KRM

Such vessels require EC type examination and then CE marking. 15-18-6 SMC Product Conforming to International Standards national Standards you to comply with EC directives and CSA/UL standards.

Regulator for 2 MPa Series ARX20

Such vessels require EC type examination and then CE marking. 14-21-6 SMC Product Conforming to International Standards national Standards you to comply with EC directives and CSA/UL standards.

Table of Contents

20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

HRX-OM-W038

0.0 5 0 10 20 30 5 0 10 20 30 Circulating fluid flow[L/min] Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS040--20-(BJM)) 9.6.2 HRS040--20-T,-MT 0.5 50 Available area 0.4 40 Circulating fluid pressure[MPa] Pump head[m] Outlet50Hz Outlet:60Hz 0.3 30 0.2 20 0.1 10 Return port Available area 0 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-8 Pump capacity(HRS040--20-T/-MT)

HRX-OM-W058

-R . 9-6 9.4 Cooling capacity . 9-7 9.4.1 HRS018-A-20--R . 9-7 9.4.2 HRS030-A-20--R . 9-7 9.5 Heating capacity . 9-8 9.5.1 HRS018-A-20-R, HRS030-A-20-R . 9-8 9.6 Pump capacity. 9-9 9.6.1 HRS018-A-20-R, HRS030-A-20-R . 9-9 9.6.2 HRS018-A-20-T-R, HRS030-A-20-T-R . 9-9 9.7 Compliance . 9-10 9.8 Sample DoC. . 9-11 9.9 Daily Check Sheet . 9-12 Chapter 10 Product Warranty . 10-1 HRS-R Series HRX-OM-W058

SZ3000

(up to 24 solenoids possible) 20 20 20 stations 20 stations Connector mounting position Mounting position Symbol D PG: Flat cable connector (20 pins) PH: Flat cable connector (10 pins) D Side Note Symbol 02 Note Symbol 02 Stations Stations 2 stations 2 stations ... ... ... ...

LEC-OM02704CN

DC24V 2. 20 3. 4. 5. 6. 7. 8.

2–4

2 pcs. 5 10 15 15 20 20 25 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 25 15 Besides the models listed in How to Order, the following auto switches are applicable.

CQM

Mounting Bolt for CQM/Without Auto Switch Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt CQMB12-5 -10 -15 -20 -25 -30 CQMB16-5 -10 -15 -20 -25 -30 CQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB32-5 -10 -15 -20 -25

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

(up to 24 solenoids possible) D side 20 20 20 stations 20 stations Connector entry direction PG: Flat cable connector (20 pins) PH: Flat cable connector (10 pins) 1: Perpendicular connector 2: Lateral connector Note Symbol 02 Note Symbol 02 Stations Stations 2 stations 2 stations Double wiring specification Double wiring specification ... ... ... ... 09 10 04 05 9 stations 4 stations 10 stations

HRX-OM-X027

THERMO CHILLER HRS050-A-20-R Model Number POWER SUPPLY SERIAL No. XQ001(MAR.2019) Serial Number (SERIAL No.)

HRX-OM-M005

Use assistance to carry object over 20 kg.

HRX-OM-I051

(See Appendix 8.4 Offset Function in Chapter 8 for details.) 4 OFFSET OFF, MODE1, MODE2, MODE3 HRZ-L: -20 to 45C HRZ-L2 : 10 to 45C HRZ-H: 20 to 93C HRZ-W: -20 to 93C Issues an alarm of Reservoir High Temp WRN if the circulating fluid exceeds the set temperature. 5 HIGH TEMP Issues an alarm of Return Low Flow WRN if the circulating fluid does not reach the set flow rate.

VQ7-6/7-8

Features 2 " TUV Approved Product Conforms to standards necessary to satisfy EC directives. BAUART GEPRUFT " TYPE APPROVED " TUV Rheinland " The VQ7-6/7-8 series has received approval from TUV Rheinland, an EC Notified Body (EC authorization No. 0197), for conformity to DIN VDE0580: 1994 Standards. " When ordering TUV approved products, add " Q" at the end of the standard part number.

“

are used 200 200 When 20 units are used Approx. 100% reduction Current model IR3000 Series Approx. 100% reduction 49000 yen reduction 150 150 128000 yen reduction Current model IR1000 Series IR2000 Series 100 100 IR1200-A Series IR2200-A Series 50 50 IR3200-A Series 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Units used Units used Bleed air 0 IR No fixed throttle in the new design.

Refrigerated Air Dryer

Note 4) Option H (Auto-drain bowl type: Metal bowl) is only applicable to the IDFA6E-20.

HRX-OM-K003

Table 8-7 Compliance EMC Directive 2004/108/EC Low Voltage Directive 2006/95/EC CE Marking Machinery Directive 2006/42/EC SEMATECH S2-93, S8-95 SEMI S2-0703, S8-0701, F47-0200 UL E229305 / UL1995 8.7 Compliance HRW Series 8-14 HRX-OM-K003 Chapter 8 Appendix 8.8 Thermo Chiller Daily Inspection Sheet Serial No. Model: Judgment Circulating fluid supply port cap Looseness IN press.

A

TYPE APPROVED TV Rheinland Grommet Type D DIN terminal Type Y DIN terminal G D Y Indicator light Surge voltage suppressor Series AV has received approval from TV Rheinland, an EC Notified Body (EC authorization number 0197), for conformity to DIN VDE0580: 1994 Standards.

Soft Start-up Valve AV2000/3000/4000/5000 1

BAUART GEPRFT Electrical entry TYPE APPROVED Grommet Type D DIN terminal Type Y DIN terminal G D Y TV Rheinland Light/Surge voltage suppressor Series AV has received approval from TV Rheinland, an EC Notified Body (EC authorization number 0197), for conformity to DIN VDE0580: 1994 Standards.

Soft Start-up Valve AV2000/3000/4000/5000

TYPE APPROVED TV Rheinland Grommet Type D DIN terminal Type Y DIN terminal G D Y Indicator light Surge voltage suppressor Series AV has received approval from TV Rheinland, an EC Notified Body (EC authorization number 0197), for conformity to DIN VDE0580: 1994 Standards.