Low Profile Slide Table Series MXF

(N) Load (N) Load (N) MXF20 MTS Lr = 50 mm 0.10 0.06 0.28 Table displacement amount (mm) Table displacement amount (mm) MXF20-100 MXF20-100 Table displacement amount (mm) 0.24 0.08 MXF20-100 MXF20-75 MXF20-50 MXF20-30 MXF2075 0.20 0.06 0.04 0.16 MXF2050 MXF2075 0.12 MXF2030 0.04 0.02 MXF2050 0.08 MXF2030 0.02 0.04 50 100 150 40 80 120 240 200 160 200 50 100 150 200 0 0 0 Load (N) Load (N

VQ7-6/7-8

94 180.5 175.5 (3 position) 4n-3/8, 1/2 180.5 175.5 (3 position) Bottom ported drawing 183.5 171.5 139 14 12 P PB PA 80.5 4-1/8 67 R2 R1 40(41.5) (Pilot pressure EXH port) 1 3 5 SMC 6-1/2, 3/4 32(35) 32(35) 35 35 L Dimension Formula L n 10 9 8 7 6 5 4 3 1 2 P , R1, R2 port n: Stations L1 = 56n + 64 L2 = 56n + 80 n: Stations L1 = 56n + 90 L2 = 56n + 106 L1 624 568 512 456 400 344 288 232 120

17

120 200 200 200 200 300 300 15 17 29 29 25 27 39 39 60 60 77 77 105 105 117 117 167 167 23 24 28 34 3 3 3 4 3.5 3.5 3.5 4.5 10 10 12 12 5 5 17 17 (mm) MGPL (Ball bushing) MGPA (High precision ball bushing) A, DB, E Dimensions (mm) MGPM (Slide bearing) A, DB, E Dimensions A E DB Bore size (mm) A E DB Bore size (mm) 50 st or less 60.5 64.5 77.5 77.5 Over 50 st 100 st or less Over 100 st

OMR0032

Turn ON No. 3 and No. 6, and (c) Differential input R3 = 120 turn OFF the others. ON ON ON 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 (a) Open collector input (24 V) (b) Open collector input (5 V) (c) Differential input 36 - (4) Pulse input circuit example i.

Clean Gas Filter

2) SFA102SFA202SFA302 Connection Model (A) (B) SFA102-02 Tube 89 76 TSJ1/4 SFA202-02 Swage 93 96 SFA302-02 Joint 101 120 ()Reference dimensions 3) SFA103SFA203SFA303 Connection Model (A) (B) SFA103-02 Union 117 76 UOJ1/4 SFA203-02 O Ring 122 96 SFA303-02 Joint 130 120 ()Reference dimensions -8- 3.

EXxx-OMZ0016

(Wch: 112-119) 19 Remote registration information (Wch: 8-15) Remote registration information (Wch: 1-7)*1 20 Remote registration information (Wch: 24-31) Remote registration information (Wch: 16-23) 25 Remote registration information (Wch: 104-111) Remote registration information (Wch: 96-103) 26 Remote registration information (Wch: 120-127) Remote registration information (Wch: 112-119

Sine Rodless Cylinder Series REA/REB

RHC W Z tb T TT ta S Q QW RW PW Model PB REAL15 REAL20 REAL25 REAL32 REAL40 112 0.5 1.0 92 22.5 15 77 12.5 30 70 95 90 RZQ 117 130 16.5 25.5 88 105 40 28 120 90 130 0.5 1.0 127 25.5 22 88 16.5 50 100 130 105 157 149 1.0 18.5 28.5 0.5 102 121 60 33 160 120 D194 1.0 1.0 187 35.5 35 138 20.5 84 140 190 159 -X Individual -X 975 Series REAL Auto Switch Proper Mounting Position (Detection at

MHF2

When using, refer to page 471 for auto switch hysteresis. 452 Low Profile Air Gripper Series MHF2 Specifications Fluid Air 8: 0.15 to 0.7 MPa 12 to 20: 0.1 to 0.7 MPa 10 to 60C (with no condensation) 0.05 mm Note 1) Operating pressure Ambient and fluid temperature Repeatability 120 c.p.m. 120 c.p.m. 60 c.p.m.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

221 16 16 16 12 15 15 44 50 56 138 150 171 4 5 5 1/4 1/4 1/4 to 1000 to 1000 to 1000 3 Non-rotating Double Power Cylinder Series MGZ Dimensions with Mounting Brackets Transaxial foot type (L) 4-LD through LY LH LT X/2 X X LS + Stroke Y LX ZZ + Stroke LZ (mm) Stroke range Bore size (mm) LS ZZ X LD Y LH LT LX LY LZ 40 50 63 138 148 165 190 210 236 9 11 13 34 40 47 19 22 24 80 96 110 100 120

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

External gripping force Internal gripping force MHS2-32D MHS2-32D 150 150 Pressure 0.6MPa Pressure 0.6MPa 120 120 0.5MPa 0.5MPa Gripping force N Gripping force N 0.4MPa 0.4MPa 90 90 0.3MPa 0.3MPa 60 60 0.2MPa 0.2MPa F 30 30 0.1MPa 0.1MPa 0 0 10 10 20 20 30 30 40 40 50 50 F Gripping point L mm Gripping point L mm MHS2-40D MHS2-40D 250 250 Pressure 0.6MPa Pressure 0.6MPa 200 200 External gripping

Dedicated Controller Series LC1 Uniaxial Type

Note 2) The power supply for model LC1-1B3H2 is 200VAC, 50/60Hz. 52 Dedicated Controller Series LC1 Performance/Specifications General specifications Model LC1-1B1 LC1-1B2 Item 100V/110VAC10% 50/60Hz 200V/220VAC10% 50/60Hz (LC1-1B3H2 is 200VAC10%) Power supply 5mA or less Leakage current 80 x 120 x 244mm Dimensions 2.2kg Weight Single unit installation type (resin housing) Housing type Actuator

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Also available without switch rails and magnets. 110 120 Shown without switch rails and magnets 130 140 150 160 170 Can be mounted from three directions. Highly flexible mounting Work piece mounting taps 1. Using table top taps 2. Using table side taps 1. Using tapped holes 2. Using through holes 3.

LX Series Compact Electric Actuators

Without brake C section details Cross section BB l\rodel D F L 1 5 4 231 LXPB B-50 L X P B B . 7 5 173 256 52 L X P B _ B _ 1 0 0 204 281 246 323 LXPB B -.125 L X P B B 1 5 0 271 348 120 90 L X P B _ B _ 1 7 5 296 373 LXPB_B_-200 321 394 ?$rc zs S8[i8$ [10 Camraclnectl' 0i|llomiom $lift $crExi tlE LXPB S With brake I I shows the localion at which origin point swiich operates.

Guide Table Series MGF

through K 40 3.5 100 120 114 8.7 6-K (6 places) 57 114 5 Guide Table Series MGF 63 MGF63 Scale: 40% 4-M10 x 1.5 through 140 160 120 11.5 48.5 + Stroke 10 60 + Stroke 20 9 2-Rc 1/4 port for extending cylinder Breathing hole for guide (with element) When the cylinder is extended 46 Port for retracting cylinder 4-M10 x 1.5 through M6: T-slot for hexagon bolt K 50 140 160 146 4 11 6-K (6 places

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Manifold Series SY3000/5000/7000 Weight Tables Series SY7000 Series SY3000 Weight g Port size Weight g Port size L type, M type plug connector Valve model Type of actuation Grommet type L type, M type plug connector A, B Valve model Type of actuation DIN terminal Grommet type A, B Single 43 47 2 position Double Single 58 65 97 101 124 2 position SY360--M5 M5 x 0.8 Closed center Double 113 120

5 Port Solenoid Valve SY Series

-M(-F2) 3 4 5 SY5 20-D(-F2) 3 4 5 SY5 20-W0(-F2) 3 4 5 C4, N3 C6, N7 C8, N9 C4, N3 C6, N7 C8, N9 C4, N3 C6, N7 C8, N9 C4, N3 C6, N7 C8, N9 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 60.9 157.8 Max. 10 53.4 12.7 28.1 [35.1] 42.1 27 32.6 M8 x 1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 63.5 [65.7] 53.7 [55.9] 73.5 72.6 62.6 55.2 67.8 48.7 45.3 32.7 139.6 [144] 120

Precision Clean Regulator Series SRP

140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR)

Moisture Control Tube

D X IDK02-100 IDK02-200 IDK04-100 IDK04-200 IDK06-100 IDK06-200 100 200 100 200 100 200 120 220 140 240 140 240 2 x 1.2 D 4 x 2.5 Inner sleeve 6 x 4 Note) Dimensions at 40% relative humidity. Dimensions may change if the relative humidity changes.

Ionizer Nozzle type IZN10 Series IZS

(load current at 40 mA) Error signal Output signal Maintenance detection signal Effective static neutralization distance 20 mm to 500 mm 0 to 55C Ambient and fluid temperature Ambient humidity 35 to 65%Rh Housing: ABS, Stainless steel Nozzle: Stainless steel Emitter: Tungsten Material Vibration resistance Durability: 50 Hz, Amplitude: 1 mm, XYZ each 2 hours Impact resistance 10 G Weight 120

Dedicated Controller

For ordering information, refer to the option part numbers on page 82. 74 3 Controller Series LC1 Performance/Specifications General specifications Model LC1-1H1 LC1-1H2 Item 100/110V AC 10%, 50/60Hz (100V AC, 50/60Hz for LC1-1HV1) 200/220V AC 10%, 50/60Hz (200V AC 10% for LC1-1H32) (200V AC, 50/60Hz for LC1-1HV2) Power supply Leakage current 5mA or less Dimensions 80 x 120 x 244mm Weight