Process Valve Series VNA

G (Grommet terminal: E) H (Conduit terminal: T) I (DIN terminal: D) In the case of EZ or TZ, the length is longer by 10 mm.

JXCx-OMT0002

(1) Controller setting . 25 (2) PLC set up . 25 (3) LED Display . 25 3.10 Operation test by PLC . 25 4.

10

R R: Gripping point distance [mm] 6 MHL2 Series Construction 10 16 to 25 e r t u w y @4 @0 @1 @2 !7 !5 !8 @3 !3 e o i q @6 @7 @3 @5 !9 !0 !2 !1 !6 !4 Component Parts No. Description Material Note 1 Body Aluminum alloy Hard anodized No.

ZPT/ZPX

Hexagon width across flats 24 25 G Width across flats 37 45 45 4-M4 x 0.7 4-M4 x 0.7 E 10 10 G Width across flats 37 F F E Y Y 8 8 34 34 C C A A B D B D Dimensions Dimensions (mm) (mm) Model Model B A B C D E F G Y A C D E F G Y ZPT63HB-A16 ZPT63HB-B8 63 65.1 45.5 67.6 31.5 43 73 21.5 M8 x 1.25 ZPT80HB-A16 -B10 80 83 58.4 85.1 37 48.5 78.5 27.5 M10 x 1.5 63 65.1 45.5 67.6 31.5 43 21.5 -B12

MK

Note 3) When the rod is extended, the clamp stroke and rotary stroke are added to the appropriate dimensions. 4.1-18 Rotary Clamp Cylinder/Heavy Duty Series MK2 32, 40, 50, 63 MK/MK2 RSQ/RSG RSH CE1 CE2 ML2B Rear flange With arm Model E D C B G A C F A B F G D E Model ML1C 39 46 58 57.5 45 45 65 65 20 20 22 22 67 67 88 88 18 18 22 22 48 54 67 80 5.5 5.5 6.6 9 8 8 9 9 65 72 89 108 25 25 40

Intrinsically Safe Valve

: Black () 4 A 2 B 28.5 PE A B Insulator: Red (+) X EB 3 P 1 EA 5 96.5 27 57 47 25 76.5 194.2 1/8" (Pilot EXH port) L (Lead wire length) 0.3 mm2 1.55 34.5 80.5 (E-type) 17.5 29.5 29.5 44.5 5 x 3/8", 1/2" (Piping port) 03 04 L-type plug connector with cover (LL) 53-SY9240-LLL (Lead wire length) 184 Insulator: Red (+) Insulator: Black () 0.3 mm2 4.1 5.9 51.2 (92) 03

IZx-OMX0087

Flow rate : 180L/min 75 50 25 0 25 50 75 Installation distance from ionizer to workpiece [mm] 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm ionizer to workpiece [mm] Installation distance from mm 200 200 20m/s 400 400 2m/s 20m/s 2m/s 600 600 10m/s 800 800 10m/s 5m/s 1000 1000 1200 5m/s 1400 5-4.

Cylinder with Lock

f l 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 32 54 36 23 12.5 25 37.5 50 75 100 125 150 175 40 56 41 23 12.5 25 37.5 50 75 100 125 150 175 200 50 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 63 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 80 68 56 29 12.5 25 37.5 50 75 100 125 150

IZx-OMT0049

. error code or Note73) Continue (ON) Green Green Green Note65) Note72) Blue (ON) E 8 E 9 Error signal (ON) (ON) (ON) OFF (B contact) Green Green (ON) OFF OFF Maintenance When static neutralization performance is reduced due to contamination, wearing or breakage of emitters.

JXCx-OMT0001CN

No.JXC-OMT0001CN-C 4 TM) (EtherNet / IP // JXC93 Series 1. . 5 2. . 7 2.1. . 7 2.2 . 8 2.3 . 9 3. . 10 3.1 . 10 3.2 . 11 3.3 . 11 3.4 . 11 3.5 . 11 1 . 11 (2) . 12 (3) . 13 3.6 . 14 1 . 14 (2). 17 (3) . 19 3.7 JOG . 20 (1) . 20 2 . 21 (3) JOG . 22 3.8 . 23 (1) . 23 (2) . 23 3 . 24 (4) . 24 3.9 EtherNet/IP . 25 (1) . 25 (2) PLC . 25 (3) LED . 25 3.10 PLC . 25 4. . 26

PSxx-OMV0008CN

ON/OFF (34 ) ON/OFF 34 85 85 ON OFF Hysteresis / () () 25[]ON-OFF -12No.PS-OMV0008CN-E NPN () () ON ON 0 34 ON-OFF ON () (P1L~P1H)ON (34 ) () digit () () SI ON/OFF ON-OFF / ON/OFF 90 ON -13No.PS-OMV0008CN-E ON () (n1L~n1H)ON (34 ) 34 (0FF)(ON)(OFF)(ON) () 5%R.D.(5%) (0~1MPa 0.001MPa 1/1000) () () F () ripple -14No.PS-OMV0008CN-E ( M46L(2)) 0.760.1 Nm A(ZS-

5 Port Solenoid Valve, Series VQC

Refer to e.

Slider Type/Ball Bushing Bearing

Fig. (1) Correct position Fig. (2) Incorrect position Example of 15 with holding force type L D-X Technical Data 1521 A Linear Guide Type CY1H Series Single Axis Type: 10, 15, 20, 25/Double Axis Type: 25, 32 CY3B CY3R CY1S CY1L CY1H CY1H CY1F CYP D-X Technical Data 1523 CY1H Series Model Selection Operating Conditions E: Kinetic energy of load (J) W V 2 E = () 2 1000 W: Load mass (kg)

100

6 @2 r y w t e t @2 u i !0 @0 !5 y !9 ZL6 Without valve or pressure switch, Silencer exhaust ZL6 With valve and pressure switch, Port exhaust @1 !2 !3 !1 !6 !8 !7 q !4 r y w t e t u i @0 !5 y !9 Component Parts No. Description Material Note No.

51

Series Bore size (mm) Action Rod Mounting 20 25 to 200 D-M9(W), D-A90 Basic, Foot, Double acting Single rod 25 to 300 CG3 25 to 63 Flange, Clevis 80, 100 D-G5(W), D-K59(W), D-B64 For the trunnion type, please contact SMC sales representatives. 364 Air Cylinder Short Type Standard: Double Acting, Single Rod CG3 Series 20, 25, 32, 40, 50, 63, 80, 100 RoHS CJ1 How to Order CJP CJ2 L 25 CG3

VQ7-6/7-8

(X port) 25 (X port) 5 3 37 5 3 37 22 22 14 14 1 1 25 25 25 25 X(PE) port 1/8 R1, R2 port 2-3/8 1/8 P Port 1/4, 3/8 R1, R2 port 2-3/8 P port 1/4, 3/8 X(PE) port 3-10-9 10 Series VQ7-6 Construction DIN Terminal Type Metal seal type Rubber seal type VQ7-6-FG-SVQ7-6-FG-S-R o o t r u t r u w y e q w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

MNB

8.5 9 M18 x 1.5 3/8 55 58 23 12 61.5 321 80 157 26 M10 x 1.5 5 10 38 245 10.5 11.5 M22 x 1.5 3/8 61 72 33 14 69.5 341 100 177 26 M10 x 1.5 5 10 38 265 10.5 17 M26 x 1.5 1/2 68 72 37.5 15 With rod boot (mm) 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400

C95Series

Bore si~e ~ Standard stroke (mm) .

Mechanically Jointed Rodless Cylinder Series MY2

EA 8.5 13 S 67.3 73.2 EC 9 13.5 EY 36 56.5 FA 56.4 67.8 h 6 6 T 12 15 TT 7.1 (Max. 18.6) 10 (Max. 26) W 25.8 38 E 17.5 25 Shock absorber model RB1412 RB2015 -X Individual -X Technical data 1103 Series MY2C Side Support Side support MYC-SA G 2 x H C B A F E D A 60.6 95.9 121.5 B 64.6 97.5 121.5 C 70.6 107.9 134.5 H 3.4 4.5 6.6 E 15 25 45 F 26 38 64 G 4.9 6.4 11.7 D 77.2 115.5 145.5 Model

VQ7-6/7-8

(X port) 25 (X port) 5 3 37 5 3 37 22 22 14 14 1 1 25 25 25 25 X(PE) port 1/8 R1, R2 port 2-3/8 1/8 P Port 1/4, 3/8 R1, R2 port 2-3/8 P port 1/4, 3/8 X(PE) port 3-10-9 Series VQ7-6 Construction DIN Terminal Type Metal seal type Rubber seal type VQ7-6-FG-SVQ7-6-FG-S-R o o t r u t r u w y e q w y e q VQ7-6-FG-DVQ7-6-FG-D-R o o t r u t r u w y e q w y e q FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-