15

60 M3 x 12 1.5 M6 x 60 5.2 14 18 NY M4 x 0.7 8 70 50 3.3 60 60 M4 x 12 3.6 M6 x 60 5.2 11 18 NX M5 x 0.8 8.5 63 40 3.5 63 60 M4 x 12 3.6 M6 x 60 5.2 9 5 NW M5 x 0.8 8.5 70 50 3.3 60 60 M4 x 12 3.6 M6 x 60 5.2 11 12 NV M4 x 0.7 8 63 40 3.3 63 60 M4 x 12 3.6 M6 x 60 5.2 9 5 NU M5 x 0.8 8.5 70 50 3.3 60 60 M4 x 12 3.6 M6 x 60 5.2 11 12 NT M5 x 0.8 8.5 70 50 3.3 60 60 M3 x 12 1.5 M6 x 60 5.2

REA/REB

Speed 600 mm/s 0.01 0.01 20 40 0 60 20 40 0 60 80 20 40 0 60 Moment (Nm) Moment (Nm) Moment (Nm) Vertical Operation Intermediate Stops The cushion effect (smooth start-up, soft stop) exists only before the stroke end in the stroke ranges indicated in the table below.

Battery-less

106 (170) L 86 A (Table traveling distance)2 86 62.4 88 [(90)]4 (90) [88]4 13 Stroke 90 Origin3 2 [(4)]4 (4) [2]4) [Origin]4 60 61 (8.5) 53.8 68 (68) 60 31 M4 x 0.7 thread depth 8 (F.G. terminal) 8 B D x 150 (= E) 8 15 60 6H9 ( ) depth 6 +0.030 0 150 Motor mounting position: Left side parallel LEFS40L 153 7 76 60 64 n x 6.6 Motor mounting position: Right side parallel LEFS40R 153 60 64 *

Digital Flow Switches

Pin description 1 DC(+) PF2W740 2 OUT2 3 DC() 120 60 1.6 17 67 6 4 OUT1 FLOW SWITCH U P 34 55 S E T 60 50 34 OUT1 OUT2 DOWN FOR WATER 34 2-Port size 4-4.5 50 40 (42.2) 73 34 Flow direction 20 Series PF2W Dimensions: Integrated Display Type for Water PF2W711 148 77 80 79 32 9 2 U P FLOW SWITCH SET 70 58 88 46 45 OUT1 OUT2 DOWN 2-Port size 45 4-5.5 36 (42.2) 60 46 Flow direction 21 Digital

2–4

65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 30 35 40 45 50 55 60 65 70 75 30 35 40 45 50 55 60 65 70 75 110 135 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 115 x 140 M6 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 120 x 145 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 110 x 135 M3 x 25 x 30 x 35 x 40 x

IDU/IDF

Dew point conversion chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 10 20 30 40 50 60 50 60 40 30 20 10 0 10 20 30 Atmospheric pressure dew point C 25 Series IDU/IDF Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

SQ1000/2000

SUP block plate (ordering not required) SUP block plate (ordering not required) Valve Valve Individual SUP spacer U side D side Valve 3 (R) 1 (P) 3 (R) 1 (P) 60 Approx. 9 Manifold block Electrical wiring is also connected to the manifold station with the individual SUP spacer.

ZP

Applicable pad 04S Applicable pad 06S Applicable pad 08S Applicable pad 10S Applicable pad 15S 60 70 60 60 60 4 4 4 4 4 1.5 1.5 1.5 1.5 1.5 4.1 0.8 1.5 2.5 4.1 6.1 3.1 1.6 4.1 10.1 6.9 4.9 2.1 3.9 10.9 Refer to pages 70 and 71 for adapter applicable to the ZP2 series. 30 Symbol/Type Heavy-duty Pad H: Heavy-duty (Flat with rib) HT: Heavy-duty (Thin flat with rib) Pad diameter 32, 150, 250

CG5-S

, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting Basic type Axial foot type Front flange type Double clevis type B L F D CJ5 L 16 S R 60 Without Auto Switch CDJ5 L 16 S R 60 H7BAL With Auto Switch With auto switch (built-in magnet) Number of auto switches 2 pcs. 1 pc.

EX120/121/122

EX9 EA 03 Mounting specification 03 04 Direct mounting DIN rail mounting EX9-EA03 EX9-EA04 66 66 Mounting hole for 2 x M4 12.5 60 12.5 10 10 60 13.2 13.2 18 6 75 75 18 6 1678 Series EX250 Integrated Type/ For Input/Output How to Increase Input/Output Blocks, Procedure Drawing u y t q e w r EX Parts List Note No. Description Part no.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

Without shims 600.05 With shims 60 Without shims 600.05 With shims 60 Without shims 900.05 With shims 90 Without shims 900.05 With shims 90 Without shims 900.05 With shims 90 Without shims 600.05 With shims 60 Without shims 600.05 With shims 60 Without shims 600.05 With shims 60 Without shims 600.05 With shims 60 Without shims 900.05 With shims 90 Without shims 900.05 With shims 90 Without

Rotary Table/

0 6 5 4 3 2 1 0 5 10 15 20 25 30 Load N Load N MSQ20 MSQB2A 300 100 MSQB20 (Basic type) Displacement m Displacement m 250 80 10 20 30 40 190 200 60 MSQA20 (High precision type) 40 0 0 10 20 30 40 50 10 8 6 4 2 Load N Load N MSQ30 MSQB3A MSQB30 (Basic type) 300 100 Displacement m Displacement m 250 90 200 80 50 130 150 MSQA30 (High precision type) 70 60 0 0 10 20 30 40 50 60 70 12 10 8 6

Thermo-dryer

Hz) 4.2 A 10 A 180/200 W 50/60 Hz 220 W 0.01 m (99.9% filtration efficiency) Particles of 0.3 m or more: 3.5 particles/L [ANR] or less Heater operation, PID control Singlephase 200 VAC (50/60 Hz) 2.1 A 5 A Singlephase 230 VAC (50/60 Hz) 2.1 A 5 A Singlephase 100 VAC (50/60 Hz) 9.4 A 15 A Singlephase 200 VAC (50/60 Hz) 4.8 A 10 A Singlephase 230 VAC (50/60 Hz) 4.8 A 10 A Power supply Note

Compressed Air Cleaning Filter Series

How to Order 03 ADM200 1 Thread type Operating time/Applicable compressor Nil N F Rc NPT G Nil 2 sec/min (1 time/min) /3.7 to 37 kW 4 sec/min (2 times/min) /37 to 75 kW 6 sec/min (3 times/min) /75 to 110 kW 8 sec/min (4 times/min) /220 to 370 kW 4 6 8 Port size Voltage OUT IN Symbol 04 03 100 VAC Hz 1 3 8 3 8 50 60 200 VAC Hz 50 60 240 VAC Hz 50 60 110 VAC Hz 50 60 220 VAC Hz 50 60 24 VDC

Compact Type

22 11 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 0.8 with depth 7.5 25 2-M6 1.0 73 29 87 71 27 13.5 60 35 6 12 4.5 30 12 14.5 46 70.5 9 2-M5 0.8 with depth 7.5 32 2-M6 1.0 94 37 100.5 92 35 17.5 75 45 8 16 4 30 16 18.5 56 80.5 10 Symbol Z Stroke 10.20 30.40.50 Bore size (mm) 75 100 15 20 25 32 25 35 45 55 30 40 60 60 30 40 60 60 40 50 70 70 13 Compact Type Dual-Rod Cylinder Series CXSJ Proper

SZ3000

SZ3 60 X90 Specifications Valve type Pilot type 2 position 5 port electrically activated valve Make entries in the same way as for standard models. Specifications and performance are the same as those of standard models.

VS 8-2/VS 8-4

Output circuit Surge voltage 24 V 0 V sol.1: Energized 60 V R Internal circuit Surge voltage 0V sol.2: De-energized 60 V R Surge voltage 24 V 0 V Large capacity Load: Energized 60 V R Relay Power supply circuit breaker 24 VDC Figure 1. Surge intrusion circuit example (NPN outlet example) Back page 4 5 Port Solenoid Valves Precautions 3 Be sure to read this before handling.

Compact Vacuum Unit

/ZB041 Exhaust Characteristics Flow-rate Characteristics (Supply pressure: 51 psi (0.35 MPa)) 0.53 14.5 14.5 (15) (100) (100) Vacuum pressure psi (kPa) Vacuum pressure psi (kPa) 0.42 11.6 11.6 (12) (80) (80) Air consumption Vacuum pressure 0.32 8.7 8.7 (9) (60) (60) 0.21 5.8 5.8 (6) (40) (40) 0.11 2.9 2.9 (3) (20) (20) Suction flow 0 0 0 14.5 (0.1) 29 (0.2)43.5 (0.3) 58 (0.4)72.5 (0.5) 87

PA3000/5000/PAX1000

per minute 1 60 = x x Reference life cycles Cycles per minute 1 8 (daily operating time) Service life 1 60 = 1 8 50,000,000 50 x x 2083 days = 27 Process Pump Common Precautions 5 Be sure to read before handling.

Air Management Hub, SENSOR, DIGITAL AIR FLOW, O24, 770.00000 lb