checking . 4-4 4.4 Communication sequence . 4-7 4.5 Message configuration . 4-8 4.5.1 Message format . 4-8 4.5.2 Message example . 4-9 4.6 Function codes . 4-10 4.7 LRC . 4-10 4.8 Explanation of function codes . 4-11 4.8.1 Function code03 Reading multiple registers . 4-11 4.8.2 Function code06 Writing registers . 4-12 HRS Series HRX-OM-M091 Contents 4.8.3 Function code16 Writing multiple
(mm) Weight (g) A D M5 0.8 KGH04-M5 KGH04-01 14 13 9.5 8 17 22 4 4 2.4 9 16 5.6 1 4 KGH04-02 19.5 13.5 14 4 4 1 8 16 18 10 5.6 M5 0.8 KGH06-M5 KGH06-01 KGH06-02 14 3.4 16 14 15 18.5 17 11.5 18.5 22.5 23 4 10 12 14 1 8 1 4 6 13.1 13.1 17 3 8 KGH06-03 22 15.5 17 27 21 19 26 19 30 1 8 1 4 3 8 1 8 1 4 KGH08-01 KGH08-02 KGH08-03 KGH10-01 KGH10-02 24 20.5 15.5 26 27.5 28 26.5 22 30 33.5 14
) 01 02 01 02 300 (Lead wire length) 300 DIN terminal (D) VZ5140-D: With light/surge voltage suppressor 01 02 MAX. 10 Applicable cable O.D. 3.5 to 7 3-3-71 Series VZ5000 2 Position Double VZ5240 Grommet (G), (H) VZ5240G H 01 02 Manual override (Non-locking) (Mounting hole) (Lead wire length) G: 300 mm H: 600 mm (PE port) 3-Rc 1/8, 1/4 (1(P), 4(A), 2(B) port) 2-Rc 1/4 (5(R1), 3(R2) port) L
(mm) Weight (g) A D M5 0.8 KGH04-M5 KGH04-01 14 13 9.5 8 17 22 4 4 2.4 9 16 5.6 1 4 KGH04-02 19.5 13.5 14 4 4 1 8 16 18 10 5.6 M5 0.8 KGH06-M5 KGH06-01 KGH06-02 14 3.4 16 14 15 18.5 17 11.5 18.5 22.5 23 4 10 12 14 1 8 1 4 6 13.1 13.1 17 3 8 KGH06-03 22 15.5 17 27 21 19 26 19 30 1 8 1 4 3 8 1 8 1 4 KGH08-01 KGH08-02 KGH08-03 KGH10-01 KGH10-02 24 20.5 15.5 26 27.5 28 26.5 22 30 33.5 14
-06 AS121F-M5-07 1/4" M5 x 0.8 M5 x 0.8 13.5 11.7 18.3 23.1 7 13.5 12 18.1 6 11.6 22.9 AS121F-U10/32-06 AS121F-U10/32-07 1/4" 10-32UNF 10-32UNF AS221F-01-23 AS221F-01-01 1/8" 20.4 3.2 9.3 20.4 16 27.5 27.5 16 9.3 12.7 12.7 AS221F-01-04 AS221F-01-03 5/32" 4 20.4 27.5 27.5 20.4 17 9.3 9.3 14.2 13.4 13.4 17 12 12 AS221F-01-06 AS221F-01-05 35.2 30.2 32.1 13.5 27.1 3/16" 6 23.1 16.5 30.2 35.2
Rc 1/8 Body side VZA422-P-01 M5 x 0.8 0.53 0.17 2.2 0.49 0.17 2.0 N.O. Rc 1/8 Body side VZA414-1P-01 VZA414-1P-02 VZA414-2P-01 VZA414-2P-02 VZA424-1P-01 VZA424-1P-02 VZA424-2P-01 VZA424-2P-02 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Sub-plate side M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C.
Symbol Size 01 R1/8, Rc1/8 02 R1/4, Rc1/4 03 R3/8, Rc3/8 04 R1/2, Rc1/2 Thread connection Applicable tubing O.D.
G36-2-01 G36-10-01-L G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L Round type Pressure gauge Note 1) Attachments Round type (with color zone) Square Note 2) embedded type GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] Note 4) ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] Note 4)
Note 4) AS131FM(3.2, 4, 6, 1/8", 5/32", 1/4") AS231FM-01(3.2, 4, 6, 1/8", 5/32") is POM. AS131FM(3/16"), AS231FM(3/16", 3/8") is brass. !3 !2 q o !4 !7 !
1/8 1/4 10-SYJ72M 1/8 1/8 1/8 1/8 C6 C8 Type 10-SS3YJ7-40 Type 10-SS3YJ7-41 Base mounted for internal pilot 10-SYJ74M 1/4 1/4 Type 10-SS3YJ7-42-01 Type 10-SS3YJ7-42-C6 1/4 Type 10-SS3YJ7-42-C8 Note) The values are for individually operated 2 position type manifold bases.
Metric size Inch size Elbow type Universal type Port size 3.2 1/8" 5/32" 3/16" 5/16" 1/4" 3/8" 10 8 6 4 AS121FM-M5 AS131FM-M5 M5 x 0.8 AS221FM-01 AS231FM-01 R 1/8 AS221FM-02 AS231FM-02 R 1/4 AS121FM-U10/32 AS131FM-U10/32 10-32 UNF AS221FM-N01 AS231FM-N01 NPT 1/8 AS221FM-N02 AS231FM-N02 NPT 1/4 Specifications Speed control is easy, and uniform speed control is possible.
Model AS1ll1FS-M5l AS2ll1FS-01 AS2ll1FS-02 AS3ll1FS AS4ll1FS Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.
Flow Rate and Sonic Conductance AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Metric size 3.2, 4, 6 10, 12 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 Tubing O.D. 1/8", 5/32" 1/8", 3/16", 1/4", 1/4", 5/16", 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Flow rate (L/min (ANR)) 180 230 100 260 390 660 790 460 920 1580 1710 Controlled
Orifice symbol (Diameter) Solenoid valve (Port size) 1 (2 mm) 2 (3 mm) 3 (4.5 mm) 4 (6 mm) VXK21 VXK22 VXK23 Model 01 (1/8) 02 (1/4) Port symbol (Port size) 02 (1/4) 03 (3/8) 02 (1/4) 03 (3/8) Table (3) Rated Voltage/Electrical Option Model Part no. Table (4) Bracket Part No.
Note 4) AS131FM(3.2, 4, 6, 1/8", 5/32", 1/4") AS231FM-01(3.2, 4, 6, 1/8", 5/32") is POM. AS131FM(3/16"), AS231FM(3/16", 3/8") is brass. !3 !2 q o !4 !7 !
Model AS1ll1FSGl-M5 AS2ll1FSGl-01 AS2ll1FSGl-02 AS3ll1FSGl AS4ll1FSGl Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.
8 9.6 9.3 10.8 8 28.6 25.8 25 22.2 AS231F-01-23 AS131F-M5-07 3.2 17 8.4 24.4 1/4" M5 x 0.8 12 21.6 20.7 31.9 13.7 9.3 17.5 31.8 13.1 12.7 AS131F-U10/32-07 AS231F-01-04 4 9.3 24.9 1/4" 10-32UNF 12 (12.7) 18 14.2 32.1 27.1 31.1 36.1 1/8 ASF AS231F-01-01 AS231F-01-06 26.9 37.2 17 12.7 31.8 17.5 9.3 13.1 24.4 13.5 22.9 6 11.6 10.9 14 8.4 1/8" AS231F-01-03 AS231F-01-08 30.9 41.7 28.2 18.5 8 15.2
Series VQ1000 Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-76 P. 2-4-78 P. 2-4-80 P kit 2-4-4 Manifold Variations C S L Port size kit kit SUP EXH port Cylinder port Lead wire Serial transmission unit VQC P
100 200 205 Inch size M5 standard 1/8 standard 1/4 standard 3.2 23 04 06 08 01 03 05 07 09 1/8" 5/32" 3/16" 1/4" 5/16" 4 6 8 Use a 1/8" tube.
) . 4-1 4.2 Reading setting temperature . 4-1 4.3 Reading internal sensor . 4-2 4.4 Reading external sensor . 4-3 4.5 Reading alarm status . 4-3 4.6 Offset setting (without writing FRAM) . 4-5 4.7 Reading offset . 4-5 4.8 Temperature setting (with writing FRAM) . 4-6 4.9 Offset setting (with writing FRAM) . 4-7 4.10 Communication Format and Examples of Answers from Thermo-con . 4-8 5 MODBUS