ZQ

Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions Note 1) The above dimensions are for ZZQ1-BSB.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Hirose Electric Company 2-M2.6 x 0.45 55 Socket side 1425 113 Terminal Nos. 47.04 How to Order Manifolds F 03 U K VV5Q 5 1 1 Option 08 Series Option None Exhaust cleaner for Rc1: D side exhaust Exhaust cleaner for Rc1 1/2: D side exhaust Exhaust cleaner for Rc1: U side exhaust Exhaust cleaner for Rc1 1/2: U side exhaust Symbol 5 VQ5000 Nil CD1 CD2 CU1 CU2 K Note3) Cable length Manifold type

Compact Vacuum Ejector Series ZQ

Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Note 1) The above dimensions are for ZZQ1-BSB.

Water-cooledThermo-chiller

16 Input signal Output signal Run/Stop signal 2 4.7 k 4 DIO REMOTE signal 1 4.7 k 17 DIO REMOTE signal 2 4.7 k 6 Operation condition signal Output signal 1 19 Warning signal Output signal 2 Circuit diagram Digital 7 circuit Fault signal Output signal 3 20 Remote signal Output signal 4 8 Temp Ready signal Output signal 5 15 Contact output COM Contact output COM 5 Alarm signal Alarm signal

Electromagnetic Digital Flow Switch

Note Panel mount adapter ZS-26-B With waterproof seal, mounting screw Front protective cover + Panel mount adapter ZS-26-C With waterproof seal, mounting screw Front protective cover only ZS-26-01 Separately order panel mount adapter, etc. Power supply/output connection lead wire ZS-40-W Lead wire length 2 m Sensor connector (e-con) ZS-28-C-5 1 pc.

48

Load voltage at OFF = Leakage current x 2 pcs. x Load impedance = 1 mA x 2 pcs. x 3 k = 6 V 12 Related Product RoHS For the 12 and 16 JMGP Speed Controller with One-touch Fitting Elbow Type for M3 AS121F-M3-A-X790 Metric size (Color: Light gray) Specifications Flow Rate and Sonic Conductance Inch size (Color: Orange) Model AS121F-M3Tubing O.D.

Cylinder

I z . oG I H K MM I [ flore size; I; # F' B C ~ (mm) . 5" 10" R 5" NN W S!

PS-OMH0005CN

) 48(ZS-26-D) 48 (ZS-26-D) () (ZS-26-01) (ZS-26-B) 90 IP65(48IP40) 1/41/2 0.58 mm -13No.PS-OMH0005CN-D 2 -14No.PS-OMH0005CN-D FG () AWG No.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

Lead Wire Clamp/Lead Wire Cap (Option) CNS Series Lead wire clamp LC-01 Lead wire cap LP-01 ML1C CLS Lead Wire Clamp/Lead Wire Cap (Option) (mm) CLQ 25 32 40 Mounting position Series Series Lead wire clamp Lead wire cap A 124.8 148.8 173.8 LP-01 ML1C LC-01 ML1C MLGP B 113.2 137.2 162.2 25 32 40 Series Mounting position RLQ ML1C 177.5 A 128.5 152.5 B 123.5 147.5 172.5 MLU Operating Range Minimum

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Lead Wire Clamp/Lead Wire Cap (Option) CNS Series Lead wire clamp LC-01 Lead wire cap LP-01 ML1C CLS Lead Wire Clamp/Lead Wire Cap (Option) (mm) CLQ 25 32 40 Mounting position Series Series Lead wire clamp Lead wire cap A 124.8 148.8 173.8 LP-01 ML1C LC-01 ML1C MLGP B 113.2 137.2 162.2 25 32 40 Series Mounting position RLQ ML1C 177.5 A 128.5 152.5 B 123.5 147.5 172.5 MLU Operating Range Minimum

ML1C

LP-01 ML1C LC-01 25 32 40 Series Mounting position A B ML1C 177.5 128.5 152.5 123.5 147.5 172.5 D-M5 D-M5W D-M5T Lead wire cap Lead wire clamp Auto switch 14 11 Lead Wire Clamp/Lead Wire Cap (Option) 22 22 B A Lead wire clamp Lead wire cap Series LC-01 LP-01 ML1C (mm) 25 32 40 Mounting position Series A B 124.8 148.8 173.8 ML1C 113.2 137.2 162.2 Minimum Stroke for Auto Switch Mounting Operating

ML1

40 Mounting position Series Series Lead wire clamp Lead wire cap A 124.8 148.8 173.8 LP-01 ML1C ML1C LC-01 B 113.2 137.2 162.2 25 32 40 Mounting position Series ML1C 177.5 A 128.5 152.5 B 123.5 147.5 172.5 4.7-11

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

VS3135 A01-01 A01-02 A07-52 q Description Electrical entry VS3145 Solenoid cover Body 100 VAC 200 VAC Grommet A12-01 A12-02 A08-52 w e Spool/Sleeve 24 VDC A01-01-63 A01-02-63 A07-52-63 100 VAC 200 VAC Conduit terminal 24 VDC A12-01-63 A12-02-63 A08-52-63 Replacement Parts Material Part no. VS3135 XT019-6 XT013-13-2 XT010-15 Description VS3145 No.

SMC CORPORATION OF JAPAN

The only time switch available to begin is TS #01. Press OK to display the option screen shown at right. EditData Edit the data for the time switch number shown in the top line. NewData Add a new time switch. Time switch numbers will increment from the highest current number. DelData Deletes a time switch. Higher numbered time switches will decrement.

Direct Operated Precision Regulator Modular Style Series ARP3000 1

Compatible with inlet supply pressure of 2.0 MPa Employs a handle shape for easy operation Compact type (face to face dimensions 35 mm, Ideal for discharge pressure adjustment on a overall length 80 mm) small compressor Piston type Ideal for pressure adjustment of air blowing 3 out ports for convenient use applications 14-4-61 2 Regulator for 2 MPa Series ARX20 How to Order ARX2 0 01

Series ZSE10(F)/ISE10 Digital Pressure Switch ®

adapter + Front protective cover M5 female thread/Rear ported D Note 3) M5R Piping port R1/8/Side ported 01 DIN rail adapter Note 5) R1/8 Piping adapter R Note 4) NPT1/8/Side ported N01 Note 3) Not available for piping specifications of 01 and N01.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Lead Wire Clamp/Lead Wire Cap (Option) CNS Series Lead wire clamp LC-01 Lead wire cap LP-01 ML1C CLS Lead Wire Clamp/Lead Wire Cap (Option) (mm) CLQ 25 32 40 Mounting position Series Series Lead wire clamp Lead wire cap A 124.8 148.8 173.8 LP-01 ML1C LC-01 ML1C MLGP B 113.2 137.2 162.2 25 32 40 Series Mounting position RLQ ML1C 177.5 A 128.5 152.5 B 123.5 147.5 172.5 MLU Operating Range Minimum

Refrigerated Thermo-chiller

Alarm code Alarm message Operation status Main reason 01 Liquid deposits in the base of this unit.

High Power Cylinder:

61.5 B 32 36 44 53 A 18 22 22 24 I 26 31 38 47 H2 8 8 9 11 Bore (mm) 20 25 32 40 WH S 192 193 195 201.5 Rc(PT) P 1/4 1/4 3/8 3/8 NN M22 X 1.5 M24 X 1.5 M30 X 1.5 M33 X 2.0 ND 15.0 19.6 19.6 25.4 MM M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 NF 13 17 17 22 K 5 5.5 5.5 7.5 NB 30 36.9 43.9 47.3 JD 30.5 25.5 28.5 23 NA 26 32 38 41 JC 43 39 36 32 NE 33.5 37 43.5 52.5 ZZ 252 257 265 277 N 22 27

Digital Flow Switch ( compatible)

Internal voltage drop K Key-lock function A function that locks the set buttons so that no accidental setting changes can be made. -15No.PF-OMZ0002-A Terminology Definition M The resolution of set and display values. If the minimum setting unit is 1 L/min, the flow can be displayed in 1 L/min units, i.e. 10, 11, 12.