VZ3000

Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center 2 position 0.47 0.41 0.41 0.47 0.13 0.13 M5 x 0.8 M5 x 0.8 0.49 0.46 0.49 [0.39] 0.40 0.43 [0.35] 0.42 0.44 0.37 0.51 [0.38] 0.44 0.47 [0.39] 0.45 0.13 0.12 0.14 [0.10] 0.12 0.13 [0.10] 0.12 VZ320--M5 3 position 130 75 120

EX120/121/122

indicator LED INPUT UNIT 1 0 NPN 3 2 PWR 5 4 7 6 0 1 3 2 120 PNP 4 5 6 7 Input equipment connection connector (M12, 5 pins, plug) 61.5 4 54 EX 69.6 End Case Assembly EX240-EA2 EX240-EA4 120 120 22.1 98.8 5.6 2 x M5 (for mounting hole) 61.5 61.5 14 14 28.6 EX240-EA3 120 61.5 14 23.5 1663 Integrated Type/ For Input/Output Series EX250 u VQC1000/2000/4000 S0700 SV1000/2000/3000 e r q w y t

IO-Link/ELECTRO-PNEUMATIC REGULATOR

COMMUNICATION The range of the LED pressure display is different according to the pressure range and the unit of the display. unit ITV*01* ITV*03* ITV*05* ITV209* MPa 020 to .120 100 to 600 180 to .A80 Kgf/cm2 020 to .120 100 to 6.00 180 to A.80 bar 020 to .120 100 to 6.00 180 to A.80 PSI 30 to 18.0 140 to 84.0 -26 to 156 kPa -20 to 120 -100 to 600 -180 to A80 16 to -96 (note1)The mark ""

LG1H

(S2) 200 to 230 VAC encoder) Absolute Power supply voltage 50/60 Hz AC servo motor (S7) AC servo motor (S3) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz AC servo motor (S6) 100 to 120 VAC Pulse input type 50/60 Hz AC servo motor (S7) (For absolute AC servo motor (S6) 200 to 230 VAC encoder) 50/60 Hz AC servo motor (S7) Dimensions LECSA 2 x 6 Mounting hole 40 135 (Bearing surface

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

(S2) 200 to 230 VAC encoder) Absolute Power supply voltage 50/60 Hz AC servo motor (S7) AC servo motor (S3) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz AC servo motor (S6) 100 to 120 VAC Pulse input type 50/60 Hz AC servo motor (S7) (For absolute AC servo motor (S6) 200 to 230 VAC encoder) 50/60 Hz AC servo motor (S7) Dimensions LECSA 2 x 6 Mounting hole 40 135 (Bearing surface

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 1021-VV5Q21 (Serial transmission kit: EX240) L2 (In case of 1 pc. input block: 8 number of inputs) L1 14.6 8.1 (143) 54 P = 16 34.5 6.5 16.5 1 Min. 0 to Max. 4 unit (0 to 216 mm) 4 x M5 mounting hole 0.9 Manual override Indicator light 120 8 120 4 80 10.5 If the input block is attached, it comes with a bracket n 8 Stations 7 6 5 4 3 2 1 Input

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 1021-VV5Q21 (Serial transmission kit: EX240) L2 (In case of 1 pc. input block: 8 number of inputs) L1 14.6 8.1 (143) 54 P = 16 34.5 6.5 16.5 1 Min. 0 to Max. 4 unit (0 to 216 mm) 4 x M5 mounting hole 0.9 Manual override Indicator light 120 8 120 4 80 10.5 If the input block is attached, it comes with a bracket n 8 Stations 7 6 5 4 3 2 1 Input

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

44 48 60 74 78 100 120 114 136 167 190 211 237 264 Double clevis style: (D) Clevis pins and cotter pins are included.

PFxx-OMX0002

(Displays 0 when the (Displays 0 when the (Displays 0 when the value is below 30 L/min) value is below 60 L/min) value is below 120 L/min) 60 to 3150 L/min 120 to 6300 L/min 240 to 12600 L/min 2.0 0 to 2%F.S.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

) 1.70 (1.74) 2.63 (2.67) 4.59 (4.74) 6.65 (6.86) Single clevis 100+55 (n4) 2 n=4, 8, 12, 16, 110+55 (n4) 2 n=4, 8, 12, 16, 120+55 (n4) 2 n=4, 8, 12, 16, 20+55 n=2, 4, 6, 8, 90+55 (n4) 2 n=4, 8, 12, 16, (n2) 2 D-A59W n (Same side) 1.16 (1.21) 1.79 (1.84) 2.79 (2.83) 4.88 (5.03) 7.17 (7.38) Double clevis 90 100 110 120 15 1 2 (Dif. / same side(s)), 1 D-F5W, J59W D-F5BAL D-F59F D-F5NTL

Series IDG

Standard dew point 60C: Approx. 120 min. This time can be shortened as described below. 1) Provide a valve on the downstream side of the membrane air dryer. 2) Supply air with the valve closed. Only purge air flows into the membrane air dryer. 3) After 15 minutes or more, open the valve and let air flow to the downstream equipment. 4.

MGP

FB 50 Stroke 66 67.5 109 109 117.5 117.5 121 141 51 Stroke or more 97.5 99 114 114 129 129 148 166 20 25 32 40 50 63 80 100 66 67.5 71.5 78 83 88 102.5 120 19 20 22 22 23 23 24 29 * Other dimensions are same as standard.

Digital Flow Switch

Wide range of flow measurement with one product 6000 10 12000 Applicable flow range [L/min] Port size 30 60 120 500 1000 3000 30 3000 3000 L type PF3A703H 1 60 6000 6000 L type PF3A706H 1 1/2 120 12000 12000 L type PF3A712H 2 Pressure loss: 75% reduction*1 Improved drainage and resistance to foreign matter (20 kPa / 5 kPa) *1 Compared with the current model (PF2A7H/Large flow type).

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

) 2.63 (2.67) 4.59 (4.74) 6.65 (6.86) Single clevis 100+55 (n4) 2 n=4, 8, 12, 16, 110+55 (n4) 2 n=4, 8, 12, 16, 120+55 (n4) 2 n=4, 8, 12, 16, 20+55 n=2, 4, 6, 8, 90+55 (n4) 2 n=4, 8, 12, 16, (n2) 2 D-A59W n (Same side) 1.16 (1.21) 1.79 (1.84) 2.79 (2.83) 4.88 (5.03) 7.17 (7.38) Double clevis 90 100 15 110 120 1 2 (Dif. / same side(s)), 1 D-F5W, J59W D-F5BAL D-F59F D-F5NTL 110 120 130

Booster Regulator/Air Tank

Connected to VBA20A Connected to VBA22A Tank IN port Rc 3/8 Booster regulator IN port Rc 3/8 Booster regulator IN port Rc 3/8 Spare port Rc 1/2 EXH: Rc 3/8 EXH: Rc 3/8 (454) 442 (417) 60 (367) (367) OUT OUT Tank OUT port Rc 1/2 278 180 180 170 4 x 11 4 x 11 32 32 312 120 180 180 120 Drain port Rc 1/4 460 471 The length may be longer than the specification if the plugs mounted on the tank

Combination Cylinder

Stroke Refer to p.1.13-3 for maximum stroke of CA1 series 40 to 100 and p.1.14-3 for maximum stroke of CS1 series 120 to 160. Minimum Strokes for Auto Switch Mounting Refer to following pages for minimum strokes for auto switch mounting.

Compact Proportional Solenoid Valve Series PVQ

) 24 VDC 12 VDC SRP PVQ30 (2.3) SRF 120 ARX20 P = 0.35 MPa 100 P = 0.25 MPa VCHR Flow rate (l/min) 80 P = 0.18 MPa ITV 60 P = 0.1 MPa 40 IC 20 PVQ 0 0 0 20 40 40 80 60 120 80 160 100 200 120 240 140 280 160 320 180 360 200 400 Current (mA) 24 VDC 12 VDC VEF VEP VER PVQ30 (4.0) VEA 120 100 P = 0.12 MPa VY2 Flow rate (l/min) P = 0.08 MPa 80 VBA VBAT P = 0.06 MPa 60 AP100 40 P = 0.04 MPa

NCG/CG1

120 120 126 160 185 145 145 151 135 165.5 190.5 215.5 140.5 167.5 192.5 217.5 142.5 185 210 235 160 Other dimensions are the same as basic style.

Air Cylinder

15 90 (n 2) 90 + 55 (n 4) 100 + 55 (n 4) 110 + 55 (n 4) 120 + 55 (n 4) 15 + 55 2 2 2 2 2 n (Same surface) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 2 (Different surfaces 20 90 100 110 120 and same surface) 1 20 + 55 (n 2) (n 4) 100 + 55 (n 4) 110 + 55 (n 4) 120 + 55 (n 4) D-A59W 90 + 55 2 2 2 2 2 n (Same surface) (n = 2, 4, 6,

Compressed Air Cleaning Filter Series

Bracket mounting hole Bracket (Option) (Both sides) (Maintenance space) 120 Drain inlet 1/2 female threaded (Refer to How to Order for type of thread.) 100 200 8 7 16 155 10 30 Octagonal width across flats 30 Model no. label (176) 189 171 Caution label Hexagon width across flats 27 Drain outlet 1/2 female threaded (Refer to How to Order for type of thread.)