LEC-OM02904

H T E ()L d W D T Max.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Unit: g Model D-M9N D-M9B D-M9P 0.5 8 7 8 Lead wire length m 3 41 38 41 Auto Switch Dimensions Auto Switch Internal Circuit D-M9 M2.5 x 4l mounting hole Slotted set screw Indicator light D-M9B, N, P D-M9N DC(+) Brown 2.6 Main circuit of switch Main circuit of switch Main circuit of switch OUT Black 2.7 2.8 4 22 DC(-) Blue 3.2 D-M9N, P (3-wire) D-M9P Most sensitive position 6 DC(+) Brown 22

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Q P R O D U C T S Q Q Q Q Q Q 3 Q Q 3 Port 100/200/300 Series VQZ Base Mounted & Body Ported High speed and Long life. Response time Life VQZ100 10ms VQZ200 12ms 200 million cycles VQZ300 15ms Dispersion accuracy 2ms * Life: Metal seal type * Response time: Metal seal, single solenoid with light and surge voltage supressor.

Heavy Duty Stopper Cylinder

Note 5) Dimensions other than those marked (LA) are the same as the basic type (no locking type). 598 RS2H Series Auto Switch Mounting 1 Auto Switch Proper Mounting Position (Detection at Stroke End) D-M9 D-M9W D-M9AV D-M9V D-M9WV D-M9A D-A9 D-A9V A B Auto switch Auto Switch Proper Mounting Position (mm) Auto switch model D-M9 D-M9W D-M9AV D-M9V D-M9WV D-M9A D-A9 D-A9V A 9.0 B 23.5 A 11.0

Water-cooledThermo-chiller

/200 to 208 VAC 10% Power supply Max. operating current (A) 26 Breaker capacity (A) 30 Communications Serial RS-485 (D-sub 9 pin) and Contact input/output (D-sub 25 pin) W15 in (380mm) x D 26.2 in (665mm) x H33.9 in (860mm) Dimensions Note 9) Weight Note 10) Approx. 198 lbs (90 kg) Safety standards UL, CE marking, SEMI (S2-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95) Note 4) The capacity

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

CC-LINK System PROFIBUS-DP (COM) DI unit (For input) M12 8 number of inputs U D U D U D U D U D U D U D U D U D U D U D U D U D U D U D U D EX323 -S001 EX123 -SMB1 EX124 -SMB1 EX123 -STA1 EX123 -SSH1 EX123 -SUW1 EX124 -SAB1 EX123 -SUH1 EX123 -SSL1 EX123 -SSL2 EX123 -SFU1 EX124 -SDN1 EX124 -SCS1 EX124 -SCS2 EX124 -SJN1 EX124 -SMJ1 EX240-SDN2 EX240-SPR1 EX240-IE1 Dedicated output model For

AC Servo Motor Driver (CC-Link Type)

Power supply is 1-Phase 200 VAC Trouble OFF ON RA MC Emergency stop MC SK (Note 6) Driver Servo motor Servo amplifier (Note 7) MCCB CNP1 MC NFB 1-phase 200 to 230VAC L1 CNP3 (Note 5) U L2 U Motor V L3 V [1] M W N W P3 P1 (Note 1) P2 P4 PE CNP2 P [2] [3] (Note 2) C D Encoder CN2 (Note 3) Encoder cable L11 L21 [1] Power supply input terminal: Supply specified power supply. [2] Connect the motor

Ejector Valve Unit, Series ZYY/ZYX

degrees 3 turns 200 degrees 3 turns 200 degrees 200 degrees 17mA or less (when 24VDC is ON) 25mA or less (when 24VDC is ON) 17mA or less (when 24VDC is ON) Current consumption 0.2MPa {2.1kgf/cm} Max. operating pressure Note 1) When using an ejector, there is no problem if pressure of 0.5MPa {5.1kgf/cm} is applied for 1 second or less.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

For sub-plate, manifold type 40, 41, 42 P, E port R port Port size 3:Common exhaust type for main and pilot valve Nil: Without sub-plate D: Push-turn locking slotted type P, E port R port Electrical entry (With gasket and screws) 24, 12, 6, 5, 3 VDC 100,110, 200, 220 VAC Grommet L plug connector M plug connector 24,12 VDC 100,110, 200, 220 VAC DIN terminal 24, 12, 6, 5, 3 VDC M8 connector

Guide Table Series MGF

MGF 40 MGF 63 30, 50, 75, 100 MGF100 Minimum Strokes for Mounting Auto Switches (mm) Switch type D-Z7, D-Z8 D-Y5, D-Y6, D-Y7 Number of pcs. 10 5 1 pc. 15 10 2 pcs.

OMR0032

Controller USB cable Communication 120.3 120.3 mm mm 200 200 mm/s mm/s (type A to mini-B) cable 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN3 PC (PC is prepared by the user.) 20 - 4.4 CN4: Counter connector (option) Connect the controller to the Multi-counter (CEU5) using the counter cable (LATH3-). Refer to section 6.2 Counter plug wiring (P.24).

DOC1001322

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-27 DOC1001322 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Ejector Valve Unit Series ZYY/ZYX

, no output, 200 degree setting 55 Types LN and MN are equipped with sockets (2 pcs.).

Short Stroke Electric Actuator Series LX

D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL N.O.

Compact Guide Cylinder

D-G

ITV

Nil U 6 (Light gray) 1/4" (Orange) D side 1 2 3 Note) A DIN rail with the length specified by the number of stations is attached to the manifold.

3 Port Solenoid Valve Series VQ100 1

Enter in order starting from the first station on the D side.

3 Port Solenoid Valve Series VQ100

Enter in order starting from the first station on the D side.

3 Port Solenoid Valve Series VQ100 1

Enter in order starting from the first station on the D side.

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

IP63, JIS C 0920 Rainproof construction Except solid state switch with timer (D-M5TL, G5NTL/F7NTL/F5NTL) and magnetic resistant 2-color indication type solid state switch (D-P5DWL). D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).