(0) 2(0) 7 B 0(0) 0(0) 1(0) 6 B 0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B 5(3) 5(3) 6(4) 11 B A B 1.5(0) 1.5(0) A 7(5) 7(5) 8(6) 13 B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 A Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5 72 75.5 79.5 Bore (mm) 20 25 32 40 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) MGQ 5.5(3.5)

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

B A B A B A B A B A B A B Hs Hs Hs Hs Ht Hs Ht Hs Hw Hs Hw 0 (0) 0 (0) 0 (2.5) 2 (6) 4 (7.5) 1 (0) 1 (0) 5.5 (1.5) 8.5 (4) 10.5 (6.5) 0 (0.5) 0 (0.5) 0 (3) 2.5 (6.5) 4.5 (8) 4.5 (1.5) 4.5 (1.5) 9 (5) 12 (7.5) 14 (10) 0 (2) 0 (2) 1 (4.5) 4 (8) 6 (9.5) 3 (0) 3 (0) 7.5 (3.5) 10.5 (6) 12.5 (8.5) 1 (4) 1 (4) 3 (6.5) 6 (10) 8 5 (2) 5 (2) 9.5 (5.5) 12.5 (8) 14.5 7.5 8.5 1.5 (0) 1.5 (0) 6 (2) 9 (

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

VEX1

R mm2 02 02 03 04 04 06 10 10 12 14 20 Port size Rc(PT) 1 11 2 1 4 11 4 1 2 1 8 1 4 1 4 3 8 1 2 1 2 3 4 There were not many appropriate large capacity 5 port valves of a closed center.

Electric Actuator Triple Axis P&P Unit

Minimum number of T nuts required for each stroke Stroke (mm) 100400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 Number of T nuts (pcs.) 8 10 12 14 16 18 20 Model LJ1-T8 (Weight: 8.4g) M8 x 1.25 17.5 7.5 15 The end cover must be removed when a T nut is inserted into the T slot. 18 11.5 M6 x 20 4 positions 45 10 T slots for mounting 9.4 4.5 T-slot size End cover A A A A 110 The A dimension

17

MY-SA 2 x G F 2 x H E C D A B Side support B MY-SB 2 x J MY1B MY1B MY1H E A B MY1B C D MY1M (mm) MY1C A 61 70 87 B C D E F G H J Part no.

Vacuum Unit Series ZK2

P Single unit Note 4) Vacuum pump system J N.C. None Note 5) Self-holding release valve linked For manifold Q R N.C. Note 7) N None None Silencer exhaust A Note 3) Only non-locking type is available for the manual override for K, J, R. Note 4) When J is selected for vacuum pump system, install a release valve or vacuum breaker.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

0.56 0.66 0.70 B 0.56 0.66 0.70 A 1.50 1.81 2.29 A 1.50 1.81 2.29 B 0.48 0.58 0.61 B 0.48 0.58 0.61 A 1.42 1.72 2.21 A 1.42 1.72 2.21 B 0.60 0.70 0.74 B 0.60 0.70 0.74 A 1.54 1.85 2.33 A 1.54 1.85 2.33 B 0.37 0.46 0.50 B 0.37 0.46 0.50 A 1.30 1.61 2.10 A 1.30 1.61 2.10 Bore Bore 075 (3/4") 106 (1 1/16") 150 (1 1/2") 075 (3/4") 106 (1 1/16") 150 (1 1/2") Mounting Height (NCDM) (in) D-C7 D-C80

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

switch 5 to 50C (No freezing) (Ex.)10-ARP30-02BE1 Bleed type Construction 0.2 0.5 Weight (kg) Note 3) 0.3 Note 1) When a product with backflow function (10-ARP20K to 40K) is chosen, set the inlet pressure 0.05 MPa or higher than the set pressure.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

switch 5 to 50C (No freezing) (Ex.)10-ARP30-02BE1 Bleed type Construction 0.2 0.5 Weight (kg) Note 3) 0.3 Note 1) When a product with backflow function (10-ARP20K to 40K) is chosen, set the inlet pressure 0.05 MPa or higher than the set pressure.