RQ

Bore size (mm) C1 H1 L1 X 32 40 50 20.5 23.5 M14 x 1.5 28.5 20.5 23.5 M14 x 1.5 28.5 26 28.5 M18 x 1.5 33.5 Basic Style A B C D E F H I J K L M N Bore size (mm) 32 40 50 Stroke range (mm) 20 to 100 44 37 13 16 45 18.5 M8 x 1.25 60 4.5 14 7 34 5.5 20 to 100 51 44 13 16 52 20 M8 x 1.25 69 5 14 7 40 5.5 30 to 100 57.5 49.5 15 20 64 28.5 M10 x 1.5 86 7 17 8 50 6.6 OB P Q RB S U Z Bore size (

Electric Actuator / Low profile slider type

( (L Li in ne ea ar r g gu ui id de e ( (L Li in ne ea ar r g gu ui id de e s si in ng gl le e a ax xi is s t ty yp pe e) ) d do ou ub bl le e a ax xi is s t ty yp pe e) ) LECP Series This manual describes the actuators operation in combination with the LECP6 series controllers.

Electromagnetic Digital Flow Switch

to 600 Accumulated pulse output wiring examples NPN 2 output type LFElAlll NPN + Analog output type LFElClll/LFElDlll Max. 28 V, 80 mA Black OUT1 Load White OUT2 (LFE A only) Load 0 V or Blue DC () 50 ms 50 ms PNP 2 output type LFElBlll Brown DC (+) Black OUT1 Max. 80 mA Load White OUT2 0 V or Load 50 ms 50 ms * When accumulated pulse output is selected, the indicator light is turned off

76

Dimensions [Separately installed power transformer] C E IDF-TR7000-8 G B D 4 x F A Specications/Dimensions in (mm) Transformer Applicable dryer Capacity Type Inlet voltage Outlet voltage A B C D E F G Weight 14.2 (360) 21.3 (540) 15.7 (400) 10.2 (260) 11.8 (300) 0.43 (11) 1.18 (30) 207 lb (94 kg) IDF-TR7000-8 IDF100FS 7 kVA Three-phase Compound winding 220, 240 380, 400, 415 440 V (50/60

Thermo-dryer

E IDH4 or IDH6 are selected from Data .

High Vacuum L Type Valve

Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.

VQZ1000/2000/3000

Yes Note) None Note) Yes Yes (W/o indicator light) Yes (W/o indicator light) Note) Note) Coil voltage Note) 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note) DIN is applicable to VQZ2000/3000. Bracket Assembly Note) Part no.

SQ1000/2000

): SQ1241 Double (latching): SQ1240 t e q w t e q w SQ1241 SQ1240 (A)(B) (A)(B) 4 2 4 2 5 1 3 5 1 3 (R1) (P)(R2) (R1)(P)(R2) Double (double solenoid): SQ1241D Double (double solenoid): SQ1240D y e e q w y e q w e SQ1240D SQ1241D (A)(B) (A)(B) 4 2 4 2 5 1 3 u 5 1 3 u (R1)(P)(R2) (R1)(P)(R2) 3 position: SQ1 41 3 4 5 3 position: SQ1 40 3 4 5 y e e q y w e e q w u u SQ1540 SQ1440 SQ1340 SQ1541

3 Position Cylinder Series RZQ

P2 [MPa] 0.75P1 0.75P1-0.012m 0.75P1-0.0078m 0.75P1-0.0050m 0.75P1-0.0031m 1.5P1-0.024m 1.5P1-0.016m 1.5P1-0.010m 1.5P1-0.0063m Bore size (mm) 32 40 50 63 32 40 50 63 Orientation Circuit Horizontal A Graph 3 10 Line Circuit Orientation Movement Down A r e Extension 2 3 4 5 A Horizontal e r Retraction e Extension A Down Overrun (mm) e Retraction Up C w q Extension 1 B Up e Retraction q P1

Rotary Cylinder Series MRQ Size: 32, 40 1

F: Angle adjustment range 5 E: Angle adjustment range 5 E: Angle adjustment range 5 B port Angle adjustment screw A port Clockwise rotation 0 8 0 e Allowable Lateral Load to the Piston Rod End gl 10 n a e nt gl e an m st t en u dj m a m st u ju m i in ad M Using friction fittings makes it easier to mount the load to the piston rod end.

Cylinder with Lock Series CNS

Max. load current or load current range (mA) D-A53 None PLC 5 to 50 24VDC 5 to 50 24VDC 5 to 25 100VAC Relay, PLC D-A54 5 to 12.5 200VAC None D-A56 20 IC circuit 4 to 8VDC 50 24VAC/DC or less None D-A64 25 100VAC Relay, PLC 12.5 200VAC None 30 Max. 24VDC None IC circuit, PLC D-A67 (2 color indication) 5 to 40 Relay, PLC 24VDC D-A59W None PLC 5 to 50 D-A33 24VDC 5 to 50 24VDC D-A34

0.4

Note 2) A combination of Function N (Negative common) and E is unavailable. Since E has no polarity, it can also be used as a negative common.

Environment

Refer to the LECA Operation Manual for installation. e CC-Link direct input type (LECPMJ) is not CE-compliant. t Lead [mm] Symbol LEFS16 LEFS25 LEFS32 LEFS40 A 10 12 16 20 B 5 6 8 10 y Stroke [mm] 50 50 to to 1000 1000 * Refer to the applicable stroke table.

Magnetically Coupled Rodless Cylinder

G NN ( I ) D X NA R Mounting nut N W K N S + Stroke F F ZZ + Stroke H B E G Mounting nut NN NA F N CY3B15 (mm) Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

G NN ( I ) D X NA R Mounting nut N W K N S + Stroke F F ZZ + Stroke H B E G Mounting nut NN NA F N CY3B15 (mm) Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1

Compact Guide Cylinder

92 Bore size [mm] WA WB X XA XB XC XL YY YL Z 25 st or less Over 25 st 100 st or less Over 100 st 25 st or less Over 25 st 100 st or less Over 100 st 32 24 48 124 33 45 83 42 4 4.5 3 6 M8 x 1.25 16 21 40 24 48 124 34 46 84 50 4 4.5 3 6 M8 x 1.25 16 22 50 24 48 124 36 48 86 66 5 6 4 8 M10 x 1.5 20 24 [mm] MGPKL: A, DB, and E Dimensions Bore size [mm] A DB E 50 st or less Over 50 st 100 st

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,

MHF2

+0.030 0 depth 3 36 36 36 4H9 +0.030 0 depth 3 4-M5 x 0.8 thread depth 12 Mounting thread 6 127.5 5 Finger closing port M5 x 0.8 50 142 2-M5 x 0.8 thread depth 5.5 122 26 10.6 Mounting thread E 20 20 24 33 E 0 -0.1 1.2 4-4.3 through (Mounting hole) 27 37 1.2 37 M5 x 0.8 Finger opening port 4-7.5 +0.1 0 Close: 0 E-E Open: 641 8-M4 x 0.7 thread depth 4 106 Attachment mounting thread 4-M5 x

MHF2

11 11 14 19 E 0 -0.1 4-2.6 through (Mounting hole) M3 x 0.5 17 18 0.8 18 0.8 Finger closing port M3 x 0.5 4-4.5 +0.1 0 Finger opening port Close: 0 E-E Open: 321 Use the attached hexagon socket head screws for mounting holes. 8-M2.5 x 0.45 thread depth 3 Attachment mounting thread 4-M3 x 0.5 thread depth 4 Mounting thread 50 Auto Switch Mounting Groove Dimensions M2.5 x 0.45 4 1.3 15 26

SMC Pneumatic Clean Series

, 75, 100, 125, 150 Relief type Vacuum suction type 1/8 25, 50, 75,100, 125, 150, 200 1/4 Not available 25, 50, 75, 100, 125, 150, 200, 250, 300 Non-lube Double acting, single rod Available Available 25, 50, 75, 100, 125, 150 1/8 25,50,75,100,125,150,200 1/4 25,50,75,100,125,150,200,250,300 Specifications Suction flow rate of vacuum suction type (Reference values) Bore size (mm) Item 20/25