Compact and Lightweight

Exhaust Characteristics Flow Rate Characteristics 100 100 100 100 200 200 Vacuum pressure Vacuum pressure Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] ZK2 80 80 80 80 160 160 Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Air consumption Air consumption ZQ 60 60 60 60 120

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Entry Vertical ~ _~ Connection Male thread Female thread Vacuum ~2~8 Ms x O.8,M6 x l M4 X O.7,MS X O.8 entry Thread 11O ~16 MS X O.8,M6 x l M5 X O.8,M6 x l ,Ys dia. 120-~32 M6 X l ,M8 x l MsxO.8,M6x I ,M8 x l .2S,Y, -140'1S0 M6 X l ,M8 x l M6 Xl,M8 x 1.25, Va Mounting Use connection for vacuum entry NBR(Black!

MY2

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

Compact Cylinder with Air Cushion

Mounting bolt C D Mounting bolt Mounting bolt D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

CJ5-S

80 291 257 CG-E080SUS 100 22 235 14 23 6 40 80 87.2 57 9 144.5 120 80 292 258 CG-E080SUS Plug bolts are installed when shipped from factory.

RHC

Solenoid valve ( ): Effective area [mm2] : Metal : Metal seal Speed controller Composed effective area (mm2) E 64.8 to 67 D 36 to 45 VQ4000 (36.0) VQ4000 (39.6) VFR3000 (41.4) VFS3000 (36.0) G 180 to 300 VFR6000 (191) VFS6000 (180) VP70 (300) F 102.6 to 120 2 Standard type 1 With One-touch fittings C 16.2 to 21.6 VQ2000 (16.2) SY7000 (21.6) SX7000 (21.6) Elbow type 1-A Refer to System

CM2

22 10 33.5 17 32 37 6 8 0 0.033 26 2032 45 8 75 60 4 40 7 19.5 13 22 12 37.5 17 32 37 6 8 0 0.033 26 40 50 11 82 36 66 5 52 7 21 16 24 14 46.5 22 41 47.3 8 10 0 0.039 32 Data With Air Cushion Built-in One-touch Fittings Bore size (mm) Bore size (mm) MM K NN ZZ NA Z N P S Q WB N1 P WA G Bore size (mm) 20 20 20 5 116 24 107 15 62 M8 x 1.25 M20 x 1.5 1/8 21.5 8.5 6 13 8 17.5 25 25 25 5.5 120

CQM

145 30 35 40 45 50 55 60 65 70 75 30 35 40 45 50 55 60 65 70 75 110 135 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 115 x 140 M6 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 120 x 145 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 110 x 135 M3 x 25 x 30 x 35 x 40 x 45 x 50 M3 x 25 x 30 x 35 x 40 x 45 x 50 M5 x 25 x

RQ

Mounting bolt C D Mounting bolt Mounting bolt Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

MGC

Data View A-A Mounting dimensions Bore size (mm) Stroke range (mm) N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA A 20 25 32 40 50 75, 100, 125, 150, 200 25 38 80 60 44 25 106 22 M6 110 55 9 6.6 90 75 120 105 13 11 84 32 46 95 70 52 30 120 27 M8 125 65 9 9 100 84 136 120 13 15 89 75, 100 125, 150 200, 250 300 32 50 105 80 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 38 60 125 95

RLQ

YB-03 32, 40 80 9 6.5 10 18 50 d2 d1 YB-05 50, 63 120 11 6.5 12 22 60 L UT C UA (mm) Part No.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

24.5 26.5 66 9.5 7 5 33.6 8 9.2 25 47.5 64 64 26.5 12 110 16 8 25 14 11.5 136 15 M10 x 1.5 28.5 30.5 78 10.5 10 5 41.6 8 9.2 30 56 74 76 35 12 130 20 10 PA (NB) (NA) (N) MM ta M tb Q PW PB P Z TT T QW NN W RW Model Shock absorber 45 RB0805 0.5 M5 x 0.8 M8 x 1.0 8 1.0 90 95 70 M5 x 0.8 CY1L15 CY1L20 CY1L25 CY1L32 CY1L40 112 22.5 12.5 30 92 15 17 27 7.5 Rc 1/8 50 RB1006 M6 x 1.0 10 105 120

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

EXxx-OMW0014CN

)mm 28.616061.5 150 g . 10-5 EX245-EA2-5 Item (WLH)mm 27.612061.5 120 g 73 No.EX-OMW0014CN-A 11. 11.1.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

122.2 <124.2> 100 22.6 100 120 80 25 75 50 n 1 0 8 6 4 2 50 67.5 <69.5> L1 8 67.5 <69.5> 64.9 L2 4 x 9 (for M8 mounting) 3 port valve 2 port valve 64.9 50 8 10.5 Leakage detection port Pilot port C4: 4 One-touch fitting C6: 6 One-touch fitting G1/4 (RETURN port) G1/4 (IN port) 30 31 0.5 to 2 0.5 to 2 10 10 0.5 to 2 0.5 to 2 n-1 5 3 1 1 2 122.2 <124.2> 142.2 <144.2> 22.6 100 120 80 25 75

Compact Rotary Actuator

The end angular speed is obtained by: Table8 Allowable kinetic energy Size Allowable kinetic energy mJ Cushion angle No cushion Cushion type 10 0.25 15 0.39 20 25 120 40 30 48 250 40 40 81 400 40 Allowable kinetic energy of cushion type is max. adsorption energy when the cushion needle adjustment is optimum.

MHx-OMY0005

MHF2-8D MHF2-12D MHF2-16D MHF2-20D mm 8 12 16 20 MPa 0.150.7 0.10.7 oC -1060 mm 1) 0.05 120 c.p.m. 120 60 2) 1 N 19 48 90 141 8 12 16 20 () mm 16 24 32 40 32 48 64 80 65 155 350 645 85 190 445 850 3) g 120 275 650 1,225 1) 0.15mm 2) 0.5MPaL=20mm 3) 4 2 2-1 1. ( ) 2. 3. 4. 2-2. 1. 2. (1) (2) (3) 5 3. 4. 5. 6. (1) (2) ,2 , 7.

DOC1023125

Speed loop P constant A 110 140 140 1 to 200 B 120 75 100 C 150 120 120 H 50 80 80 Sets the speed loop I constant. *Please perform the actuator operation after changing this parameter setting under the responsibility of the user. Speed loop I constant A 110 50 50 10 to 200 B 90 60 60 C 100 60 60 Positioning time level 2 2 2 Sets the time to generate the positioning time error alarm.

JXCx-OMT0005CN

68h /IO IO IO DeviceNet 0Eh Get_Attribute_Single 10h Set_Attribute_Single Attribute Access Size Name Semantics of Value 100 Get 2 101 Get 2 102 Get 4 103 Get 2 104 Get 2 105 Get 4 106 Get 1 1 107 Get 1 2 108 Get 1 3 109 Get 1 4 110 Get/Set 2 111 Get/Set 2 112 Get/Set 1 113 Get/Set 2 114 Get/Set 2 115 Get/Set 4 116 Get/Set 2 117 Get/Set 2 118 Get/Set 2 119 Get/Set 2 120

SFOD-OMT0009CN

120 [mm/s] 5 5 5 5 5 5 () [mm/s] 8 8 8 9 9 9 () 110 No.SFOD-OMT0009CN-B LEHF10 LEHF20 LEHF32 LEHF40 K [mm] 40/15 50/15 70/16 70/16 (2.667) (3.333) (4.375) (4.375) [mm/s] 80 100 100 100 [mm/s] 5 5 5 5 () [mm/s] 7 8 8 8 () LEHS10 LEHS20 LEHS32 LEHS40 K [mm] 255/76 235/56 235/40 235/40 (3.355) (4.196) (5.875) (5.875) [mm/s] 70 80 100 120 [mm/s] 5 5 5 5 () [mm/s] 8 8 9 9 () 111 No.SFOD-OMT0009CN-B